1 | Recipe: | sopAr | sopAr | sopCF4O2 | sopcl2O2 | sopAr | sopAr | sopCF4O2 | sopCl2O2 | sopCF4O2 | sopCF4O2 | sopCF4O2 | sopCF4O2 | sopSF6O2 | sopSF6O2 | sopSF6O2 | sopSF6O2 | sopAr | sopAr | sopO2 | sopO2 | sopO2 | sopO2 | sopW | sopW | sopW | sopW | sopCl2O2 | sopCl2O2 | sopAl | sopAl (2nd process) | ||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
2 | Material: | Au | Pt | Ti | Cr | Au | Pt | Ti | Cr | SiN | SiO2 | Si | SiN | SiO2 | Si | SiN | Poly | SiN | Poly | 1813 PR | 1813 PR | Parylene | Parylene | W | W | W | Ti | Cr | Cr | Al2O3 | Al | ||||
3 | Thickness (nm) | 400 nm | 400 | 400 | 400 | ||||||||||||||||||||||||||||||
4 | Gas1: | Ar | Ar | CF4 | O2 | Ar | Ar | CF4 | O2 | CF4 | CF4 | CF4 | SF6 | SF6 | SF6 | SF6 | SF6 | Ar | Ar | O2 | O2 | O2 | O2 | SF6 | SF6 | SF6 | SF6 | O2 | O2 | Cl2 | Cl2 | ||||
5 | Gas1 Flow (sccm): | 20 sccm | 20 | 35 | 20 | 20 | 20 | 35 | 20 | 35 | 35 | 35 | 26 | 26 | 26 | 26 | 26 | 20 | 20 | 50 | 50 | 50 | 50 | 25 | 25 | 25 | 25 | 20 | 2 | 10 | 25 | ||||
6 | Gas2: | O2 | Cl2 | O2 | Cl2 | O2 | O2 | O2 | O2 | O2 | O2 | O2 | O2 | CF4 | CF4 | CF4 | CF4 | Cl2 | Cl2 | Ar | O2 | ||||||||||||||
7 | Gas2 Flow (sccm): | 3.5 | 20 | 3.5 | 20 | 3.5 | 3.5 | 3.5 | 3.5 | 3.5 | 3.5 | 3.5 | 3.5 | 10 | 10 | 10 | 10 | 20 | 40 | 10 | 1.3 | ||||||||||||||
8 | Gas3: | O2 | O2 | O2 | O2 | ||||||||||||||||||||||||||||||
9 | Gas3 Flow (sccm): | 3.5 | 3.5 | 3.5 | 3.5 | ||||||||||||||||||||||||||||||
10 | Pressure (mT): | 20 | 20 | 150 | 20 | 20 | 150 | 75 | 75 | 75 | 75 | 75 | 75 | 75 | 75 | 20 | 20 | 20 | 20 | 20 | 20 | 75 | 75 | 75 | 75 | 150 | 150 | 50 | 50 | ||||||
11 | Power (W): | 200 W | 200 | 200 | 200 | 200 | 200 | 200 | 200 | 200 | 200 | 200 | 200 | 200 | 200 | 200 | 100 | 200 | 200 | 200 | 200 | 200 | 200 | 150 | 150 | 150 | 150 | 200 | 200 | 200 | |||||
12 | Time (min): | 10 | 10 | 2 | 2 | 20 | 43 | 9 | 3.5 | 1.5 | 2 | 5 | 2 | 0.75 | 5 | 1.75 | 0.5 | 20 | 20 | 1.5 | 5 | 2 | 2 | 3 | 1.5 | 1.5 | 1.5 | 3.5 | 3.25 | 0.75 | |||||
13 | Tencor Material Etch Rate (nm/min): | 8.44 | 4.67 | 22.17 | 54.79 | 8.41 | 7.02 | 26.30 | 53.29 | 91.21 | 42.58 | 57.98 | 293.27 | 49.68 | 1,505.04 | 117.81 | 597.96 | 1.66 | 1.90 | 163.61 | 199.23 | 223.29 | 205.71 | 89.69 | 140.87 | 157.60 | 43.35 | 43.93 | 66.63 | 27.76 | |||||
14 | Nanospec Material Etch Rate (nm/min) | 99.47 | 45.07 | 0.00 | 115.83 | 45.03 | 0.00 | 130.38 | 559.42 | 1.59 | 1.06 | 195.36 | 209.72 | ||||||||||||||||||||||
15 | Tencor Material Etch Uniformity: | 1.95 | 6.21 | 6.77 | 16.11 | 1.64 | 12.97 | 15.00 | 23.24 | 8.48 | 9.16 | 0.52 | 21.80 | 19.32 | 0.78 | 2.40 | 2.93 | 5.28 | 5.28 | 10.41 | 8.14 | 1.22 | 2.25 | 10.35 | 5.09 | 5.46 | 6.38 | 35.67 | 3.67 | 13.21 | |||||
16 | Nanospec Material Etch Uniformity: (+/- XX%) | 1.50 | 3.98 | 4.75 | 20.93 | 4.08 | 2.32 | 2.66 | 4.40 | 2.49 | 1.48 | ||||||||||||||||||||||||
17 | Tencor 1813 PR Etch Rate (nm/min) | 44.40 | 53.37 | 12.67 | 47.49 | 53.44 | 35.66 | 97.41 | 24.09 | 79.08 | 79.68 | 93.02 | 146.29 | 150.75 | 131.87 | 124.32 | 41.16 | 47.67 | 45.67 | 163.61 | 199.23 | 191.29 | 203.01 | 87.55 | 64.51 | ||||||||||
18 | Nano 1813 PR Etch Rate (nm/min) | 69.25 | 34.31 | 100.49 | 55.09 | 96.36 | 97.58 | 99.52 | 189.39 | 120.83 | 141.80 | 125.08 | 235.01 | 47.86 | 62.51 | 195.36 | 209.72 | 210.73 | 203.82 | 88.12 | 80.41 | ||||||||||||||
19 | Thickness of material (nm) | ||||||||||||||||||||||||||||||||||
20 | Site 1: | 242.98 | 104.85 | 242.98 | 104.85 | 372.5 | 485.91 | 362.88 | 486.15 | 1943.6 | 1949.83 | 626 | 626 | ||||||||||||||||||||||
21 | Site 2: | 235.22 | 103.95 | 235.22 | 103.95 | 360.1 | 493.48 | 343.23 | 506.30 | 1938.69 | 1946.46 | 626 | 626 | ||||||||||||||||||||||
22 | Site 3: | 228.31 | 98.53 | 228.31 | 98.53 | 345.23 | 496.87 | 343.62 | 498.84 | 1936.58 | 1947 | 626 | 626 | ||||||||||||||||||||||
23 | Site 4: | 230.82 | 98.65 | 230.82 | 98.65 | 352.68 | 497.23 | 357.12 | 489.08 | 1945 | 1950.54 | 626 | 626 | ||||||||||||||||||||||
24 | Site 5: | 220.95 | 92.9 | 220.95 | 92.9 | 335.01 | 513.49 | 337.73 | 511.07 | 1935.54 | 1942.5 | 626 | 626 | ||||||||||||||||||||||
25 | Average: | 231.656 | 99.776 | 231.656 | 99.776 | 353.104 | 497.396 | 348.92 | 498.29 | 1,939.88 | 1,947.27 | 626.00 | 626.00 | ||||||||||||||||||||||
26 | Tencor Step After PR Strip Sites (nm) | ||||||||||||||||||||||||||||||||||
27 | Site 1: | 85.4 | 49.7 | 43.8 | 116.9 | 166.4 | 251.7 | 229.8 | 226.6 | 134.4 | 88.5 | 288.7 | 511 | 46.4 | 7555 | 209.9 | 310 | 31.90 | 36.50 | 241.7 | 946 | 452.7 | 418.7 | 241.2 | 221.3 | 250.8 | 63.9 | 204.9 | 217.4 | 23.7 | |||||
28 | Site 2: | 84.8 | 48.6 | 46.6 | 122.9 | 171.1 | 330 | 205.4 | 179.8 | 150.4 | 92.2 | 291.7 | 645.4 | 32 | 7450 | 207.1 | 292.5 | 33.00 | 40.50 | 217.8 | 1070.1 | 445.2 | 413.9 | 282.7 | 209.9 | 225 | 62.2 | 181.3 | 208.7 | 23.6 | |||||
29 | Site 3: | 83.3 | 45.6 | 46.1 | 119.5 | 170.9 | 270.1 | 276.4 | 198.5 | 140.4 | 85.5 | 288.8 | 505.3 | 32 | 7567 | 200.1 | 297.5 | 32.60 | 37.50 | 236.8 | 908 | 441.8 | 415.4 | 248 | 219.9 | 234.6 | 66.3 | 149.2 | 208.8 | 20.1 | |||||
30 | Site 4: | 85.9 | 45.7 | 40.6 | 101 | 166.6 | 328.7 | 240.5 | 187.7 | 131.7 | 83 | 289.4 | 510 | 37.6 | 7522 | 203.7 | 297.5 | 32.80 | 36.80 | 261.9 | 1039.2 | 442.5 | 408.9 | 276.5 | 205.6 | 242 | 62.2 | 138.2 | 224.6 | 18.2 | |||||
31 | Site 5: | 82.6 | 43.9 | 44.6 | 87.6 | 165.6 | 329.3 | 231.4 | 139.9 | 127.2 | 76.6 | 290.8 | 761 | 38.3 | 7532 | 210 | 297.4 | 35.40 | 38.20 | 268.9 | 1017.5 | 450.7 | 400.2 | 296.9 | 199.8 | 229.6 | 70.5 | 95.2 | 223.2 | 18.5 | |||||
32 | Average: | 84.4 | 46.7 | 44.34 | 109.58 | 168.12 | 301.96 | 236.7 | 186.5 | 136.82 | 85.16 | 289.88 | 586.54 | 37.26 | 7525.2 | 206.16 | 298.98 | 33.14 | 37.90 | 245.42 | 996.16 | 446.58 | 411.42 | 269.06 | 211.3 | 236.4 | 65.02 | 153.76 | 216.54 | 20.82 | |||||
33 | Nanospec Depth After PR Strip Sites (nm) | ||||||||||||||||||||||||||||||||||
