Chemical Safety Data Sheets

Chemical Name Manufacturer                   SDS Chemical Components            HMIS Classification
Health hazard / Chronic Health Hazard /     Flammability / Physical hazards
    NFPA Rating
Health hazard/ Fire / Reactivity Hazard
    GHS Hazards
Zinc Oxide Pieces Kurt J Lesker Company Zinc Oxide [Lesker, 24May12] (1) Zinc Oxide 1  / n/a / 0 / 0 1 / 0 / 0
Toluene Sigma-Aldrich  Toluene [Sigma-Aldrich, 06Sep13_v5.2]  Tolune 2 / * / 3 / 0 2 / 3 / 0
Tris-(8-hydroxyquinoline)aluminum Sigma-Aldrich  Tris-(8-hydroxyquinoline)aluminum [Sigma-Aldrich, 05Nov12_v5.2]
Aluminium tris(quinol8-olate
2 / n/a / 0 / 0 2 / 0 / 0
Vanadium dioxide  Vanadium dioxide [Generic]  Vanadium Oxide 2 / n/a/ 0 / 1 N/A
WaferBOND Brewer Science, Inc  WaferBOND [Brewer Science, 16Feb06]  1-Dodecene / 2-Ethyl-1-Decene / 2-Butyl-1-Octene / Resin solids 1 / * / 2 / 0 1 / 2 / 0
Titanium(IV) oxide Sigma-Aldrich  Titanium(IV) oxide [Sigma-Aldrich, 27Feb15_v4.14] Titanium dioxide / nanoparticles range in size from 1 to 150 nm 1 / * / 0 / 0 2 / 0 / 0
Trans-LC Air Products and Chemicals, Inc  Trans-LC [Air Products, 15Feb14_v3.2] trans-Dichloroethylene 2 / n/a / 3 / 2 2/ 3 / 3
Titanium dioxide Sciencelab.com, Inc.  Titanium dioxide [ScienceLab, 21May13]  Titanium dioxide 1 / n/a / 0 / 0 1 / 0 / 0
Thinner for Photoresists ma-T 1050 micro resist technology GmbH  Thinner for Photoresists ma-T 1050 [Micro Resist Technology, 01May13_v3] 2-methoxy-1-methylethyl acetate 2 / n/a / 2 / 0 2 / 2 / 0
 Techni Nickel HT-2 RTU  Teching Inc  Techni Nickel HT-2 RTU [Technic, 02Aug13]  Nickel Sulfate / Boric Acid 2 / n/a / 0 / 0 N/A
 Tetrahydrofuran Sigma-Aldrich  Tetrahydrofuran [Sigma-Aldrich, 01Jul14_v4.1] Tetrahydrofuran 2 / * / 3 / 0 2 / 3 / 0
Tetrakis(dimethylamino)titanium(IV) Strem Chemicals, Inc.  Tetrakis(dimethylamino)titanium(IV), 99% TDMAT [Strem, 31Jul16] Tetrakis(dimethylamino)titanium(IV), 99% TDMAT 3 / n/a / 3 / 2 3 / 3 / 2
SYLGARD(R) 184 SILICONE ELASTOMER KIT (CURING AGENT) Dow Corning Corporation  SYLGARD(R) 184 SILICONE ELASTOMER KIT, CURING AGENT [Dow Corning, 25May16_v5] (1) MixtureChemical / Silicone resin solution 0 / n/a / 1 / 1 0 / 1 / 0
SYLGARD(R) 184 SILICONE ELASTOMER KIT (BASE Dow Corning Corporation  SYLGARD(R) 184 SILICONE ELASTOMER KIT, CURING AGENT [Dow Corning, 25May16_v5] (1) Ethylbenzene 0 / n/a / 1 / 1 0 / 1 / 0
SU-8 2000 serires resits micro chem corp  SU-8 2000 Series Resists [MicroChem, 19Mar13] Epoxy Resin / cyclopentanone / polypropylene carbonate 2 / n/a / 3 / 0 2 / 3 / 0
Poly(methyl methacrylate) Sigma Aldrich  Poly(methyl methacrylate) (PMMA) [Sigma-Aldrich, 07Mar14_v4.2]  Poly(methacrylic acid methyl ester)  0 / n/a / 0 / 0  0 / 0 / 0
SULFAMATE NICKEL SN-10 MANUFACTURER: TRANSENE COMPANY, INC.  SULFAMATE NICKEL SN-10 [Transene, 01Aug13] Nickel Sulfamate / Boric Acid / Nickel Chloride / Water < 2 / 0 / 0 1 / 0 / 0
SU-8 Series Resists Micro Chem  SU-8 Series Resists [MicroChem, 12Dec01] Gamma Butyrolactone (CAS: 96-48-0); 22-60%Mixed Triarylsulfonium/ Hexafluoroantimonate Salt; (CAS: 89452-37-9)/(CAS: 71449-78-0) / Propylene Carbonate (CAS: 108-32-7); 1-5%Epoxy Resin (CAS: 28906-96-9); 35-75% 2 / n/a / 1 / 0 2 / 1 / 0
