Tool Owner

Kathy Anderson (kathy.anderson@utah.edu)

Reservations Calendar

The Agilis MOCVD system is capable of growing crystalline material layers.  It uses a fully automated and programmable chemical vapor delivery system to direct metal-organic precursors onto a substrate on a rotating, heated chuck in a chamber held at sub atmospheric pressure.  Materials recently grown are Gallium Oxide (Ga₂O₃) and Germanium Oxide (GeO₂).  Samples/substrates up to 2″ diameter can be used.

SOP

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