34 | Site 1: | 91.51 | 14.94 | 0 | 0 | 74.36 | 0 | 140.32 | 201.66 | 331.48 | 465.13 | 1645.89 | 898.44 | ||||||||||||||||||||||
35 | Site 2: | 84.05 | 10.48 | 0 | 0 | 60.46 | 0 | 133.09 | 216.39 | 311.14 | 486.15 | 1642.47 | 883.47 | ||||||||||||||||||||||
36 | Site 3: | 81.32 | 12.23 | 0 | 0 | 66.55 | 0 | 126.87 | 218.05 | 312.39 | 477.31 | 1653.45 | 914.97 | ||||||||||||||||||||||
37 | Site 4: | 82.63 | 10.57 | 0 | 0 | 69.3 | 0 | 126.4 | 224.53 | 325.80 | 468.16 | 1648.9 | 902.3 | ||||||||||||||||||||||
38 | Site 5: | 72.76 | 0 | 0 | 0 | 59.34 | 0 | 98.02 | 227.8 | 304.81 | 489.06 | 1643.52 | 894.04 | ||||||||||||||||||||||
39 | Average: | 82.454 | 9.644 | 0 | 0 | 66.002 | 0 | 124.94 | 217.686 | 317.12 | 477.16 | 1,646.85 | 898.64 | ||||||||||||||||||||||
40 | Nanospec Etched Thickness Sites (nm) | ||||||||||||||||||||||||||||||||||
41 | Site 1: | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 151.47 | 89.91 | 0 | 242.98 | 30.49 | 0 | 232.18 | 284.25 | 31.40 | 21.02 | 297.71 | 1051.39 | ||||||||||||||
42 | Site 2: | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 151.17 | 93.47 | 0 | 235.22 | 43.49 | 0 | 227.01 | 277.09 | 32.09 | 20.15 | 296.22 | 1062.99 | ||||||||||||||
43 | Site 3: | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 146.99 | 86.3 | 0 | 228.31 | 31.98 | 0 | 218.36 | 278.82 | 31.23 | 21.53 | 283.13 | 1032.03 | ||||||||||||||
44 | Site 4: | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 148.19 | 88.08 | 0 | 230.82 | 29.35 | 0 | 226.28 | 272.7 | 31.32 | 20.92 | 296.1 | 1048.24 | ||||||||||||||
45 | Site 5: | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 148.19 | 92.9 | 0 | 220.95 | 33.56 | 0 | 236.99 | 285.69 | 32.92 | 22.01 | 292.02 | 1048.46 | ||||||||||||||
46 | Average: | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 149.202 | 90.132 | 0 | 231.656 | 33.774 | 0 | 228.164 | 279.71 | 31.79 | 21.13 | 293.04 | 1,048.62 | ||||||||||||||
47 | PR Sites Before Etching | ||||||||||||||||||||||||||||||||||
48 | Nanospec Total Thickness of Pr Before Etching (nm) | ||||||||||||||||||||||||||||||||||
49 | Site 1: | 2436.52 | 2429.3 | 2328.62 | 2228.39 | 2028.05 | 1946.23 | 2401.27 | 2899.64 | 2,491.57 | 2,882.89 | 1943.6 | 1949.83 | 2483.42 | 2456.16 | 2026.47 | 2041.32 | ||||||||||||||||||
50 | Site 2: | 2423.64 | 2418.44 | 2331.92 | 2408.37 | 2017.41 | 1951.49 | 2385.74 | 2835 | 2,468.55 | 2,682.31 | 1938.69 | 1946.46 | 2485.45 | 2483.69 | 2019.42 | 2037.33 | ||||||||||||||||||
51 | Site 3: | 2419.35 | 2426.92 | 2345.97 | 2404.02 | 2021 | 1953.66 | 2368.78 | 2939.29 | 2,473.11 | 2,909.64 | 1936.58 | 1947 | 2489.32 | 2433.61 | 2018.72 | 2037.59 | ||||||||||||||||||
52 | Site 4: | 2424.82 | 2424.66 | 2342.22 | 2231.58 | 2031.18 | 1948.5 | 2366.49 | 2936.8 | 2,497.73 | 2,888.37 | 1945 | 1950.54 | 2493.25 | 2452.75 | 2024.48 | 2046.94 | ||||||||||||||||||
53 | Site 5: | 2404.56 | 2414.44 | 2340.61 | 2401.4 | 2011.54 | 1944.77 | 2355.05 | 2721.01 | 2,475.07 | 2,963.97 | 1935.54 | 1942.5 | 2490.43 | 2442.8 | 2028.44 | 2034.21 | ||||||||||||||||||
54 | Average: | 2421.778 | 2422.752 | 2337.868 | 2334.752 | 2021.836 | 1948.93 | 2375.466 | 2866.348 | 2481.206 | 2865.436 | 1939.882 | 1947.266 | 2488.374 | 2453.802 | 2023.506 | 2039.478 | ||||||||||||||||||
55 | Nanospec PR Thickness Not Including Material (nm) | ||||||||||||||||||||||||||||||||||
56 | Site 1: | 2155 | 1994 | 1993 | 1993 | 2164 | 1955 | 1977 | 1982 | 2193.54 | 2324.45 | 2328.62 | 1985.41 | 1923.2 | 1946.23 | 2028.77 | 2313.73 | 2,128.69 | 2,296.74 | 0.00 | 0.00 | 1,857.42 | 1,830.16 | 2026.47 | 2041.32 | ||||||||||
57 | Site 2: | 2156 | 1998 | 2000 | 1985 | 2160 | 1971 | 1981 | 1975 | 2188.42 | 2314.49 | 2331.92 | 2173.15 | 1913.46 | 1951.49 | 2025.64 | 2241.52 | 2,125.32 | 2,076.01 | 0.00 | 0.00 | 1,859.45 | 1,857.69 | 2019.42 | 2037.33 | ||||||||||
58 | Site 3: | 2156 | 1992 | 1988 | 1989 | 2165 | 1968 | 1974 | 1982 | 2191.04 | 2328.39 | 2345.97 | 2175.71 | 1922.47 | 1953.66 | 2023.55 | 2342.42 | 2,129.49 | 2,310.80 | 0.00 | 0.00 | 1,863.32 | 1,807.61 | 2018.72 | 2037.59 | ||||||||||
59 | Site 4: | 2155 | 1992 | 1996 | 1991 | 2159 | 1975 | 1976 | 1974 | 2194 | 2326.01 | 2342.22 | 2000.76 | 1932.53 | 1948.5 | 2013.81 | 2339.57 | 2,140.61 | 2,299.29 | 0.00 | 0.00 | 1,867.25 | 1,826.75 | 2024.48 | 2046.94 | ||||||||||
60 | Site 5: | 2163 | 1996 | 2004 | 1992 | 2160 | 1969 | 1981 | 1975 | 2183.61 | 2321.54 | 2340.61 | 2180.45 | 1918.64 | 1944.77 | 2020.04 | 2107.52 | 2,137.34 | 2,352.90 | 0.00 | 0.00 | 1,864.43 | 1,816.80 | 2028.44 | 2034.21 | ||||||||||
61 | Average: | 2157 | 1994.4 | 1996.2 | 1990 | 2161.6 | 1967.6 | 1977.8 | 1977.6 | 2,190.12 | 2,322.98 | 2,337.87 | 2,103.10 | 1,922.06 | 1,948.93 | 2,022.36 | 2,268.95 | 2,132.29 | 2,267.15 | 0 | 0 | 1862.374 | 1827.802 | 2023.506 | 2039.478 | #DIV/0! | #DIV/0! | #DIV/0! | #DIV/0! | #DIV/0! | #DIV/0! | #DIV/0! | #DIV/0! | #DIV/0! | |
62 | Tencor PR Before Etching | ||||||||||||||||||||||||||||||||||
63 | Site 1: | 1946 | 1987 | 1925 | 1952 | 1959 | 1924 | 1920 | 1881 | 2129 | 2335 | 2310 | 1921.8 | 1983.3 | 1942.5 | 1935 | 1868 | 2,023.00 | 2,010.00 | 1931.7 | 1949 | 1897 | 1863 | 2008 | 2009 | ||||||||||
64 | Site 2: | 1951 | 1984 | 1943 | 1949 | 1935 | 1930 | 1931 | 1898 | 2134 | 2339 | 2317 | 1934.7 | 1980.8 | 1923.9 | 1916 | 1881 | 2,022.00 | 2,009.00 | 1912.8 | 1992 | 1915 | 1880 | 1989 | 2015 | ||||||||||
65 | Site 3: | 1948 | 1977 | 1907 | 1950 | 1977 | 1975 | 1912 | 1967 | 2132 | 2336 | 2325 | 1951.4 | 1976.5 | 1938.9 | 1926 | 1904 | 2,029.00 | 2,001.00 | 1926.8 | 1928 | 1905 | 1875 | 1998 | 2032 | ||||||||||
66 | Site 4: | 1948 | 1973 | 1932 | 1946 | 1948 | 1947 | 1915 | 1956 | 2130 | 2341 | 2313 | 1940.3 | 1867.3 | 1956.6 | 1918 | 1879 | 2,090.00 | 2,012.00 | 1938.9 | 1949 | 1911 | 1866 | 1998 | 2027 | ||||||||||