SR-351 Sartomer Company Inc  SR351 [Sartomer, 29Jun11] Trimethylolpropane Triacrylate n/a 2 / 1 / 1
SU-8 3000 Series Resists Micro Chem  SU-8 3000 Series Resists [MicroChem, 13Apr09] Cyclopentanoneiorm-aldehyde / polymer with (chloromethyl)oxirane or4 4 / r”i-Q-methylethylidene)by[Ohengl]sulfonium / (thiodl-q,l-phenytene) bis[diphenyl- / (oC-6-l l)-hexaJluoroantimonde (l) (l:2)Suifonium / diphenyl[4-(phenylthio)phenylJ- / QC-6-l I)-hexaJluoroantimonde(I) (I: l)’ Hazard statements 3 / 2 / 0 3 / 2 / 0
SU-8 Developer Micro Chem SU-8 Developer [MicroChem, 06Nov08]  1-Methoxy-2-propanol acetate (CAS: 108-65-6)/ >99.5% Synonym: propylene glycol monomethyl ether acetate 2-Methoxy-1-propanol acetate (CAS: 70657-70-4)/ <0.5% 1 / 2 / 0
Sodium beta alumina Materials & Systems Research, Inc. Sodium beta alumina [MSRI, 14Nov13] Sodium beta alumina n/a n/a
Silver Conductive Epoxy Adhesive B: Moderate Cure/HighConductivity MG Chemicals SILVER CONDUCTIVE EPOXY ADHESIVE 8331-PART B [MG Chemicals, 14Jan13_v2.01] silver / 4-nonylphenol, branched / 2-piperazin-1-ylethylamine / Diethylene triamine, reaction product with diglycidyl ether of Bisphenol A/ Diethylenetriamine / 4,4′-isopropylidene-diphenolv 3 / 1 / 0 3 / 1 / 0
SILQUEST A-174 SILANE Momentive Performance Materials -Sistersville SILQUEST A-174 SILANE [Momentive, 01Sep16_v1.2] MEQUINOL 2 / 1 / 1 n/a
Silver Conductive Epoxy Adhesive A: ModerateCure/ High Conductivity MG Chemicals SILVER CONDUCTIVE EPOXY ADHESIVE 8331-PART A [MG Chemicals, 14Jan13_v2.01] silver>5 g/kgGuinea Pig / 4′-methylenebis [N,N-bis(2-oxiranylmethyl) aniline n/a n/a
Silane-Poly (Ethylene Glycol)-Silane Layson Bio inc Silane-Poly (Ethylene Glycol)-Silane, Average MW 3400 [Laysan Bio, 01Apr13] n/a n/a n/a
QuickSet Acrylic Powder Allied High Tech Products, Inc Quickset Acrylic Powder [Allied, 01Jan13] Benzoyl Peroxide<2% / Polyethylmethacrylate<99% 1 / n/a / 1 / 0 n/a
PTZ Sol-Gel Solution Mitsubishi PZT Sol-Gel Solution N-Series [Mitsubishi, 06Jun14] Lead di(acetate) / >Zicronium tetrabutanolate / Titanium tetraisopropanolate /Ethanol /Butan-1-ol / Octane-1-ol / Proylene glycol n/a n/a
Saccharin Sigma-Aldrich Saccharin [Sigma-Aldrich, 19Apr13_v5.2] 1,2-Benzisothiazol-3(2H)-one 1,1-dioxide 0 / * / 0 / 0 0 / 0 / 0
PSI-5A4E & PSI-5H4E Piezo Systems, Inc. PSI-5A4E & PSI-5H4E [Piezo Systems, 04Jan13] Lead Oxide / Zirconium Oxide / Titanium Oxide / Lanthanum Oxide / Niobium Oxide / Nickel Oxide n/a n/a
Pyrex Borosilicate Glass GC-7740 Corning Incorporated Pyrex Borosilicate Glass, GC-7740 [Corning Incorporated, 06Nov02_v2] Glass, oxide/ chemicals n/a n/a
Polyvinylpyrrolidone Sigma Aldrich Polyvinylpyrrolidone [Sigma-Aldrich, 08May12_v4.2] 0 / n/a / 0 / 0 0 / 0 / 0
Propylene glycol monomethyl ether acetate Sigma Aldrich Propylene glycol monomethyl ether acetate (PGMEA) [Sigma-Aldrich, 26Nov12_v4.8] 2-Methoxy-1-methylethyl acetate 0 / 2 / * / 0 / 0 0 / 2 / 0
