Tool Owner
Jim Pierce (jim.pierce@utah.edu)
Training Videos:
Reservation Calendar
From the manufacturer’s website: “Our Fiji series is a modular, high-vacuum ALD system that accommodates a wide range of deposition modes using a flexible architecture and multiple configurations of precursors and plasma gases. The result is a next-generation ALD system capable of performing thermal and plasma-enhanced deposition.”
S/N: 200005
Software and drivers backup: https://uofu.app.box.com/folder/158091894722
Expected Deposition Rates:
Training Video:
https://uofu.box.com/s/0je4n0rdfn3lutu8620xgq8fkprfj7af
Download Files
Files
SOP:
Cambridge Fiji F200 ALD SOP in PDF Format
Spec sheet:
FIJI brochure ALD Cambridge Nanotech.pdf.pdf
Staff Files
Manual:
Fiji_F200_V2_installation and use manual
Fiji_F200_V2_maintenance manual
SEREN MC2 Auto Match Controller
SOP:
Cambridge Fiji F200 ALD SOP in Word Format
Run-Data Reports for Cambridge Fiji F200
| Processes on Cambridge Fiji F200 |
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Download Combined Report (XLS)