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      • Photolithography Spin/Bake/Expose/Develop

        • +S1813 Photoresist

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        • AZ 9260 Photoresist

  • EM Surface Analysis Lab

    • Get Access to the Electron Micrsocopy and Surface Analysis Lab

    • Request EMSAL staff to analyze a sample for you

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    • Nanoscribe Photonic Pro GT2 Micro 3D Printing Service (2 Photon Polymerization)

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    • Precious Metals Coating and Patterning (Gold, Platinum, Silver, Iridium, Palladium)

    • Wafer Dicing and Anodic Bonding

    • Custom Biochip Fabrication (microfluidic channels, neural probes, microneedles)

    • Micro/Nano Imaging (Optical and SEM Videos and Microphotographs)

    • WAFER OR THIN FILM ETCHING/PATTERNING: (DRIE, ICP RIE, XeF2 dry silicon isotropic etch, O2 plasma, or wet chemical )

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CEE Apogee N2 Hot Plate

January 18, 2023

Tool Owner

Brian Baker (bbaker@eng.utah.edu)

 

 

Download Files

Files

SOP:

Apogee Bake Plate Manual.pdf

Photoresist:

AZ 9260 Thick Positive Photoresist Spec Sheet 1

AZ 9260 Thick Positive Photoresist Spec Sheet 2

Shipley 1813 Positive Photoresist

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