67 | Site 5: | 1957 | 1979 | 1946 | 1965 | 1945 | 1946 | 1925 | 1941 | 2123 | 2328 | 2317 | 1949 | 1950 | 1932.9 | 1935 | 1880 | 2,036.00 | 2,003.00 | 1949.9 | 1949 | 1912 | 1896 | 2006 | 2017 | ||||||||||
68 | Average: | 1950 | 1980 | 1930.6 | 1952.4 | 1952.8 | 1944.4 | 1920.6 | 1928.6 | 2129.6 | 2335.8 | 2316.4 | 1939.44 | 1951.58 | 1938.96 | 1926 | 1882.4 | 2,040.00 | 2,007.00 | 1932.02 | 1953.4 | 1908 | 1876 | 1999.8 | 2020 | #DIV/0! | #DIV/0! | #DIV/0! | #DIV/0! | #DIV/0! | #DIV/0! | #DIV/0! | #DIV/0! | #DIV/0! | |
69 | PR Step After Etching Sites | ||||||||||||||||||||||||||||||||||
70 | Nanospec Total Thickness After Etching (nm) | ||||||||||||||||||||||||||||||||||
71 | Site 1: | 2291.88 | 2236.44 | 1829.02 | 1964.77 | 1932.05 | 1236.98 | 2167.73 | 2659.95 | 1,526.40 | 1,510.40 | 1645.89 | 898.44 | 2067.16 | 2047.05 | 1767.08 | 1917.6 | ||||||||||||||||||
72 | Site 2: | 2276.61 | 2217.54 | 1834.89 | 1955.25 | 1929.19 | 1238.66 | 2160.73 | 2681.3 | 1,520.83 | 1,503.80 | 1642.47 | 883.47 | 2062.7 | 2048.28 | 1755.19 | 1912.46 | ||||||||||||||||||
73 | Site 3: | 2284.17 | 2238.05 | 1868.92 | 1964.74 | 1935.46 | 1252.81 | 2154.55 | 2689.02 | 1,549.07 | 1,521.30 | 1653.45 | 914.97 | 2071.45 | 2053.38 | 1769.73 | 1921.23 | ||||||||||||||||||
74 | Site 4: | 2271.86 | 2225.06 | 1831.62 | 1967.75 | 1939.69 | 1243.99 | 2157.84 | 2688.21 | 1,504.14 | 1,525.70 | 1648.9 | 902.3 | 2062.65 | 2047.18 | 1756.99 | 1925.45 | ||||||||||||||||||
75 | Site 5: | 2261.67 | 2220.87 | 1836.91 | 1927.31 | 1919.68 | 1227.23 | 2142 | 2525.73 | 1,519.77 | 1,515.40 | 1643.52 | 894.04 | 2070.57 | 2034.93 | 1746.74 | 1917.59 | ||||||||||||||||||
76 | Average: | #DIV/0! | #DIV/0! | #DIV/0! | #DIV/0! | #DIV/0! | #DIV/0! | #DIV/0! | #DIV/0! | 2277.238 | 2227.592 | 1840.272 | 1955.964 | 1931.214 | 1239.934 | 2156.57 | 2648.842 | 1,524.04 | 1,515.32 | 1,646.85 | 898.64 | 2,066.91 | 2,046.16 | 1759.146 | 1918.866 | ||||||||||
77 | Nanospec PR Thickness After Etching not Including Material (nm) | ||||||||||||||||||||||||||||||||||
78 | Site 1: | 675 | 463 | 1066 | 1785 | 2048.9 | 2131.59 | 1829.02 | 1721.79 | 1827.2 | 1236.98 | 1795.23 | 2074.04 | 1,163.52 | 924.25 | 297.71 | 1,051.39 | 1441.16 | 1421.05 | 1767.08 | 1917.6 | ||||||||||||||
79 | Site 2: | 909 | 407 | 1063 | 1774 | 2041.39 | 2113.59 | 1834.89 | 1720.03 | 1825.24 | 1238.66 | 1800.63 | 2087.82 | 1,177.60 | 897.50 | 296.22 | 1,062.99 | 1436.7 | 1422.28 | 1755.19 | 1912.46 | ||||||||||||||
80 | Site 3: | 934 | 204 | 1097 | 1800 | 2055.86 | 2139.52 | 1868.92 | 1736.43 | 1836.93 | 1252.81 | 1809.32 | 2092.15 | 1,205.45 | 922.46 | 283.13 | 1,032.03 | 1445.45 | 1427.38 | 1769.73 | 1921.23 | ||||||||||||||
81 | Site 4: | 682 | 693 | 1083 | 1787 | 2041.04 | 2126.41 | 1831.62 | 1736.93 | 1841.04 | 1243.99 | 1805.16 | 2090.98 | 1,147.02 | 936.62 | 296.10 | 1,048.24 | 1436.65 | 1421.18 | 1756.99 | 1925.45 | ||||||||||||||
82 | Site 5: | 683 | 694 | 1058 | 1778 | 2040.72 | 2127.97 | 1836.91 | 1706.36 | 1826.78 | 1227.23 | 1806.99 | 1912.24 | 1,182.04 | 904.33 | 292.02 | 1,048.46 | 1444.57 | 1408.93 | 1746.74 | 1917.59 | ||||||||||||||
83 | Average: | #DIV/0! | #DIV/0! | #DIV/0! | #DIV/0! | 776.6 | 492.2 | 1073.4 | 1784.8 | 2045.582 | 2127.816 | 1840.272 | 1724.308 | 1831.438 | 1239.934 | 1803.466 | 2051.446 | 1,175.13 | 917.03 | 293.036 | 1048.622 | 1440.906 | 1420.164 | 1759.146 | 1918.866 | #DIV/0! | #DIV/0! | #DIV/0! | #DIV/0! | #DIV/0! | #DIV/0! | #DIV/0! | #DIV/0! | #DIV/0! | |
84 | Tencor PR Step After Etching | ||||||||||||||||||||||||||||||||||
85 | Site 1: | 1545 | 1568 | 1961 | 1967 | 1064 | 714 | 1367 | 2101 | 2169 | 2276 | 2144 | 2167 | 1894.5 | 8777.3 | 1931 | 2176 | 1,078.00 | 1,068.00 | 1690 | 1003 | 1,985.00 | 1912 | 1973 | 2217 | ||||||||||
86 | Site 2: | 1550 | 1460 | 1966 | 1980 | 1099 | 783 | 1249 | 2084 | 2181 | 2260 | 2130 | 2238.7 | 1885.6 | 8701.2 | 1909 | 2153 | 1,086.00 | 1,114.00 | 1695 | 921.9 | 1,952.00 | 1848 | 2016 | 2163 | ||||||||||
87 | Site 3: | 1722 | 1457 | 1877 | 1949 | 1075 | 724 | 1361 | 2106 | 2144 | 2271 | 2163 | 2191.9 | 1896.9 | 8864.8 | 1907 | 2155 | 1,120.00 | 1,102.00 | 1690 | 1020 | 1,986.00 | 1866 | 2003 | 2164 | ||||||||||
88 | Site 4: | 1553 | 1494 | 1957 | 1914 | 966 | 667 | 1273 | 1966 | 2119 | 2255 | 2141 | 2193.2 | 1803.7 | 8834.5 | 1908 | 2152 | 1,109.00 | 1,096.00 | 1677 | 909.8 | 1,976.00 | 1918 | 2018 | 2161 | ||||||||||
89 | Site 5: | 1582 | 1486 | 1987 | 2025 | 1057 | 676 | 1153 | 1897 | 2126 | 2246 | 2128 | 2376.2 | 1898.2 | 8846.2 | 1918 | 2168 | 1,040.00 | 1,088.00 | 1681 | 931.5 | 1,961.00 | 1863 | 2021 | 2086 | ||||||||||
90 | Average: | 1590.4 | 1493 | 1949.6 | 1967 | 1052.2 | 712.8 | 1280.6 | 2030.8 | 2147.8 | 2261.6 | 2141.2 | 2233.4 | 1875.78 | 8804.8 | 1914.6 | 2160.8 | 1,086.60 | 1,093.60 | 1686.6 | 957.24 | 1972 | 1881.4 | 2006.2 | 2158.2 | #DIV/0! | #DIV/0! | #DIV/0! | #DIV/0! | #DIV/0! | #DIV/0! | #DIV/0! | #DIV/0! | #DIV/0! | |
91 | Tencor Etched PR Depth Sites (nm) | ||||||||||||||||||||||||||||||||||
92 | Site 1: | 486.40 | 468.70 | 7.80 | 101.90 | 1,061.40 | 1,461.70 | 782.80 | 6.60 | 94.40 | 147.50 | 454.70 | 265.80 | 135.20 | 720.20 | 213.90 | 2.00 | 945.00 | 942.00 | 241.70 | 946.00 | 364.70 | 369.70 | 276.2 | 13.30 | 0.00 | 0.00 | 0.00 | 0.00 | 0.00 | 0.00 | 0.00 | 0.00 | 0.00 | |
93 | Site 2: | 485.80 | 572.60 | 23.60 | 91.90 | 1,007.10 | 1,477.00 | 887.40 | -6.20 | 103.40 | 171.20 | 478.70 | 341.40 | 127.20 | 672.70 | 214.10 | 20.50 | 936.00 | 895.00 | 217.80 | 1,070.10 | 408.20 | 445.90 | 255.7 | 61.90 | 0.00 | 0.00 | 0.00 | 0.00 | 0.00 | 0.00 | 0.00 | 0.00 | 0.00 | |
94 | Site 3: | 309.30 | 565.60 | 76.10 | 120.50 | 1,072.90 | 1,521.10 | 827.40 | 59.50 | 128.40 | 150.50 | 450.80 | 264.80 | 111.60 | 641.10 | 219.10 | 46.50 | 909.00 | 899.00 | 236.80 | 908.00 | 360.80 | 424.40 | 243 | 87.90 | 0.00 | 0.00 | 0.00 | 0.00 | 0.00 | 0.00 | 0.00 | 0.00 | 0.00 | |
