Tool Owner
Brian Baker (bbaker@eng.utah.edu)
S/N: 2121306
Download Files
Files
Photoresist:
AZ 9260 Thick Positive Photoresist Spec Sheet 1
AZ 9260 Thick Positive Photoresist Spec Sheet 2
Run-Data Reports for CEE 200X 9260 Spinner
Processes on CEE 200X 9260 Spinner |
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Download Combined Report (XLS) |