Tool Owner

Brian Baker (bbaker@eng.utah.edu)

S/N: 2051061

• Accepts up to 6″ wafers
• programable:
  • 10 programs
  • each with up to 10 steps including: Acceleration, Speed, Time

Download Files

Files

Lift Off Resist:

AZ nLOF Procedure

LOR10B-S1813 Procedure

Negative Lift Off Resist AZ NLOF 2020 Spec Sheet

Positive Lift Off Resist LOR10B Spec Sheet 1

Positive Lift Off Resist LOR10B Spec Sheet 2

Photoresist:

AZ 9260 Thick Positive Photoresist Spec Sheet 1

AZ 9260 Thick Positive Photoresist Spec Sheet 2

Shipley 1813 Positive Photoresist

Processes:

Standard Process

Standard Process

Standard Processes

SOP:

CEE 100 Procedure.pdf

CEE Model 100CB Spinner.doc

Staff Files

Manuals:

CEE 200X 2 Cartridge dwg

CEE 200X Dispense Adjust

CEE 200X Manual

CEE 200XD connect dwg

Cee 100 Manual

Download Combined Report (XLS)