Tool Owner
Brian Baker (bbaker@eng.utah.edu)
Reservations Calendar
S/N: 85205N
Download Files
Files
SOP:
YES LPIII HMDS SOP in PDF Format
Spec sheet:
Yield_Eng_YES_III-V_specifications_and_facilitites.pdf.pdf
Brian Baker (bbaker@eng.utah.edu)
S/N: 85205N
YES LPIII HMDS SOP in PDF Format
Yield_Eng_YES_III-V_specifications_and_facilitites.pdf.pdf