Allwin AccuThermo AW 610 RTP

Tool Owner

Brian Baker (bbaker@eng.utah.edu)

Reservations Calendar

Download Files

Files

Files:

RTP SOP

Staff Files

Manual:

AW-900-708-G.AW610 Installation Manual

AW-900-709-F.AW610 FacilityConnections

Haake A10 manual

KLA 1501 TC wafer

Omega CL23A M1554

RTP Technical Manual

Run-Data Reports for Allwin AccuThermo AW 610 RTP

Processes on Allwin AccuThermo AW 610 RTP
aborted
allwin-accuthermo-aw-610-rtp-process
lab-use
service
runs-without-data
Download Combined Report (XLS)