PositivePhotoResist–KL5300 KemLab Positive PhotoResist – KL5300 [KemLab, 27Feb15_v1] Electronic grade propylene glycol monomethyl ether acetate108-65-6>60.0%Mixed cresol novolak resin<25.0%Diazo Photoactive Compound<4.0%Fluorinated Surfactant<1.0%Cresol n/a 2 /2 / 0
Poly[4,5-difluoro-2,2-bis(trifluoromethyl)-1,3-dioxole-co-tetrafluoroethylene] Sigma-Aldrich Poly[4,5-difluoro-2,2-bis(trifluoromethyl)-1,3-dioxole-cotetrafluoroethylene] [Sigma-Aldrich, 23May12_v5] Poly(Disperse Red 1 acrylate) 0 / 0 / 0 / 0 0 / 0 / 0
Poly(Disperse Red 1 methacrylate) Sigma Aldrich Poly(Disperse Red 1 methacrylate) [Sigma-Aldrich, 31Mar14_v4.1] n/a 0 / 0 / 0 / 0 0 / 0 / 0
Poly(3,4-ethylenedioxythiophene)-poly(styrenesulfonate) Sigma-Aldrich Poly(3,4-ethylenedioxythiophene)-poly(styrenesulfonate) (PEDOT) [Sigma-Aldrich, 02Jul14_v4.3] Ethylene glycol / Benzenesulfonic acid, ethenyl-, homopolymer, compd. with 2,3-dihydrothieno[3,4-b]-1,4-dioxin homopolymer 3 / * / 0 / 0 3 / 0 / 0
PMGI SFG Series Resists MicroChem Corp. PMGI SFG Series Resists [MicroChem, 20Aug13] 1-methoxy-2-propanolCyclopentanone 2 / n/a / 3 / 0 2 / 3 / 0
Phosphosilicate Solution Filmtronics Inc. Phosphosilicate Solution [Filmtronics, 01Oct15_v2] Ethanol / Phosphorus Polymer Ingredient #2v / Phosphorus Polymer Ingredient #1 n/a n/a
PI 2611 HD MicroSystems™ PI 2611 [HD Microsystems, 02Jan14_v2.2] (1) N-Methyl-2-pyrrolidone / Polyimide n/a n/a
PLATINUM-DIVINYLTETRAMETHYLDISILOXANECOMPLEX GELEST, INC. PLATINUM – DIVINYLTETRAMETHYLDISILOXANE COMPLEX in XYLENE – SIP6831.2 [Gelest, 17Aug07] PLATINUM – DIVINYLTETRAMETHYLDISILOXANE COMPLEX / XYLENE 2 / 1 / 0 n/a
PFA Fluoropolymer Resin DuPont PFA Fluoropolymer Resin [Dupont, 12Jun12_v4] Tetrafluoroethylene/perfluoroalkylvinylether copolymer 2 / 1 / 0 0 / 0 / 0
PMGI 101A Developer MicroChem Corp PMGI 101A Developer [MicroChem, 19Apr12] tetraethylammonium hydroxide 2 / 0 / 0 2 / 0 / 0
Phosphosilicate Solution Filmtronics Inc Phosphosilicate Solution [Filmtronics, 01Oct15_v2] (1) Ethanol / Phosphorus Polymer Ingredient #2 / Phosphorus Polymer Ingredient #1 / Water n/a n/a
PA-401D HD MicroSystems PA-401D [HD Microsystems, 03Jan07] Cyclopentanone n/a n/a
Pelco® Colloidal Silver Ted Pella, Inc. Pelco® Colloidal Silver [Ted Pella, 01Apr09] Silver (7440-22-4)* / Arcosolve PM (107-98-2) / Toluene (108-88-3) / Ethanol (64-17-5) / Ethyl Acetate (141-78-6 1 / 3 / 0 1 / 3 / 0
PA 400 R HD MicroSystems™ PA 400 R [HD Microsystems, 21Feb13_v2.2] 1-Methoxy-2-propyl acetate n/a n/a
Omnicoat Micro chem corp OmniCoat [MicroChem, 22Aug13] Cyclopentanone / 1- methoxy – propanol 2 / 3 / 0 2 / 3 / 0
JSR KRF M91Y JSR Micro, Inc JSR KRF M91Y [JSR Micro, 08Jul11_v10] Polyhydroxystyrene derivative/ Proprietary Sulfonyl compound / Proprietary Ethyl lactate (EL) / Propyleneglycolmonomethyletheracetate (PGMEA) n/a n/a
N,N′-Bis(3-methylphenyl)-N,N′-diphenylbenzidine Sigma Aldrich N,N′-Bis(3-methylphenyl)-N,N′-diphenylbenzidine (TPD) [Sigma-Aldrich, 30Jul14_v5.6] C38H32N2 0 / 0 / 0 0 / 0 / 0
Nickel(II) sulfamate tetrahydrate Sigma Aldrich Nickel(II) sulfamate tetrahydrate [Sigma-Aldrich, 19Sep12_v3.4] Nickel bis(sulphamidate) tetrahydrate 2 / * / 0 / 0 2 / 0 / 0
