Tool Owner
Jim Pierce (jim.pierce@utah.edu)
Training Videos
HSC Reservation Training Video
CTR Nitride with Measurements Training Video
Furnace Data Collection Training Video
Reservations Calendar
LTO, NITRIDE, AND POLY LPCVD
CTR Nitride Process Characterization
A statistically designed experiment has been performed and analyzed in JMP to provide additional information for Low Stress Nitride. Click HERE to access the analysis, which includes an interactive profiler where the values of the process variables can be changed showing the effect on the film characteristics.
Nitride Recipes Run Data:
Poly Recipes Run Data:
