Tool Owner
Jim Pierce (jim.pierce@utah.edu)
Reservations Calendar
S/N: 18097
- 4 source hearth
- Film thickness monitor/deposition controller
- Evaporation Materials Available
- Al, Ag, Au, Au/Ge, Cr, Cu, Ge, Mo, NiCr, Nb, Ni, Ta, Ti, W
- Poco Graphite crucibles
Expected Deposition Rates:
Download Files
Files
SOP:
Spec Sheet:
DentonEgun-SummarySpecs.pdf.pdf
Staff Files
Logs:
Manuals:
MKS-Type286_VacuumGaugeController.pdf
MKS-Type290C-IonGaugeController.pdf
SOP:
Run-Data Reports for Denton SJ20C
| Processes on Denton SJ20C |
|---|
| Download Combined Report (XLS) |