MENU

  • Cleanroom

    • Equipment & Capabilities

    • Become a member and get access to the cleanroom

    • Service Request

    • Staff Consultation

    • Rates

    • PDF Equipment List

    • Equipment Links

    • Fabrication Procedures

      • Photolithography Spin/Bake/Expose/Develop

        • +S1813 Photoresist

        • nLOF 2020 Photoresist

        • LOR 10B Photoresist

        • AZ 9260 Photoresist

  • EM Surface Analysis Lab

    • Get Access to the Electron Micrsocopy and Surface Analysis Lab

    • Request EMSAL staff to analyze a sample for you

    • Capabilities

    • Staff Consultation

    • On-Campus Rates

    • Industry Rates

  • Services

    • Nanoscribe Photonic Pro GT2 Micro 3D Printing Service (2 Photon Polymerization)

    • Heidelberg DWL66+ Photomask Production and Direct Writing or Grayscale Lithography Service

    • Precious Metals Coating and Patterning (Gold, Platinum, Silver, Iridium, Palladium)

    • Wafer Dicing and Anodic Bonding

    • Custom Biochip Fabrication (microfluidic channels, neural probes, microneedles)

    • Micro/Nano Imaging (Optical and SEM Videos and Microphotographs)

    • WAFER OR THIN FILM ETCHING/PATTERNING: (DRIE, ICP RIE, XeF2 dry silicon isotropic etch, O2 plasma, or wet chemical )

    • If you are…

      • A Student

      • A Business

      • Interested in Nanotech

      • Preparing to Publish

  • Member Resources

    • Member Door Access Request Form

    • Request Equipment Training or Service

    • Equipment Pages

    • HSC Scheduling

    • Equipment Run Data (HSC)

    • Archived Equipment Run Data (Coral)

    • Design a Process

    • Preparing a Proposal (Seed fund application)

    • Cloud Storage

    • Lab User Guide

    • Safety

    • Lab Member Resources

    • Users in Lab

    • Emergency Contacts

    • New Material Request

    • Cleanroom Visitor Log

    • Staff Resources

  • Billing

    • Pay Invoice Online

    • Billing Rates

    • Cost Tracking

    • Cost Adjustment Request

  • About Us

    • Overview

    • Staff

    • Address and Phone

    • How to Get Here

    • Nanofab Parking

    • Need Help?

    • Acknowledgments

    • Brochure

    • Lab History

    • nanoUtah

    • Affiliated Labs

    • Publications

    • Cool Stuff

Utah Nanofab

The University of Utah

Utah Nanofab

  • Cleanroom

    • Equipment & Capabilities

    • Become a member and get access to the cleanroom

    • Service Request

    • Staff Consultation

    • Rates

    • PDF Equipment List

    • Equipment Links

    • Fabrication Procedures

      • Photolithography Spin/Bake/Expose/Develop

        • +S1813 Photoresist

        • nLOF 2020 Photoresist

        • LOR 10B Photoresist

        • AZ 9260 Photoresist

  • EM Surface Analysis Lab

    • Get Access to the Electron Micrsocopy and Surface Analysis Lab

    • Request EMSAL staff to analyze a sample for you

    • Capabilities

    • Staff Consultation

    • On-Campus Rates

    • Industry Rates

  • Services

    • Nanoscribe Photonic Pro GT2 Micro 3D Printing Service (2 Photon Polymerization)

    • Heidelberg DWL66+ Photomask Production and Direct Writing or Grayscale Lithography Service

    • Precious Metals Coating and Patterning (Gold, Platinum, Silver, Iridium, Palladium)

    • Wafer Dicing and Anodic Bonding

    • Custom Biochip Fabrication (microfluidic channels, neural probes, microneedles)

    • Micro/Nano Imaging (Optical and SEM Videos and Microphotographs)

    • WAFER OR THIN FILM ETCHING/PATTERNING: (DRIE, ICP RIE, XeF2 dry silicon isotropic etch, O2 plasma, or wet chemical )

    • If you are…

      • A Student

      • A Business

      • Interested in Nanotech

      • Preparing to Publish

  • Member Resources

    • Member Door Access Request Form

    • Request Equipment Training or Service

    • Equipment Pages

    • HSC Scheduling

    • Equipment Run Data (HSC)

    • Archived Equipment Run Data (Coral)

    • Design a Process

    • Preparing a Proposal (Seed fund application)

    • Cloud Storage

    • Lab User Guide

    • Safety

    • Lab Member Resources

    • Users in Lab

    • Emergency Contacts

    • New Material Request

    • Cleanroom Visitor Log

    • Staff Resources

  • Billing

    • Pay Invoice Online

    • Billing Rates

    • Cost Tracking

    • Cost Adjustment Request

  • About Us

    • Overview

    • Staff

    • Address and Phone

    • How to Get Here

    • Nanofab Parking

    • Need Help?

    • Acknowledgments

    • Brochure

    • Lab History

    • nanoUtah

    • Affiliated Labs

    • Publications

    • Cool Stuff

XACTIX X2 XeF2

November 16, 2022

Tool Owner

Brian Baker (bbaker@eng.utah.edu)

Reservations Calendar

S/N: 205R

Download Files

Files

SOP:

Xactix etch SOP

Member Files

XeF2 Calculator:

XeF2 Calculator

Staff Files

Manufacturer Information:

Edwards XDS-5 pump manual

XACTIX Xetch System Manual

Word format SOP:

Word format SOP

XeF2 Supplier:

XeF2 Supplier

Run-Data Reports for XACTIX X2 XeF2

Processes on XACTIX X2 XeF2

Download Combined Report (XLS)

QUICK LINKS

  • Students & Faculty

    • Proposal Writing Support

    • Courses

    • Publishing

    • Career Opportunities

  • Business

    • Business Gateway

  • News & Events

    • News Stories

    • Lab History

    • Calendar

    • Cool Stuff

    • nanoUtah



login

36 S. Wasatch Drive, SMBB Rm 2500
SLC UT 84112
801.587.0676

© 2024 The University of Utah