ME EN 2960 FOUNDATIONS OF MICROSYSTEMS
A “hands-on” introduction to the world of micro and nanosystems for engineering students. Students understand the wealth of existing applications and future inventive possibilities at the micrometer and nanometer scale. Laboratory exercises consist of dissection of IPOD MP3 players, building solar cells, and sensor design. Students introduced to Bottom-up (Atomic building blocks) and Top-down (Lithography, Deposition) approach to micro and nanotechnology. Visualization by Scanning Electron Microscopy.
ECE 5221 / ME EN 5050 FUNDAMENTALS OF MICROMACHINING PROCESSES
Introduction to the principles of micromachining technologies. Topics include photolithography, silicon etching, thin film deposition and etching, electroplating, polymer micromachining, and bonding techniques.
ME/ECE/MetE 5055 Microsystems Design and Characterization
This course generalizes MicroSystems design considerations with practical emphasis on MEMS and IC characterization and physical analysis. Students will investigate design for reliability (DOE), performance characterization (reliability testing and analysis), and physical characterization of microdevices.
ME 5960-001 Microfluidic Chip Design & Fabrication
(meets w/ ME EN 6960-001; BIOEN 5900-003, 6900-003; ECE 5961-001, 6961-002)
Introduction to the principles of microfluidic and microfluidic fabrication technologies. Topics include microscale fluid dynamics, fluid modeling, polymer micromachining, silicon and glass micromachining, experimental flow characterization, and microfluidic design. A weekly lab and a review of microfluidic applications is included. Hands on experience with microfabrication technologies and soft lithography at the Utah Nanofab facilities.
ECE 5961 PRACTICAL SCANNING ELECTRON MICROSCOPY
Cross listed with PHYS 5739 and MetE 7910
Students learn multiple advanced microscopy applications using state-of-the art imaging tools and analytical peripherals and receive hands-on training on electron microscopes (EDS, EBSD, XRF).
ECE 6231/7231 MICROSENSORS
Design and simulation of microsensors and actuators, process design, packaging and assembly, characterization and testing of microsensors and actuators as well as reliability issues. Fabrication & characterization of fully functional microsensors or actuators.
ECE 6960 ADVANCED VLSI MEMORY DESIGN
The goal of this course is to introduce graduate students to the design of VLSI memories. The course will cover static, dynamic and non-volatile memories by carefully considering device technology, circuit design and system integration. Labs will include microfabrication of nonvolatile memory cells.
ECE 7960 SURFACE CHEMISTRY & ANALYSIS
Cross listed as CHEM 7780 and MET E 7910
Introduction to physics and chemistry of solid surfaces. The lab section of the course is designed to provide a working knowledge for the operation of the Kratos Axis Ultra XPS/AES/ISS surface analysis system.
Short Courses
The Surface Analysis Lab regularly offers a 6-week Scanning Electron Microscopy and Microanalysis short course. This covers the basic of electron microscopy with emphasis on techniques on secondary and backscattered electron imaging. Supplementary courses on elemental analysis via energy dispersive x-ray (EDS) and crystal orientation analysis via electron backscatter diffraction (EBSD) are also offered. An introduction to ultra-high resolution SEM using the Helios focused ion beam is also included. This short course is offered during summer (May – June).
We also conduct a short course for Scanning/Transmission Electron Microscopy in our JEOL 2800 S/TEM. This consists of 7-week lecture and lab classes that cover fundamental concepts on TEM and S/TEM mode bright field and dark field imaging, electron diffraction (selected area, nanobeam, and convergent beam modes), energy dispersive x-ray spectroscopy, and tomography (STEM and EDS modes). This short course is offered in spring (January – February) and fall (September – October) semesters.
One-on-one training for most instruments are also offered by the Surface Analysis Lab. Contact us for information regarding instrument trainings.