DEPOSITION

• Cambridge Fiji F200
• Denton SJ20C
• Agnitron Imperium GaO
• SCS PDS 2010
• Oxford Plasmalab 80 PECVD
• Denton 635
• Denton Discovery 18
• TMV Super

DRY ETCHING

• Oxford 100 ICP
• XACTIX X2 XeF2
• Oxford Plasmalab 80
• Plasmatherm Metal Etch
• Technics PE II-A

FURNACES

• ProTemp Clean Ox
• ProTemp Doped Ox
• CTR LPCVD POLY, NITRIDE, AND LTO
• Allwin AccuThermo AW 610 RTP
• Blue-M Box Furnace

LASER SYSTEMS

• • DPSS UV Laser Marker
  • Universal Laser PLS6.150D

LITHOGRAPHY

Spin Coaters:

• CEE 100
• CEE 200X 1800 Spinner
• CEE 200X 9260 Spinner
• CEE 200XD Develop Spinner
• Headway EC101

Aligners:

• EV 420
• OAI 200
• OAI 800
• Suss MA1006

Ovens:

• Binder FD53-UL
• Memmert Glass 250 Oven
• Memmert N2 300 Oven
• YES HMDS1 Oven
• YES LP-III Oven

MEASUREMENT

• Film Stress Tencor FLX-2320
• 4-point Probe Microtech RF-1
• Nanospec 3000
• N and K 1500 Analyzer
• Profilometer Tencor P-10
• Profilometer Tencor P-20H

MICROFLUIDICS

• VWR 1410 Vacuum oven
• March Plasmod Barrel RIE – O2
• Enercon Dyne-A-Mite Ozone Plasma
• CEE 200X PDMS Spinner

MICROSCOPY

• Keyence VHX-5000 Microscope

PACKAGING

• Disco DAD3220
• Disco DAD641
• EVG 520 IS
• MEI Wedge

PATTERN GENERATION

• Heidelberg DWL66+
• Heidelberg MicroPG 101
• Heidelberg MicroPG 101-2-0.9um-2.5um
• Nanoscribe 3D Photonic Pro GT
• NanoFrazor Explore

TEST & ELECTRICAL CHARACTERIZATION

• Keithley 4200 SCS
• Keysight 404A Mixed Signal Oscilloscope
• Keysight E5061B Network Analyzer
• Oscilloscope Tektronix TDS 2002 B
• Micromaniuplator Probe Station

UV IR MAGNETIC MEASUREMENT DEVICES

• UV Intensity Meter OAI 306
• UV Intensity Meter OAI 357
• FLIR handheld IR camera
• Bell 5180 Gaussmeter

Facilities

• Edwards Gas Reactor Columns