Nickel(II) oxide Sigma Aldrich Nickel(II) oxide [Sigma-Aldrich, 28Feb15_v4.1] Nickel monoxide 2 / * / 0 / 0 2 / 0 / 0
NITRIC ACID SOLUTIONS, 0.4% ­ 50% V/V, 0.1N­6.0N Labchem NITRIC ACID SOLUTIONS, 0.4-50% V_V, 0.1-6.0N [Grainger, 13Aug07] Water / Nitric Acid n/a n/a
N,N′-Bis(3-methylphenyl)-N,N′-diphenylbenzidine Sigma-Aldrich N,N′-Bis(3-methylphenyl)-N,N′-diphenylbenzidine (TPD) [Sigma-Aldrich, 04Jul13_v5.3] C38H32N2 0 / 0 / 0 / 0 0 / 0 / 0
mr-I 8000R Series Imprint Polymer micro resist technology GmbH mr-I 8000R Series Imprint Polymer [Micro Resist Technology, 30Apr13_v3.01] 62-methoxy-1-methylethyl acetate 2 / 2 / 1 2 / 2 / 1
Molybdenum(IV) sulfide Sigma-Aldrich Molybdenum(IV) sulfide [Sigma-Aldrich, 07Apr15_v3.8] Molybdenum(V) sulfide 0 / 0 / 0 0 / 0 / 0
MICROPOSIT™ SC™ 1827 POSITIVE PHOTORESIST ROHM AND HAAS ELECTRONIC MATERIALS LLCA Subsidiary of The Dow Chemical Company MICROPOSIT™ SC™ 1827 POSITIVE PHOTORESIST [Rohm Haas, 02Apr04_v3] iazo Photoactive Compound1.0 / Nonionic surfactant / Mixed cresol novolak resin10.0 / Electronic grade propylene glycol monomethyl ether acetate / Cresol n/a 2 / 2 / 0
MICROPOSIT™MF™-CD-26 DEVELOPER ROHM AND HAAS ELECTRONIC MATERIALS LLCA Subsidiary of The Dow Chemical Company MICROPOSIT™ MF™ -CD-26 DEVELOPER [Dow, 20Aug12_v1.1] Tetramethylammonium hydroxide n/a 3 / 0 / 0
MICROPOSIT™S1805™POSITIVE PHOTORESIST ROHM AND HAAS ELECTRONIC MATERIALS LLCA Subsidiary of The Dow Chemical Company MICROPOSIT™ S1805™ POSITIVE PHOTORESIST [Rohm Haas, 08Apr11_v3.2] Electronic grade propylene glycol monomethyl ether acetate / Mixed cresol novolak resin / Diazo Photoactive Compound / Creso / Fluoroaliphatic Polymer Esters n/a 2 / 2 / 0
AZ 5214-E IR Photoresist EMD performance materials corp AZ 5214-E IR Photoresist [AZ Electronic Materials, 04Oct12_v3.2] 1- Methoxy-2-propanal acetate / Diazonaphtoquinonesofulnic esters 2 / 2 / 0 2 / 2 / 0
Molybdenum (IV) sulfide MTI Corporation Molybdenum (IV) sulfide [MTI Corporation] Molybdenum (IV) sulfide 1 / 0 / 1 n/a
MICROPOSIT™351 DEVELOPER ROHM AND HAAS ELECTRONIC MATERIALS LLCA Subsidiary of The Dow Chemical Company MICROPOSIT™ 351 Developer [Dow Corning, 11Mar15_v2] Aqueous solution of inorganic compounds n/a 3 / 0 / 1
MICROPOSIT(TM) MF(TM) -319 Developer Rohm and Haas Electronic Materials LLC MICROPOSIT(TM) MF(TM) -319 Developer [Rohm Haas, 01Jan04_v2] Water / Surfactant / Tetramethylammonium hydroxide n/a 3 / 0 / 0
MICROPOSIT S1813 PHOTO RESIST Shipley Company MICROPOSIT S1813 PHOTO RESIST [Shipley, 11Jun98] Electronic grade propylene glycol monomethylether acetate / Mixed cresol novolak resin / Fluoroaliphatic Polymer Esters / Diazo Photoactive Compound / cresol n/a 2 / 2 / 0
METHYL ISOBUTYL KETONE Mallinckrodt Baker, Inc METHYL ISOBUTYL KETONE [Mallinckrodt Baker, 06Jul06] Methyl Isobutyl Ketone 2 / 3 / 2 2 / 3 / 2
LOR B Series Resists MicroChem Corporation LOR B Series Resists [MicroChem, 18Dec08] Cyclopentanone (CAS: 120-92-3); 65-90%. Propylene glycol monomethyl ether (107-98-2); 10-15% Polyaliphatic imide copolymer (CAS: 102322-80-5); 1-20% Proprietary Dye ; 0.1 – 2% Proprietary Surfactant; <1% n/a 2 / 3 / 0