95 | Site 4: | 480.90 | 524.70 | 15.60 | 133.00 | 1,148.60 | 1,608.70 | 882.50 | 177.70 | 142.70 | 169.00 | 461.40 | 257.10 | 101.20 | 644.10 | 213.70 | 24.50 | 981.00 | 916.00 | 261.90 | 1,039.20 | 377.50 | 356.90 | 256.5 | 71.60 | 0.00 | 0.00 | 0.00 | 0.00 | 0.00 | 0.00 | 0.00 | 0.00 | 0.00 | |
96 | Site 5: | 457.60 | 536.90 | 3.60 | 27.60 | 1,053.60 | 1,599.30 | 1,003.40 | 183.90 | 124.20 | 158.60 | 479.80 | 333.80 | 90.10 | 618.70 | 227.00 | 9.40 | 996.00 | 915.00 | 268.90 | 1,017.50 | 401.70 | 433.20 | 281.9 | 130.80 | 0.00 | 0.00 | 0.00 | 0.00 | 0.00 | 0.00 | 0.00 | 0.00 | 0.00 | |
97 | Tencor Average Etched PR Depth (nm): | 444.00 | 533.70 | 25.34 | 94.98 | 1,068.72 | 1,533.56 | 876.70 | 84.30 | 118.62 | 159.36 | 465.08 | 292.58 | 113.06 | 659.36 | 217.56 | 20.58 | 953.40 | 913.40 | 245.42 | 996.16 | 382.58 | 406.02 | 262.66 | 96.77 | 0.00 | 0.00 | 0.00 | 0.00 | 0.00 | 0.00 | 0.00 | 0.00 | 0.00 | |
98 | Nanospec Etched PR Depth Sites(nm) | ||||||||||||||||||||||||||||||||||
99 | Site 1: | 1,489.00 | 1,492.00 | 911.00 | 197.00 | 144.64 | 192.86 | 499.60 | 263.62 | 96.00 | 709.25 | 233.54 | 139.69 | 965.17 | 1,272.49 | 297.71 | 1,051.39 | 416.26 | 409.11 | 259.39 | 123.72 | ||||||||||||||
100 | Site 2: | 1,251.00 | 1,564.00 | 918.00 | 201.00 | 147.03 | 200.90 | 497.03 | 453.12 | 88.22 | 712.83 | 225.01 | 53.70 | 947.72 | 1,078.51 | 296.22 | 1,062.99 | 422.75 | 435.41 | 264.23 | 124.87 | ||||||||||||||
101 | Site 3: | 1,231.00 | 1,764.00 | 877.00 | 182.00 | 135.18 | 188.87 | 477.05 | 439.28 | 85.54 | 700.85 | 214.23 | 150.27 | 924.04 | 1,288.34 | 283.13 | 1,032.03 | 417.87 | 380.23 | 248.99 | 116.36 | ||||||||||||||
102 | Site 4: | 1,477.00 | 1,282.00 | 893.00 | 187.00 | 152.96 | 199.60 | 510.60 | 263.83 | 91.49 | 704.51 | 208.65 | 148.59 | 993.59 | 1,262.67 | 296.10 | 1,048.24 | 430.60 | 405.57 | 267.49 | 121.49 | ||||||||||||||
103 | Site 5: | 1,477.00 | 1,275.00 | 923.00 | 197.00 | 142.89 | 193.57 | 503.70 | 474.09 | 91.86 | 717.54 | 213.05 | 95.28 | 955.30 | 1,348.57 | 292.02 | 1,048.46 | 419.86 | 407.87 | 281.7 | 116.62 | ||||||||||||||
104 | Average Nanospec PR Etch | 1,385.00 | 1,475.40 | 904.40 | 192.80 | 144.54 | 195.16 | 497.60 | 378.79 | 90.62 | 709.00 | 218.90 | 117.51 | 957.16 | 1,250.12 | 293.04 | 1,048.62 | 421.47 | 407.64 | 264.36 | 120.612 |
1 | Recipe: | sopAl | sopAl (2nd process) |
|---|---|---|---|
2 | Material: | Al2O3 | Al |
3 | Thickness (nm) | ||
4 | Gas1: | Cl2 | Cl2 |
5 | Gas1 Flow (sccm): | 10 | 25 |
6 | Gas2: | Ar | O2 |
7 | Gas2 Flow (sccm): | 10 | 1.3 |
8 | Gas3: | ||
9 | Gas3 Flow (sccm): | ||
10 | Pressure (mT): | 50 | 50 |
11 | Power (W): | 200 | |
12 | Time (min): | 0.75 | |
13 | Tencor Material Etch Rate (nm/min): | 27.76 | |
14 | Nanospec Material Etch Rate (nm/min) | ||
15 | Tencor Material Etch Uniformity: | 13.21 | |
16 | Nanospec Material Etch Uniformity: (+/- XX%) | ||
17 | Tencor 1813 PR Etch Rate (nm/min) | ||
18 | Nano 1813 PR Etch Rate (nm/min) | ||
19 | Thickness of material (nm) | ||
20 | Site 1: | ||
21 | Site 2: | ||
22 | Site 3: | ||
23 | Site 4: | ||
24 | Site 5: | ||
25 | Average: | ||
26 | Tencor Step After PR Strip Sites (nm) | ||
27 | Site 1: | 23.7 | |
28 | Site 2: | 23.6 | |
29 | Site 3: | 20.1 | |
30 | Site 4: | 18.2 | |
31 | Site 5: | 18.5 | |
32 | Average: | 20.82 | |
33 | Nanospec Depth After PR Strip Sites (nm) | ||
34 | Site 1: | ||
35 | Site 2: | ||
36 | Site 3: | ||
37 | Site 4: | ||
38 | Site 5: | ||
39 | Average: | ||
40 | Nanospec Etched Thickness Sites (nm) | ||
41 | Site 1: | ||
42 | Site 2: | ||
43 | Site 3: | ||
44 | Site 4: | ||
45 | Site 5: | ||
46 | Average: | ||
47 | PR Sites Before Etching | ||
48 | Nanospec Total Thickness of Pr Before Etching (nm) | ||
49 | Site 1: | ||
50 | Site 2: | ||
51 | Site 3: | ||
52 | Site 4: | ||
53 | Site 5: | ||
54 | Average: | ||
55 | Nanospec PR Thickness Not Including Material (nm) | ||
56 | Site 1: | ||
57 | Site 2: | ||
58 | Site 3: | ||
59 | Site 4: | ||
60 | Site 5: | ||
61 | Average: | #DIV/0! | #DIV/0! |
62 | Tencor PR Before Etching | ||
63 | Site 1: | ||
64 | Site 2: | ||
65 | Site 3: | ||
66 | Site 4: | ||
67 | Site 5: | ||
68 | Average: | #DIV/0! | #DIV/0! |
69 | PR Step After Etching Sites | ||
70 | Nanospec Total Thickness After Etching (nm) | ||
71 | Site 1: | ||
72 | Site 2: | ||
73 | Site 3: | ||
74 | Site 4: | ||
75 | Site 5: | ||
76 | Average: | ||
77 | Nanospec PR Thickness After Etching not Including Material (nm) | ||
78 | Site 1: | ||
79 | Site 2: | ||
80 | Site 3: | ||
81 | Site 4: | ||
82 | Site 5: | ||
83 | Average: | #DIV/0! | #DIV/0! |
84 | Tencor PR Step After Etching | ||
85 | Site 1: | ||
86 | Site 2: | ||
87 | Site 3: | ||
88 | Site 4: | ||
89 | Site 5: | ||
90 | Average: | #DIV/0! | #DIV/0! |
91 | Tencor Etched PR Depth Sites (nm) | ||
92 | Site 1: | 0.00 | 0.00 |
93 | Site 2: | 0.00 | 0.00 |
94 | Site 3: | 0.00 | 0.00 |
95 | Site 4: | 0.00 | 0.00 |
96 | Site 5: | 0.00 | 0.00 |
97 | Tencor Average Etched PR Depth (nm): | 0.00 | 0.00 |
98 | Nanospec Etched PR Depth Sites(nm) | ||
99 | Site 1: | ||
100 | Site 2: | ||
101 | Site 3: | ||
102 | Site 4: | ||
103 | Site 5: | ||
104 | Average Nanospec PR Etch | ||
105 | |||
106 | |||
107 | |||
108 | |||
109 | |||
110 | |||
111 | |||
112 | |||
113 | |||
114 | |||
115 | |||
116 |
1 | Recipe: | sopAr | sopAr |
|---|---|---|---|
2 | Material: | Au | Au |
3 | Thickness (nm) | ||
4 | Gas1: | Ar | Ar |
5 | Gas1 Flow (sccm): | 20 | 20 |
6 | Gas2: | ||
7 | Gas2 Flow (sccm): | ||
8 | Gas3: | ||
9 | Gas3 Flow (sccm): | ||
10 | Pressure (mT): | 20 | 20 |
11 | Power (W): | 200 | 200 |
12 | Time (min): | 10 | 20 |
13 | Tencor Material Etch Rate (nm/min): | 8.44 | 8.41 |
14 | Nanospec Material Etch Rate (nm/min) | ||
15 | Tencor Material Etch Uniformity: | 1.95 | 1.64 |
16 | Nanospec Material Etch Uniformity: (+/- XX%) | ||
17 | Tencor 1813 PR Etch Rate (nm/min) | 69.25 | |
