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Photolithography Spin/Bake/Expose/Develop
+S1813 Photoresist
nLOF 2020 Photoresist
LOR 10B Photoresist
AZ 9260 Photoresist
EM Surface Analysis Lab
Get Access to the Electron Micrsocopy and Surface Analysis Lab
Request EMSAL staff to analyze a sample for you
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Services
Nanoscribe Photonic Pro GT2 Micro 3D Printing Service (2 Photon Polymerization)
Heidelberg DWL66+ Photomask Production and Direct Writing or Grayscale Lithography Service
Precious Metals Coating and Patterning (Gold, Platinum, Silver, Iridium, Palladium)
Wafer Dicing and Anodic Bonding
Custom Biochip Fabrication (microfluidic channels, neural probes, microneedles)
Micro/Nano Imaging (Optical and SEM Videos and Microphotographs)
WAFER OR THIN FILM ETCHING/PATTERNING: (DRIE, ICP RIE, XeF2 dry silicon isotropic etch, O2 plasma, or wet chemical )
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Utah Nanofab
The University of Utah
Utah Nanofab
Cleanroom
Equipment & Capabilities
Become a member and get access to the cleanroom
Service Request
Staff Consultation
Rates
PDF Equipment List
Equipment Links
Fabrication Procedures
Photolithography Spin/Bake/Expose/Develop
+S1813 Photoresist
nLOF 2020 Photoresist
LOR 10B Photoresist
AZ 9260 Photoresist
EM Surface Analysis Lab
Get Access to the Electron Micrsocopy and Surface Analysis Lab
Request EMSAL staff to analyze a sample for you
Capabilities
Staff Consultation
On-Campus Rates
Industry Rates
Services
Nanoscribe Photonic Pro GT2 Micro 3D Printing Service (2 Photon Polymerization)
Heidelberg DWL66+ Photomask Production and Direct Writing or Grayscale Lithography Service
Precious Metals Coating and Patterning (Gold, Platinum, Silver, Iridium, Palladium)
Wafer Dicing and Anodic Bonding
Custom Biochip Fabrication (microfluidic channels, neural probes, microneedles)
Micro/Nano Imaging (Optical and SEM Videos and Microphotographs)
WAFER OR THIN FILM ETCHING/PATTERNING: (DRIE, ICP RIE, XeF2 dry silicon isotropic etch, O2 plasma, or wet chemical )
If you are…
A Student
A Business
Interested in Nanotech
Preparing to Publish
Member Resources
Member Door Access Request Form
Request Equipment Training or Service
Equipment Pages
HSC Scheduling
Equipment Run Data (HSC)
Archived Equipment Run Data (Coral)
Design a Process
Preparing a Proposal (Seed fund application)
Cloud Storage
Lab User Guide
Safety
Lab Member Resources
Users in Lab
Emergency Contacts
New Material Request
Cleanroom Visitor Log
Staff Resources
Billing
Pay Invoice Online
Billing Rates
Cost Tracking
Cost Adjustment Request
About Us
Overview
Staff
Address and Phone
How to Get Here
Nanofab Parking
Need Help?
Acknowledgments
Brochure
Lab History
nanoUtah
Affiliated Labs
Publications
Cool Stuff
Microfabrication Videos
Photo Lithography
Etching
Deposition
Packaging