MEGAPOSIT™SPR™220-7.0 POSITIVE THE DOW CHEMICAL COMPANY*Agent for Rohm and Haas Chemicals LLC MEGAPOSIT™ SPR™ 220-7.0 POSITIVE [Rohm Haas, 24Mar15]< a> Cresol novolak resin / Ethyl lactate / %Anisole / Diazo Photoactive Compound / Methyl Butyl Acetate / n-amyl acetate / Cresol / Organic Siloxane Surfactant / Dioxane n/a 2 / 2 / 0
LOR B Series Resists MicroChem Corporation LOR B Series Resists [MicroChem, 18Dec08] (1) Cyclopentanone (CAS: 120-92-3); 65-90%. Propylene glycol monomethyl ether (107-98-2); 10-15% Polyaliphatic imide copolymer (CAS: 102322-80-5); 1-20% Proprietary Dye ; 0.1 – 2% Proprietary Surfactant; <1% n/a 2 / 3 / 0
Methyl Isobutyl Ketone Fisher Scientific Methyl Isobutyl Ketone [Fisher Scientific, 01Nov12_v2] Methylisobutyl ketone n/a n/a
Lead Zirconium Titanate Sputtering Target American Elements Lead Zirconium Titanate Sputtering Target [American Elements, 21Dec10] Lead Zirconium Titanate 1 / 0 / 0 1/ 0 / 0
Iron(II,III) oxide Sigma Aldrich Iron(II,III) oxide [Sigma-Aldrich, 15Dec14_v4.6] Iron (II/III) Oxide 0 / 0 / 0 0 / 0 / 0
Irgacure® PAG103 BASF CORPORATION Irgacure® PAG103 [BASF, 16Sep10_v1.2] Benzeneacetonitrile derivative n/a n/a
Iron(III) p-toluenesulfonate hexahydrate Sigma-Aldrich Iron(III) p-toluenesulfonate hexahydrate [Sigma-Aldrich, 04Sep12_v5] Iron(III) p-toluenesulfonate hexahydrate 2 / 0 / 0
JSR ARF AM 2073J-19 JSR Micro, Inc. JSR ARF AM 2073J-19 [JSR Micro, 15Apr09_v5] Fluorinated poly(meth)acrylate (FARM) 5-25 Proprietary Alicyclic carboxylic ester 0-5 Proprietary Photoacid Generator 0.1-3 Proprietary Propylene glycol monomethyl ether acetate (PGMEA) n/a 1 / 2 / 0
HD 4100 HD MicroSystems™ HD 4100 [HD Microsystems, 03Jun14_v2.1] N-Methyl-2-pyrrolidone 872-50-4 50 – 60 % Polyamic Acid Ester 30 – 40 % 3,6,9-Trioxaundecamethylene dimethacrylate 109-17-1 1 – 10 % Aromatic Oxime n/a n/a
Isopropyl alcohol Sigma-Aldrich Isopropyl alcohol [Sigma-Aldrich, 06Mar15_v5.8] 2-Propanol 2 / * / 3 / 0 2 / 3 / 0
Indium tin oxide coated PET Sigma Aldrich Indium tin oxide coated PET [Sigma-Aldrich, 05mApr14_v4.1] Diindium trioxide / Tin(IV) oxide 2 / * / 0 / 0 2 / 0 / 0
Indium metal pieces Kurt J Lesker Company Indium metal [Lesker, 29Mar12] Indium 0 / 0 / 0 0 / 0 / 0
Indium Oxide-Tin Oxide Alloy Pieces Kurt J Lesker Company Indium Oxide-Tin Oxide Alloy [Lesker, 30Apr12] Indium Oxide / Tin(IV) Oxide 0 / 0 / 0 1 / 0 / 0
INDIUM ANTIMONIDE 5N Plus Fairfield Inc INDIUM ANTIMONIDE [SN Plus Fairfield, 10Feb13] INDIUM ANTIMONIDE n/a n/a
HD-4104 HD MicroSystems HD-4104 [HD Microsystems, 01Oct09] n-Methylpyrrolidone / Esterified Polyamic Acid Resin / Acrylate Ester / Proprietary Ingredient(s) / Proprietary Ingredient(s) n/a n/a
Gold etchant, standard Sigma Aldrich Gold etchant, standard [Sigma-Aldrich, 25Dec12_v4] Potassium iodide / Iodine 3 / * / 1 / 0 3 / 1 / 0
Fluorinert® FC-770 Sigma-Aldrich Fluorinert® FC-770 [Sigma-Aldrich, 17Apr13_v3.3] Fluorinert 0 / 0 / 0 0 / 0 / 0