18 | Nano 1813 PR Etch Rate (nm/min) | 44.40 | 53.44 |
19 | Thickness of material (nm) | ||
20 | Site 1: | ||
21 | Site 2: | ||
22 | Site 3: | ||
23 | Site 4: | ||
24 | Site 5: | ||
25 | Average: | ||
26 | Tencor Step After PR Strip Sites (nm) | ||
27 | Site 1: | 85.4 | 166.4 |
28 | Site 2: | 84.8 | 171.1 |
29 | Site 3: | 83.3 | 170.9 |
30 | Site 4: | 85.9 | 166.6 |
31 | Site 5: | 82.6 | 165.6 |
32 | Average: | 84.4 | 168.12 |
33 | Nanospec Depth After PR Strip Sites (nm) | ||
34 | Site 1: | ||
35 | Site 2: | ||
36 | Site 3: | ||
37 | Site 4: | ||
38 | Site 5: | ||
39 | Average: | ||
40 | Nanospec Etched Thickness Sites (nm) | ||
41 | Site 1: | 0 | 0 |
42 | Site 2: | 0 | 0 |
43 | Site 3: | 0 | 0 |
44 | Site 4: | 0 | 0 |
45 | Site 5: | 0 | 0 |
46 | Average: | 0 | 0 |
47 | PR Sites Before Etching | ||
48 | Nanospec Total Thickness of Pr Before Etching (nm) | ||
49 | Site 1: | ||
50 | Site 2: | ||
51 | Site 3: | ||
52 | Site 4: | ||
53 | Site 5: | ||
54 | Average: | ||
55 | Nanospec PR Thickness Not Including Material (nm) | 2155 | 2164 |
56 | Site 1: | 2156 | 2160 |
57 | Site 2: | 2156 | 2165 |
58 | Site 3: | 2155 | 2159 |
59 | Site 4: | 2163 | 2160 |
60 | Site 5: | 2157 | 2161.6 |
61 | Average: | ||
62 | Tencor PR Before Etching | 1946 | 1959 |
63 | Site 1: | 1951 | 1935 |
64 | Site 2: | 1948 | 1977 |
65 | Site 3: | 1948 | 1948 |
66 | Site 4: | 1957 | 1945 |
67 | Site 5: | 1950 | 1952.8 |
68 | Average: | ||
69 | PR Step After Etching Sites | ||
70 | Nanospec Total Thickness After Etching (nm) | ||
71 | Site 1: | ||
72 | Site 2: | ||
73 | Site 3: | ||
74 | Site 4: | ||
75 | Site 5: | #DIV/0! | #DIV/0! |
76 | Average: | ||
77 | Nanospec PR Thickness After Etching not Including Material (nm) | 675 | |
78 | Site 1: | 909 | |
79 | Site 2: | 934 | |
80 | Site 3: | 682 | |
81 | Site 4: | 683 | |
82 | Site 5: | #DIV/0! | 776.6 |
83 | Average: | ||
84 | Tencor PR Step After Etching | 1545 | 1064 |
85 | Site 1: | 1550 | 1099 |
86 | Site 2: | 1722 | 1075 |
87 | Site 3: | 1553 | 966 |
88 | Site 4: | 1582 | 1057 |
89 | Site 5: | 1590.4 | 1052.2 |
90 | Average: | ||
91 | Tencor Etched PR Depth Sites (nm) | 486.40 | 1,061.40 |
92 | Site 1: | 485.80 | 1,007.10 |
93 | Site 2: | 309.30 | 1,072.90 |
94 | Site 3: | 480.90 | 1,148.60 |
95 | Site 4: | 457.60 | 1,053.60 |
96 | Site 5: | 444.00 | 1,068.72 |
97 | Tencor Average Etched PR Depth (nm): | ||
98 | Nanospec Etched PR Depth Sites(nm) | 1,489.00 | |
99 | Site 1: | 1,251.00 | |
100 | Site 2: | 1,231.00 | |
101 | Site 3: | 1,477.00 | |
102 | Site 4: | 1,477.00 | |
103 | Site 5: | 1,385.00 | |
104 | Average Nanospec PR Etch |
1 | Recipe: | sopAr |
|---|---|---|
2 | Material: | Pt |
3 | Thickness (nm) | |
4 | Gas1: | Ar |
5 | Gas1 Flow (sccm): | 20 |
6 | Gas2: | |
7 | Gas2 Flow (sccm): | |
8 | Gas3: | |
9 | Gas3 Flow (sccm): | |
10 | Pressure (mT): | 20 mT |
11 | Power (W): | 200 |
12 | Time (min): | 10 |
13 | Tencor Material Etch Rate (nm/min): | 4.67 |
14 | Nanospec Material Etch Rate (nm/min) | |
15 | Tencor Material Etch Uniformity: | 6.21 |
16 | Nanospec Material Etch Uniformity: (+/- XX%) | |
17 | Tencor 1813 PR Etch Rate (nm/min) | |
18 | Nano 1813 PR Etch Rate (nm/min) | 53.37 |
19 | Thickness of material (nm) | |
20 | Site 1: | |
21 | Site 2: | |
22 | Site 3: | |
23 | Site 4: | |
24 | Site 5: | |
25 | Average: | |
26 | Tencor Step After PR Strip Sites (nm) | |
27 | Site 1: | 49.7 |
28 | Site 2: | 48.6 |
29 | Site 3: | 45.6 |
30 | Site 4: | 45.7 |
31 | Site 5: | 43.9 |
32 | Average: | 46.7 |
33 | Nanospec Depth After PR Strip Sites (nm) | |
34 | Site 1: | |
35 | Site 2: | |
36 | Site 3: | |
37 | Site 4: | |
38 | Site 5: | |
39 | Average: | |
40 | Nanospec Etched Thickness Sites (nm) | |
41 | Site 1: | 0 |
42 | Site 2: | 0 |
43 | Site 3: | 0 |
44 | Site 4: | 0 |
45 | Site 5: | 0 |
46 | Average: | 0 |
47 | PR Sites Before Etching | |
48 | Nanospec Total Thickness of Pr Before Etching (nm) | |
49 | Site 1: | |
50 | Site 2: | |
51 | Site 3: | |
52 | Site 4: | |
53 | Site 5: | |
54 | Average: | |
55 | Nanospec PR Thickness Not Including Material (nm) | |
56 | Site 1: | 1994 |
57 | Site 2: | 1998 |
58 | Site 3: | 1992 |
59 | Site 4: | 1992 |
60 | Site 5: | 1996 |
61 | Average: | 1994.4 |
62 | Tencor PR Before Etching | |
63 | Site 1: | 1987 |
64 | Site 2: | 1984 |
65 | Site 3: | 1977 |
66 | Site 4: | 1973 |
67 | Site 5: | 1979 |
68 | Average: | 1980 |
69 | PR Step After Etching Sites | |
70 | Nanospec Total Thickness After Etching (nm) | |
71 | Site 1: | |
72 | Site 2: | |
73 | Site 3: | |
74 | Site 4: | |
75 | Site 5: | |
76 | Average: | #DIV/0! |
77 | Nanospec PR Thickness After Etching not Including Material (nm) | |
78 | Site 1: | |
79 | Site 2: | |
80 | Site 3: | |
81 | Site 4: | |
82 | Site 5: | |
83 | Average: | #DIV/0! |
84 | Tencor PR Step After Etching | |
85 | Site 1: | 1568 |
86 | Site 2: | 1460 |
87 | Site 3: | 1457 |
88 | Site 4: | 1494 |
89 | Site 5: | 1486 |
90 | Average: | 1493 |
91 | Tencor Etched PR Depth Sites (nm) | |
92 | Site 1: | 468.70 |
93 | Site 2: | 572.60 |
94 | Site 3: | 565.60 |
95 | Site 4: | 524.70 |
96 | Site 5: | 536.90 |
97 | Tencor Average Etched PR Depth (nm): | 533.70 |
98 | Nanospec Etched PR Depth Sites(nm) | |
99 | Site 1: | |
100 | Site 2: | |
101 | Site 3: | |
102 | Site 4: | |
103 | Site 5: | |
104 | Average Nanospec PR Etch |
1 | Recipe: | sopCF4O2 | sopW |
|---|---|---|---|
2 | Material: | Ti | Ti |
3 | Thickness (nm) | 400 | |
4 | Gas1: | CF4 | SF6 |
5 | Gas1 Flow (sccm): | 35 | 25 |
6 | Gas2: | O2 | CF4 |
7 | Gas2 Flow (sccm): | 3.5 | 10 |
8 | Gas3: | O2 | |
9 | Gas3 Flow (sccm): | 3.5 | |
10 | Pressure (mT): | 75 | 75 |
11 | Power (W): | 200 | 150 |
12 | Time (min): | 9 | 1.5 |
13 | Tencor Material Etch Rate (nm/min): | 26.30 | 42.80 |
14 | Nanospec Material Etch Rate (nm/min) | ||
15 | Tencor Material Etch Uniformity: | 15.00 | 3.27 |
