Dentons Installation Update:

Both systems are in place in the Thin Films Deposition Bay F in SMBB. We have been doing a significant amount of decontamination and cleaning in an effort to NOT introduce any oil or hydrocarbons into the SMBB nanofab. We have also tried to address the cryo pump long-term maintenance during this downtime, both systems will have rebuilt pumps for start-up. All this has taken a little longer than our estimate, which is now to be qualifying systems for use on Wednesday.

Sorry for any inconvenience this may be causing.

Steve Pritchett

Nanofab Staff