Tool Owner

Jim Pierce (jim.pierce@utah.edu)

Reservations Calendar

General Description

Atmospheric furnace with Nitrogen, Oxygen, and water.  It can be used for both wet or dry oxidation.  This furnace restricted to wafers that have no previous exposure to dopant materials.

Files

SOP:

ProTemp Furnace Operating Instructions

Staff Files

Remediation Manual:

Dwg 03-0056 Europa

Jupiter Europa Install-Op Manual Rev 4

SOP:

SOP in Word

Download Combined Report (XLS)