16 | Nanospec Material Etch Uniformity: (+/- XX%) | ||
17 | Tencor 1813 PR Etch Rate (nm/min) | 100.4888889 | |
18 | Nano 1813 PR Etch Rate (nm/min) | 97.41 | |
19 | Thickness of material (nm) | ||
20 | Site 1: | ||
21 | Site 2: | ||
22 | Site 3: | ||
23 | Site 4: | ||
24 | Site 5: | ||
25 | Average: | ||
26 | Tencor Step After PR Strip Sites (nm) | ||
27 | Site 1: | 229.8 | 63.9 |
28 | Site 2: | 205.4 | 62.2 |
29 | Site 3: | 276.4 | 66.3 |
30 | Site 4: | 240.5 | 62.2 |
31 | Site 5: | 231.4 | 66.4 |
32 | Average: | 236.7 | 64.2 |
33 | Nanospec Depth After PR Strip Sites (nm) | ||
34 | Site 1: | ||
35 | Site 2: | ||
36 | Site 3: | ||
37 | Site 4: | ||
38 | Site 5: | ||
39 | Average: | ||
40 | Nanospec Etched Thickness Sites (nm) | ||
41 | Site 1: | 0 | |
42 | Site 2: | 0 | |
43 | Site 3: | 0 | |
44 | Site 4: | 0 | |
45 | Site 5: | 0 | |
46 | Average: | 0 | |
47 | PR Sites Before Etching | ||
48 | Nanospec Total Thickness of Pr Before Etching (nm) | ||
49 | Site 1: | ||
50 | Site 2: | ||
51 | Site 3: | ||
52 | Site 4: | ||
53 | Site 5: | ||
54 | Average: | ||
55 | Nanospec PR Thickness Not Including Material (nm) | ||
56 | Site 1: | 1977 | |
57 | Site 2: | 1981 | |
58 | Site 3: | 1974 | |
59 | Site 4: | 1976 | |
60 | Site 5: | 1981 | |
61 | Average: | 1977.8 | #DIV/0! |
62 | Tencor PR Before Etching | ||
63 | Site 1: | 1920 | |
64 | Site 2: | 1931 | |
65 | Site 3: | 1912 | |
66 | Site 4: | 1915 | |
67 | Site 5: | 1925 | |
68 | Average: | 1920.6 | #DIV/0! |
69 | PR Step After Etching Sites | ||
70 | Nanospec Total Thickness After Etching (nm) | ||
71 | Site 1: | ||
72 | Site 2: | ||
73 | Site 3: | ||
74 | Site 4: | ||
75 | Site 5: | ||
76 | Average: | #DIV/0! | |
77 | Nanospec PR Thickness After Etching not Including Material (nm) | ||
78 | Site 1: | 1066 | |
79 | Site 2: | 1063 | |
80 | Site 3: | 1097 | |
81 | Site 4: | 1083 | |
82 | Site 5: | 1058 | |
83 | Average: | 1073.4 | #DIV/0! |
84 | Tencor PR Step After Etching | ||
85 | Site 1: | 1367 | |
86 | Site 2: | 1249 | |
87 | Site 3: | 1361 | |
88 | Site 4: | 1273 | |
89 | Site 5: | 1153 | |
90 | Average: | 1280.6 | #DIV/0! |
91 | Tencor Etched PR Depth Sites (nm) | ||
92 | Site 1: | 782.80 | 0.00 |
93 | Site 2: | 887.40 | 0.00 |
94 | Site 3: | 827.40 | 0.00 |
95 | Site 4: | 882.50 | 0.00 |
96 | Site 5: | 1,003.40 | 0.00 |
97 | Tencor Average Etched PR Depth (nm): | 876.70 | 0.00 |
98 | Nanospec Etched PR Depth Sites(nm) | ||
99 | Site 1: | 911.00 | |
100 | Site 2: | 918.00 | |
101 | Site 3: | 877.00 | |
102 | Site 4: | 893.00 | |
103 | Site 5: | 923.00 | |
104 | Average Nanospec PR Etch | 904.40 |
1 | Recipe: | sopCl2O2 | sopCl2O2 | sopCl2O2 | sopCl2O2 |
|---|---|---|---|---|---|
2 | Material: | Cr | Cr | Cr | Cr |
3 | Thickness (nm) | ||||
4 | Gas1: | O2 | O2 | O2 | O2 |
5 | Gas1 Flow (sccm): | 20 | 20 | 20 | 2 |
6 | Gas2: | Cl2 | Cl2 | Cl2 | Cl2 |
7 | Gas2 Flow (sccm): | 20 | 20 | 20 | 40 |
8 | Gas3: | ||||
9 | Gas3 Flow (sccm): | ||||
10 | Pressure (mT): | 150 | 150 | 150 | 150 |
11 | Power (W): | 200 | 200 | 200 | 200 |
12 | Time (min): | 2 | 3.5 | 3.5 | 3.25 |
13 | Tencor Material Etch Rate (nm/min): | 54.79 | 53.29 | 43.93 | 66.63 |
14 | Nanospec Material Etch Rate (nm/min) | ||||
15 | Tencor Material Etch Uniformity: | 16.11 | 23.24 | 35.67 | 3.67 |
16 | Nanospec Material Etch Uniformity: (+/- XX%) | ||||
17 | Tencor 1813 PR Etch Rate (nm/min) | 55.09 | |||
18 | Nano 1813 PR Etch Rate (nm/min) | 47.49 | 24.09 | ||
19 | Thickness of material (nm) | ||||
20 | Site 1: | ||||
21 | Site 2: | ||||
22 | Site 3: | ||||
23 | Site 4: | ||||
24 | Site 5: | ||||
25 | Average: | ||||
26 | Tencor Step After PR Strip Sites (nm) | ||||
27 | Site 1: | 116.9 | 226.6 | 204.9 | 217.4 |
28 | Site 2: | 122.9 | 179.8 | 181.3 | 208.7 |
29 | Site 3: | 119.5 | 198.5 | 149.2 | 208.8 |
30 | Site 4: | 101 | 187.7 | 138.2 | 224.6 |
31 | Site 5: | 87.6 | 139.9 | 95.2 | 223.2 |
32 | Average: | 109.58 | 186.5 | 153.76 | 216.54 |
33 | Nanospec Depth After PR Strip Sites (nm) | ||||
34 | Site 1: | ||||
35 | Site 2: | ||||
36 | Site 3: | ||||
37 | Site 4: | ||||
38 | Site 5: | ||||
39 | Average: | ||||
40 | Nanospec Etched Thickness Sites (nm) | ||||
41 | Site 1: | 0 | 0 | ||
42 | Site 2: | 0 | 0 | ||
43 | Site 3: | 0 | 0 | ||
44 | Site 4: | 0 | 0 | ||
45 | Site 5: | 0 | 0 | ||
46 | Average: | 0 | 0 | ||
47 | PR Sites Before Etching | ||||
48 | Nanospec Total Thickness of Pr Before Etching (nm) | ||||
49 | Site 1: | ||||
50 | Site 2: | ||||
51 | Site 3: | ||||
52 | Site 4: | ||||
53 | Site 5: | ||||
54 | Average: | ||||
55 | Nanospec PR Thickness Not Including Material (nm) | ||||
56 | Site 1: | 1993 | 1982 | ||
57 | Site 2: | 1985 | 1975 | ||
58 | Site 3: | 1989 | 1982 | ||
59 | Site 4: | 1991 | 1974 | ||
60 | Site 5: | 1992 | 1975 | ||
61 | Average: | 1990 | 1977.6 | #DIV/0! | |
62 | Tencor PR Before Etching | ||||
63 | Site 1: | 1952 | 1881 | ||
64 | Site 2: | 1949 | 1898 | ||
65 | Site 3: | 1950 | 1967 | ||
66 | Site 4: | 1946 | 1956 | ||
67 | Site 5: | 1965 | 1941 | ||
68 | Average: | 1952.4 | 1928.6 | #DIV/0! | |
69 | PR Step After Etching Sites | ||||
70 | Nanospec Total Thickness After Etching (nm) | ||||
71 | Site 1: | ||||
72 | Site 2: | ||||
73 | Site 3: | ||||
74 | Site 4: | ||||
75 | Site 5: | ||||
76 | Average: | #DIV/0! | #DIV/0! | ||
77 | Nanospec PR Thickness After Etching not Including Material (nm) | ||||
78 | Site 1: | 1785 | |||
79 | Site 2: | 1774 | |||
80 | Site 3: | 1800 | |||
81 | Site 4: | 1787 | |||
82 | Site 5: | 1778 | |||
83 | Average: | #DIV/0! | 1784.8 | #DIV/0! | |
84 | Tencor PR Step After Etching | ||||
85 | Site 1: | 1967 | 2101 | ||
86 | Site 2: | 1980 | 2084 | ||
87 | Site 3: | 1949 | 2106 | ||
88 | Site 4: | 1914 | 1966 | ||
89 | Site 5: | 2025 | 1897 | ||
90 | Average: | 1967 | 2030.8 | #DIV/0! | |
91 | Tencor Etched PR Depth Sites (nm) | ||||
92 | Site 1: | 101.90 | 6.60 | 0.00 | |