Gadolinium metal pieces Kurt J Lesker Company Gadolinium metal [Lesker, 29Mar12_v1] Gadolinium 1 / 1 / 1 1 / 1 / 1
ETHYLENE GLYCOL Avantor Performance Materials, Inc. ETHYLENE GLYCOL [Avantor, 19Jun14_v1] ETHYLENE GLYCOL n/a 2 / 1 / 0
Gallium–Indium eutectic Sigma Aldrich Gallium–Indium eutectic [Sigma-Aldrich, 03Jul14_v4.5] Gallium“Indium eutectic 3 / 0 / 0 3 / 0 / 0
ELEVATE CU 6340 CARRIER TECHNIC INC. ELEVATE CU 6340 CARRIER [Technic, 17Sep10] Copper sulfate 1 / 0 / 0 1 / 0 / 0
Ethanol 200 Proof Decon Laboratories, Inc. Ethanol 200 Proof [Decon Labs, 18Jul14] Ethyl Alcohol 1 / 3 / 0 1 / 3 / 0
Aluminum Oxide Pieces Kurt J Lesker Company Aluminum Oxide Pieces [Lesker, 18Sep12_v1] aluminum Oxide n/a n/a
Cadmium telluride Sigma-Aldrich Cadmium telluride [Sigma-Aldrich, 07Mar15_v5.5] Cadmium telluride 2 / * / 0 / 0 2 / 0 / 0
ELEVATE CU 6340 BRIGHTENER TECHNIC INC. ELEVATE CU 6340 BRIGHTENER [Technic, 22Apr10] Copper sulfate / Sulfuric acid / Acrylamide 2 / 0 / 0 n/a
DIELECTRIC COATING DC4-500 Futurrex, Inc DIELECTRIC COATING DC4-500 [Futurrex, 28Oct11] n-Butano / polysiloxane resin 1 / 3 / 0 n/a
CGI 725 BASF CORPORATION CGI 725 [BASF, 06Nov13_v1] This product is not regarded as hazardous under current OSHA Hazard Communication standard; CFR 29 Part 1910.1200. 1 / 1 / 0 1 / 1 / 0
AZ P4210 AZ electronic materials USA corp. AZ P4210 Photoresist [AZ Electronic Materials, 08Nov11_v3.2] 1-Methoxy-2-propanol acetate / Diazonaphthoquinonesonic ester / resol novolak resin 2 / 2 / 0 2 / 2 / 0
Cytop CLT-809M Asahi glass.co hydrogen / fluoride / perfluoro isobutylene Cytop CTL-809M [Asahi Glass, 02Dec02] n/a n/a
Cyclohexanol Sigma-Aldrich Cyclohexanol [Sigma-Aldrich, 18Sep13_v5.2] Cyclohexanol 2 / * / 2 / 0 2 / 2 / 0
Corning® EAGLE XG™ glass substrates Corning Display Technologies Corning® EAGLE XG™ glass substrates [Corning, 09Feb06_v3] glass / Oxide / Chemicals 1 / 0 / 0 n/a
COPPER ETCHANT APS-100 TRANSENE COMPANY, INC. COPPER ETCHANT APS-100 [Transene, 01Sep13_v8 GHS] MaterialAmmonium peroxydisulfate / Water 2 / 0 / 3 n/a
Chlorotrimethylsilane Sigma-Aldrich Chlorotrimethylsilane [Sigma-Aldrich, 17Jun15_v4.1] Chlorotrimethylsilane 3 / * / 3 / 0 3 / 3 / 0
Chloroform Sigma-Aldrich Chloroform [Sigma-Aldrich, 19Jul13_v4.3] Chloroform / Ethanol 2 / * / 0 / 0 2 / 0 / 0
BTE_MSDS American Chemical Society BTE_MSDS_Apratim_Majumder Bithiophene n/a n/a
Azobenzene Sigma-Aldrich Azobenzene [Sigma-Aldrich, 26Nov14_v4.5] Azobenzene / 2 / * / 1 / 0 2 / 1 / 0
AZ 9260 PHOTORESIST (520 CPS) EMD performance materials corp Azobenzene [Sigma-Aldrich, 26Nov14_v4.5] 1-Methoxy-2-propanol acetate / Diazonaphthoquinonesulfonic esters / Methoxy-1-propanol acetate / Cresol novolak resin 2 / 2 / 0 m2 / 2 / 0
AZ nLOF 2020 Photoresist EMD performance materials corp 1-Methoxy-2-propanol acetate / Modified melamine-formaldehyde resin/ 2 – Methoxy-1- propanol acetate / Formaldehyde 2 / 2 / 0 2 / 2 / 0
AZ nLOF®2070 Photoresist Merck Performance Materials GmbH AZ nLOF® 2070 Photoresist [Merck, 17Apr15_v1.1] 1,3-Benzenedimethanol, 2-hydroxy-5-(1,1,3,3-tetramethylbutyl)- n/a n/a
