Nanolithography

 

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 Title Authors Links Nanofab Process used
Screen Shot 2018-10-15 at 3.27.43 PM A facile dry-PMMA transfer process for electron-beam lithography on non-flat substrates Jong-Hyun Kim, etc https://ieeexplore.ieee.org Electron Beam Lithography
Screen Shot 2018-10-15 at 3.49.20 PM A Facile Dry-PMMA Transfer Process for Electron-Beam Lithography on Non-Flat Substrates Jong-Hyun Kim
Qin Zhou
Jiyoung Chang		 https://ieeexplore.ieee.org Lithography
 Screen Shot 2018-10-25 at 4.37.26 PM

 Optical patterning of features with spacing below the far-field diffraction limit using absorbance modulation

Farhana Masid

Trisha L. Andrew

Rajesh Menon

 https://www.osapublishing.org Lithography
 Capture
  MICROFABRICATION OF NANOPORE DEVICES WITHOUT NANOLITHOGRAPHY  L. Chen1 , Y. Wang1 , and C.H. Mastrangelo1  https://ieeexplore.ieee.org CVD              ALD                    Lithography
 Screen Shot 2018-11-08 at 3.17.04 PM
Surface analysis of photolithographic patterns
using ToF-SIMS and PCA
 Manish Dubey
Kazunori Emoto
Fang Cheng
Lara J. Gamble
Hironobu Takahashi
David W. Grainger
David G. Castner		 https://onlinelibrary.wiley.com Deposition           Lithography                           Dry Etching
 Screen Shot 2018-11-12 at 3.43.06 PM

Quartz Nanopore Membranes for Suspended Bilayer Ion Channel Recordings

Anna E. P Schibel Thomas Edwards Ryuji Kawano.     Wenjie Lan,         Henry S. White

 https://pubs.acs.org Etching