93 | Site 2: | 91.90 | -6.20 | 0.00 | |
94 | Site 3: | 120.50 | 59.50 | 0.00 | |
95 | Site 4: | 133.00 | 177.70 | 0.00 | |
96 | Site 5: | 27.60 | 183.90 | 0.00 | |
97 | Tencor Average Etched PR Depth (nm): | 94.98 | 84.30 | 0.00 | |
98 | Nanospec Etched PR Depth Sites(nm) | ||||
99 | Site 1: | 197.00 | |||
100 | Site 2: | 201.00 | |||
101 | Site 3: | 182.00 | |||
102 | Site 4: | 187.00 | |||
103 | Site 5: | 197.00 | |||
104 | Average Nanospec PR Etch | 192.80 | |||
105 | |||||
106 | |||||
107 | |||||
108 | |||||
109 | |||||
110 | |||||
111 |
1 | Recipe: | sopW | sopW |
|---|---|---|---|
2 | Material: | W | W |
3 | Thickness (nm) | 400 | 400 |
4 | Gas1: | SF6 | SF6 |
5 | Gas1 Flow (sccm): | 25 | 25 |
6 | Gas2: | CF4 | CF4 |
7 | Gas2 Flow (sccm): | 10 | 10 |
8 | Gas3: | O2 | O2 |
9 | Gas3 Flow (sccm): | 3.5 | 3.5 |
10 | Pressure (mT): | 75 | 75 |
11 | Power (W): | 150 | 150 |
12 | Time (min): | 1.5 | 1.5 |
13 | Tencor Material Etch Rate (nm/min): | 140.87 | 156.23 |
14 | Nanospec Material Etch Rate (nm/min) | ||
15 | Tencor Material Etch Uniformity: | 5.09 | 3.63 |
16 | Nanospec Material Etch Uniformity: (+/- XX%) | ||
17 | Tencor 1813 PR Etch Rate (nm/min) | 64.51 | |
18 | Nano 1813 PR Etch Rate (nm/min) | 80.41 | |
19 | Thickness of material (nm) | ||
20 | Site 1: | ||
21 | Site 2: | ||
22 | Site 3: | ||
23 | Site 4: | ||
24 | Site 5: | ||
25 | Average: | ||
26 | Tencor Step After PR Strip Sites (nm) | ||
27 | Site 1: | 221.3 | 240.5 |
28 | Site 2: | 209.9 | 225 |
29 | Site 3: | 219.9 | 234.6 |
30 | Site 4: | 205.6 | 242 |
31 | Site 5: | 199.8 | 229.6 |
32 | Average: | 211.3 | 234.34 |
33 | Nanospec Depth After PR Strip Sites (nm) | ||
34 | Site 1: | ||
35 | Site 2: | ||
36 | Site 3: | ||
37 | Site 4: | ||
38 | Site 5: | ||
39 | Average: | ||
40 | Nanospec Etched Thickness Sites (nm) | ||
41 | Site 1: | ||
42 | Site 2: | ||
43 | Site 3: | ||
44 | Site 4: | ||
45 | Site 5: | ||
46 | Average: | ||
47 | PR Sites Before Etching | ||
48 | Nanospec Total Thickness of Pr Before Etching (nm) | ||
49 | Site 1: | 2041.32 | |
50 | Site 2: | 2037.33 | |
51 | Site 3: | 2037.59 | |
52 | Site 4: | 2046.94 | |
53 | Site 5: | 2034.21 | |
54 | Average: | 2039.478 | |
55 | Nanospec PR Thickness Not Including Material (nm) | ||
56 | Site 1: | 2041.32 | |
57 | Site 2: | 2037.33 | |
58 | Site 3: | 2037.59 | |
59 | Site 4: | 2046.94 | |
60 | Site 5: | 2034.21 | |
61 | Average: | 2039.478 | #DIV/0! |
62 | Tencor PR Before Etching | ||
63 | Site 1: | 2009 | |
64 | Site 2: | 2015 | |
65 | Site 3: | 2032 | |
66 | Site 4: | 2027 | |
67 | Site 5: | 2017 | |
68 | Average: | 2020 | #DIV/0! |
69 | PR Step After Etching Sites | ||
70 | Nanospec Total Thickness After Etching (nm) | ||
71 | Site 1: | 1917.6 | |
72 | Site 2: | 1912.46 | |
73 | Site 3: | 1921.23 | |
74 | Site 4: | 1925.45 | |
75 | Site 5: | 1917.59 | |
76 | Average: | 1918.866 | |
77 | Nanospec PR Thickness After Etching not Including Material (nm) | ||
78 | Site 1: | 1917.6 | |
79 | Site 2: | 1912.46 | |
80 | Site 3: | 1921.23 | |
81 | Site 4: | 1925.45 | |
82 | Site 5: | 1917.59 | |
83 | Average: | 1918.866 | #DIV/0! |
84 | Tencor PR Step After Etching | ||
85 | Site 1: | 2217 | |
86 | Site 2: | 2163 | |
87 | Site 3: | 2164 | |
88 | Site 4: | 2161 | |
89 | Site 5: | 2086 | |
90 | Average: | 2158.2 | #DIV/0! |
91 | Tencor Etched PR Depth Sites (nm) | ||
92 | Site 1: | 13.30 | 0.00 |
93 | Site 2: | 61.90 | 0.00 |
94 | Site 3: | 87.90 | 0.00 |
95 | Site 4: | 71.60 | 0.00 |
96 | Site 5: | 130.80 | 0.00 |
97 | Tencor Average Etched PR Depth (nm): | 96.77 | 0.00 |
98 | Nanospec Etched PR Depth Sites(nm) | ||
99 | Site 1: | 123.72 | |
100 | Site 2: | 124.87 | |
101 | Site 3: | 116.36 | |
102 | Site 4: | 121.49 | |
103 | Site 5: | 116.62 | |
104 | Average Nanospec PR Etch | 120.612 |
1 | Recipe: | sopCF4O2 | sopSF6O2 | sopAr |
|---|---|---|---|---|
2 | Material: | SiN | SiN | SiN |
3 | Thickness (nm) | |||
4 | Gas1: | CF4 | SF6 | Ar |
5 | Gas1 Flow (sccm): | 35 | 26 | 20 |
6 | Gas2: | O2 | O2 | |
7 | Gas2 Flow (sccm): | 3.5 | 3.5 | |
8 | Gas3: | |||
9 | Gas3 Flow (sccm): | |||
10 | Pressure (mT): | 75 | 75 | 20 |
11 | Power (W): | 200 | 200 | 200 |
12 | Time (min): | 1.5 | 1.75 | 20 |
13 | Tencor Material Etch Rate (nm/min): | 91.21 | 117.81 | 1.66 |
14 | Nanospec Material Etch Rate (nm/min) | 99.47 | 130.38 | 1.59 |
15 | Tencor Material Etch Uniformity: | 8.48 | 2.40 | 5.28 |
16 | Nanospec Material Etch Uniformity: (+/- XX%) | 1.50 | 4.08 | 2.66 |
17 | Tencor 1813 PR Etch Rate (nm/min) | 96.36 | 125.08 | 47.86 |
18 | Nano 1813 PR Etch Rate (nm/min) | 79.08 | 124.32 | 47.67 |
19 | Thickness of material (nm) | |||
20 | Site 1: | 242.98 | 372.5 | 362.88 |
21 | Site 2: | 235.22 | 360.1 | 343.23 |
22 | Site 3: | 228.31 | 345.23 | 343.62 |
23 | Site 4: | 230.82 | 352.68 | 357.12 |
24 | Site 5: | 220.95 | 335.01 | 337.73 |
25 | Average: | 231.656 | 353.104 | 348.92 |
26 | Tencor Step After PR Strip Sites (nm) | |||
27 | Site 1: | 134.4 | 209.9 | 31.90 |
28 | Site 2: | 150.4 | 207.1 | 33.00 |
29 | Site 3: | 140.4 | 200.1 | 32.60 |
30 | Site 4: | 131.7 | 203.7 | 32.80 |
31 | Site 5: | 127.2 | 210 | 35.40 |
32 | Average: | 136.82 | 206.16 | 33.14 |
33 | Nanospec Depth After PR Strip Sites (nm) | |||
34 | Site 1: | 91.51 | 140.32 | 331.48 |
35 | Site 2: | 84.05 | 133.09 | 311.14 |
36 | Site 3: | 81.32 | 126.87 | 312.39 |
37 | Site 4: | 82.63 | 126.4 | 325.80 |
38 | Site 5: | 72.76 | 98.02 | 304.81 |
39 | Average: | 82.454 | 124.94 | 317.12 |
40 | Nanospec Etched Thickness Sites (nm) | |||
41 | Site 1: | 151.47 | 232.18 | 31.40 |
42 | Site 2: | 151.17 | 227.01 | 32.09 |
43 | Site 3: | 146.99 | 218.36 | 31.23 |
44 | Site 4: | 148.19 | 226.28 | 31.32 |
45 | Site 5: | 148.19 | 236.99 | 32.92 |
46 | Average: | 149.202 | 228.164 | 31.79 |
47 | PR Sites Before Etching | |||
48 | Nanospec Total Thickness of Pr Before Etching (nm) | |||