AZ Developer 1:1 AZ electronic materials USAcorp AZ Developer 1to1 [AZ Electronic Materials, 18Dec09_v1] sodium metasilicate 2 / 0 / 0 2 / 0 / 0<
1H,1H,2H,2H-Perfluorooctyltriethoxysilane Sigma-Aldrich 1H,1H,2H,2H-Perfluorooctyltriethoxysilane [Sigma-Aldrich, 21Nov12_v5] 1H, 1H, 2H, 2H-Perfluorooctyl Triethoxysilane 2 / 1 / 0 2 / 1 / 0
AZ 50XT Photoresist EMD Performance Materials Corp. AZ 50XT Photoresist [AZ Electronic Materials, 24Dec14_v4] 1-Methoxy-2-propanol acetate / Diazonaphthoquinonesulfonic esters / Methoxy-1-propanol acetate / Cresol novolak resin 2 / 2 / 0 2 / 2 / 0
Anisole Sigma-Aldrich Anisole [Sigma-Aldrich, 04Jul13_v3.6] Anisole 1 / 2 / 0 0 / 2 / 0
Antimony Sigma-Aldrich Antimony [Sigma-Aldrich, 01Jul14_v5.2] Boron 1 / 0 / 0 1 / 0 / 0
AZ 1505 Photoresist AZ Electronic Materials (Germany) GmbH AZ 1505 Photoresist [AZ Electronic Materials, 09Apr13_v33] 1-Naphthalenesulfonic acid, 6-Diazo-5,6-dihydro-5-oxo-, ester with phenyl(2,3,4-trihydroxyphenyl)methanone / n/a n/a
950 PMMA Series Resists in Chlorobenzene MicroChem Corp 950 PMMA Series Resists in Chlorobenzene [MicroChem, 19Apr12] chlorobenzene / Poly(methylmethacrylate) 2 / 3 / 0 2 / 3 / 0
A Thinner Micro Chem corp A Thinner [MicroChem, 02May17_v1] 100 – 66 -3 anisole 1 / 2 / 0 1 / 2 / 0
Acetone Alfa AesarThermo Fisher Scientific Chemicals, Inc. Acetone [Alfa Aesar, 23Nov15_v1] Acetone 1 / 3 / 0 1 / 3 / 0
6061_Al2O3_22P-T6P Alcoa Inc 6061_Al2O3_22P-T6P [Alcoa, 20Jan06_v2] Aluminium / Aluminium Oxide / Chromium n/a n/a
495 PMMA Series Resists in Anisole MicroChem Corp. 495 PMMA Series Resists in Anisole [MicroChem, 10Oct14] Anisole / Poly(methyl methacrylate) 1 / 2 / 0 1 / 2 / 0
950 PMMA Series Resists in Anisole MicroChem Corporation 950 PMMA Series Resists in Anisole [MicroChem, 06Nov08] Anisole / Poly(methylmethacrylate) n/a 1 / 2 / 0
4-Methyl-2-pentanone Sigma-Aldrich 4-Methyl-2-pentanone [Sigma-Aldrich, 04Jun13_v5.1] 4-Methylpentan-2-one 2 / * / 3 / 0 2 / 3 / 0
25-35% (METHYLHYDROSILOXANE) 65-70% (DIMETHYLSILOXANE) COPOLYMER – HMS-301 GELEST, INC. 25-35% (METHYLHYDROSILOXANE) 65-70% (DIMETHYLSILOXANE) COPOLYMER – HMS-301 [Gelest, 31Jul02] 25-35%(METHYLHYDROSILOXANE)65-70%(DIMETHYLSILOXANE) COPOLYMER n/a n/a
2-Propanol Sigma-Aldrich 2-Propanol [Sigma-Aldrich, 18Jun14_v5.5] 2-Propanol 2 / * / 3 / 0 2 / 3 / 1
4-Methyl-2-pentanone Sigma-Aldrich 4-Methyl-2-pentanone [Sigma-Aldrich, 02Jul14_v5.5] 4-Methylpentan-2-one 2 / * / 3 / 0 2 / 3 / 0
3,4-Ethylenedioxythiophene Sigma-Aldrich 3,4-Ethylenedioxythiophene (EDOT) [Sigma-Aldrich, 28Dec12_v5] 3,4-Ethylenedioxythiophene 2 / * / 1 / 0 2 / 1 / 0
3-ACRYLOXYPROPYLTRICHLOROSILANE -SIA0199.0 GELEST, INC. 3-ACRYLOXYPROPYLTRICHLOROSILANE – SIA0199.0 [Gelest, 05Jun04] 3-ACRYLOXYPROPYLTRICHLOROSILANE / other ingredients 3 / 1 / 1 n /a
1-Octanol Sigma-Aldrich 1-Octanol [Sigma-Aldrich, 02Jul14_v3.4] Octan-1-ol 2 / * / 2 / 0 2 / 2 / 0
1-Butanol Sigma-Aldrich 1-Butanol [Sigma-Aldrich, 27Apr12_v3.5] n-Butano 2 / * / 3 / 0 2 / 3 / 0
2,4,6,8-Tetramethyl-2,4,6,8-tetravinylcyclotetrasiloxane Sigma Aldrich 2,4,6,8-Tetramethyl-2,4,6,8-tetravinylcyclotetrasiloxane [Sigma-Aldrich, 04Apr14_v5.1] 2,4,6,8-Tetramethyl-2,4,6,8-tetravinylcyclotetrasiloxane 2 / * / 1 / 0 2 / 1 / 0
1-Methyl-2-pyrrolidinone Sigma-Aldrich 1-Methyl-2-pyrrolidinone [Sigma-Aldrich, 26Feb15_v5.5] N-methyl-2-pyrrolidone 2 / * / 2 / 0 2 / 2 / 0
7-8% VINYLMETHYLSILOXANE)(DIMETHYLSILOXANE) COPOLYMER, TRIMETHYLSILYL TERMINATED – VDT-731 GELEST, INC. 1-Methyl-2-pyrrolidinone [Sigma-Aldrich, 26Feb15_v5.5] (7-8% VINYLMETHYLSILOXANE)(DIMETHYLSILOXANE) COPOLYMER, TRIMETHYLSILYL TERMINATED / OCTAMETHYLCYCLOTETRASILOXANE 1 / 1 / 0 n/a
IP-S Photoresist Nanoscribe GmbH  MSDS_IP-S%20Photoresist_2017_V1.pdf Carbamate-, methacrylate, mixture Skin irritation cat. 2
Skin sensitisation cat. 1
Eye irritation cat. 2
Hazardous to the aquatic environment: chronical, cat. 3
n/a
IP-Dip Photoresist Nanoscribe GmbH  MSDS_IP-Dip%20Photoresist_2017_V1.pdf Carbamate-, methacrylate, mixture Skin irritation cat. 2
Skin sensitisation cat. 1
Eye irritation cat. 2
Hazardous to the aquatic environment: chronical, cat. 3
n/a
IP-Dip Photoresist Nanoscribe GmbH  MSDS_IP-L%20780%20Photoresist_2017_V1.pdf Aliphatic alcohol, containing acrylate Skin irritation cat. 2

Eye irritation cat. 2

Skin sensitisation cat. 1

n/a
Buffer HF improved Transene Company, inc http://www.kni-lab.caltech.edu/resources/msds/liquid/buffered-hf-improved-Transene-07002013.pdf Hydrofluoric Acid / Ammonium Acid / Ammonium fluoride / water 4 / 0 / 0 3/ 0 / 1
PREFERENTIAL SILICON ETCHANT PSE-200 Transene Company, inc http://www.smfl.rit.edu/pdf/msds/sds_PSE200.pdf Potassium Hydroxide / Water n/a 3/ 0 / 2
AZ 400K Developer AZ Electronic Materials USA Corp. https://uwaterloo.ca/giga-to-nanoelectronics-centre/sites/ca.giga-to-nanoelectronics-centre/files/uploads/files/az400k_developer_msds.pdf Potassium Hydroxide / Potassium bromates / Water 2 / 0 / 0 / x 2 / 0 / 0 / n/a
LPKF Activator 310 LPKF https://www.nanofab.utah.edu/documents/2024/07/sds-lpkf-activator-310.pdf Water / Carbon Black / Potassium Carbonate / Potassium Hydroxide /2,2′,2”-(hexahydro-1,3,5-triazine-1,3,5-triyl)triethanol not listed not listed Skin Irrit 2/ Skin Sens 1/ Eye Irrit 2
LPKF Cleaner 110 LPKF  https://www.nanofab.utah.edu/documents/2024/07/lpkf-cleaner-110.pdf Ethoxylated Alcohols / Sodium metaborate, anhydrous / Hexanedioic acid, polymer with N1 (2-aminoethyl) 1,2 ethanediamine / reaction products with dimethylamine and epichlorohydrin / not listed not listed Eye Dam, 1/ Repr. 2/ Aquatic Acute
LPKF Cleaner 210 LPKF   https://www.nanofab.utah.edu/documents/2024/07/sds-lpkf-cleaner-210.pdf Sodium metaborate, anhydrous / Hexanedioic acid, polymer with N1 (2-aminoethyl) 1,2 ethanediamine / reaction products with dimethylamine and epichlorohydrin / not listed not listed Eye Dam, 1/ Repr. 2/ Aquatic Acute 1
LPKF Shine 410 LPKF   https://www.nanofab.utah.edu/documents/2024/07/sds-lpkf-shine-410.pdf / / / not listed not listed / /
RSE-100 Transene   / / / / /
RSE-200 Transene   https://www.nanofab.utah.edu/documents/2024/08/sds-rse-200.doc 5:6:3 Nitric / HF / Acetic / / /