49 | Site 1: | 2436.52 | 2401.27 | 2,491.57 |
50 | Site 2: | 2423.64 | 2385.74 | 2,468.55 |
51 | Site 3: | 2419.35 | 2368.78 | 2,473.11 |
52 | Site 4: | 2424.82 | 2366.49 | 2,497.73 |
53 | Site 5: | 2404.56 | 2355.05 | 2,475.07 |
54 | Average: | 2421.778 | 2375.466 | |
55 | Nanospec PR Thickness Not Including Material (nm) | |||
56 | Site 1: | 2193.54 | 2028.77 | 2,128.69 |
57 | Site 2: | 2188.42 | 2025.64 | 2,125.32 |
58 | Site 3: | 2191.04 | 2023.55 | 2,129.49 |
59 | Site 4: | 2194 | 2013.81 | 2,140.61 |
60 | Site 5: | 2183.61 | 2020.04 | 2,137.34 |
61 | Average: | 2,190.12 | 2,022.36 | 2,132.29 |
62 | Tencor PR Before Etching | |||
63 | Site 1: | 2129 | 1935 | 2,023.00 |
64 | Site 2: | 2134 | 1916 | 2,022.00 |
65 | Site 3: | 2132 | 1926 | 2,029.00 |
66 | Site 4: | 2130 | 1918 | 2,090.00 |
67 | Site 5: | 2123 | 1935 | 2,036.00 |
68 | Average: | 2129.6 | 1926 | 2,040.00 |
69 | PR Step After Etching Sites | |||
70 | Nanospec Total Thickness After Etching (nm) | |||
71 | Site 1: | 2291.88 | 2167.73 | 1,526.40 |
72 | Site 2: | 2276.61 | 2160.73 | 1,520.83 |
73 | Site 3: | 2284.17 | 2154.55 | 1,549.07 |
74 | Site 4: | 2271.86 | 2157.84 | 1,504.14 |
75 | Site 5: | 2261.67 | 2142 | 1,519.77 |
76 | Average: | 2277.238 | 2156.57 | 1,524.04 |
77 | Nanospec PR Thickness After Etching not Including Material (nm) | |||
78 | Site 1: | 2048.9 | 1795.23 | 1,163.52 |
79 | Site 2: | 2041.39 | 1800.63 | 1,177.60 |
80 | Site 3: | 2055.86 | 1809.32 | 1,205.45 |
81 | Site 4: | 2041.04 | 1805.16 | 1,147.02 |
82 | Site 5: | 2040.72 | 1806.99 | 1,182.04 |
83 | Average: | 2045.582 | 1803.466 | 1,175.13 |
84 | Tencor PR Step After Etching | |||
85 | Site 1: | 2169 | 1931 | 1,078.00 |
86 | Site 2: | 2181 | 1909 | 1,086.00 |
87 | Site 3: | 2144 | 1907 | 1,120.00 |
88 | Site 4: | 2119 | 1908 | 1,109.00 |
89 | Site 5: | 2126 | 1918 | 1,040.00 |
90 | Average: | 2147.8 | 1914.6 | 1,086.60 |
91 | Tencor Etched PR Depth Sites (nm) | |||
92 | Site 1: | 94.40 | 213.90 | 945.00 |
93 | Site 2: | 103.40 | 214.10 | 936.00 |
94 | Site 3: | 128.40 | 219.10 | 909.00 |
95 | Site 4: | 142.70 | 213.70 | 981.00 |
96 | Site 5: | 124.20 | 227.00 | 996.00 |
97 | Tencor Average Etched PR Depth (nm): | 118.62 | 217.56 | 953.40 |
98 | Nanospec Etched PR Depth Sites(nm) | |||
99 | Site 1: | 144.64 | 233.54 | 965.17 |
100 | Site 2: | 147.03 | 225.01 | 947.72 |
101 | Site 3: | 135.18 | 214.23 | 924.04 |
102 | Site 4: | 152.96 | 208.65 | 993.59 |
103 | Site 5: | 142.89 | 213.05 | 955.30 |
104 | Average Nanospec PR Etch | 144.54 | 218.90 | 957.16 |
1 | Recipe: | sopCF4O2 |
|---|---|---|
2 | Material: | SiO2 |
3 | Thickness (nm) | |
4 | Gas1: | CF4 |
5 | Gas1 Flow (sccm): | 35 |
6 | Gas2: | O2 |
7 | Gas2 Flow (sccm): | 3.5 |
8 | Gas3: | |
9 | Gas3 Flow (sccm): | |
10 | Pressure (mT): | 75 |
11 | Power (W): | 200 |
12 | Time (min): | 2 |
13 | Tencor Material Etch Rate (nm/min): | 42.58 |
14 | Nanospec Material Etch Rate (nm/min) | 45.07 |
15 | Tencor Material Etch Uniformity: | 9.16 |
16 | Nanospec Material Etch Uniformity: (+/- XX%) | 3.98 |
17 | Tencor 1813 PR Etch Rate (nm/min) | 97.58 |
18 | Nano 1813 PR Etch Rate (nm/min) | 79.68 |
19 | Thickness of material (nm) | |
20 | Site 1: | 104.85 |
21 | Site 2: | 103.95 |
22 | Site 3: | 98.53 |
23 | Site 4: | 98.65 |
24 | Site 5: | 92.9 |
25 | Average: | 99.776 |
26 | Tencor Step After PR Strip Sites (nm) | |
27 | Site 1: | 88.5 |
28 | Site 2: | 92.2 |
29 | Site 3: | 85.5 |
30 | Site 4: | 83 |
31 | Site 5: | 76.6 |
32 | Average: | 85.16 |
33 | Nanospec Depth After PR Strip Sites (nm) | |
34 | Site 1: | 14.94 |
35 | Site 2: | 10.48 |
36 | Site 3: | 12.23 |
37 | Site 4: | 10.57 |
38 | Site 5: | 0 |
39 | Average: | 9.644 |
40 | Nanospec Etched Thickness Sites (nm) | |
41 | Site 1: | 89.91 |
42 | Site 2: | 93.47 |
43 | Site 3: | 86.3 |
44 | Site 4: | 88.08 |
45 | Site 5: | 92.9 |
46 | Average: | 90.132 |
47 | PR Sites Before Etching | |
48 | Nanospec Total Thickness of Pr Before Etching (nm) | |
49 | Site 1: | 2429.3 |
50 | Site 2: | 2418.44 |
51 | Site 3: | 2426.92 |
52 | Site 4: | 2424.66 |
53 | Site 5: | 2414.44 |
54 | Average: | 2422.752 |
55 | Nanospec PR Thickness Not Including Material (nm) | |
56 | Site 1: | 2324.45 |
57 | Site 2: | 2314.49 |
58 | Site 3: | 2328.39 |
59 | Site 4: | 2326.01 |
60 | Site 5: | 2321.54 |
61 | Average: | 2,322.98 |
62 | Tencor PR Before Etching | |
63 | Site 1: | 2335 |
64 | Site 2: | 2339 |
65 | Site 3: | 2336 |
66 | Site 4: | 2341 |
67 | Site 5: | 2328 |
68 | Average: | 2335.8 |
69 | PR Step After Etching Sites | |
70 | Nanospec Total Thickness After Etching (nm) | |
71 | Site 1: | 2236.44 |
72 | Site 2: | 2217.54 |
73 | Site 3: | 2238.05 |
74 | Site 4: | 2225.06 |
75 | Site 5: | 2220.87 |
76 | Average: | 2227.592 |
77 | Nanospec PR Thickness After Etching not Including Material (nm) | |
78 | Site 1: | 2131.59 |
79 | Site 2: | 2113.59 |
80 | Site 3: | 2139.52 |
81 | Site 4: | 2126.41 |
82 | Site 5: | 2127.97 |
83 | Average: | 2127.816 |
84 | Tencor PR Step After Etching | |
85 | Site 1: | 2276 |
86 | Site 2: | 2260 |
87 | Site 3: | 2271 |
88 | Site 4: | 2255 |
89 | Site 5: | 2246 |
90 | Average: | 2261.6 |
91 | Tencor Etched PR Depth Sites (nm) | |
92 | Site 1: | 147.50 |
93 | Site 2: | 171.20 |
94 | Site 3: | 150.50 |
95 | Site 4: | 169.00 |
96 | Site 5: | 158.60 |
97 | Tencor Average Etched PR Depth (nm): | 159.36 |
98 | Nanospec Etched PR Depth Sites(nm) | |
99 | Site 1: | 192.86 |
100 | Site 2: | 200.90 |
101 | Site 3: | 188.87 |
102 | Site 4: | 199.60 |
103 | Site 5: | 193.57 |
104 | Average Nanospec PR Etch | 195.16 |
1 | Recipe: | sopCF4O2 | sopSF6O2 | sopSF6O2 | sopAr |
|---|---|---|---|---|---|
2 | Material: | Si | Si | Poly | Poly |
3 | Thickness (nm) | ||||
4 | Gas1: | CF4 | SF6 | SF6 | Ar |
5 | Gas1 Flow (sccm): | 35 | 26 | 26 | 20 |
6 | Gas2: | O2 | O2 | O2 | |
7 | Gas2 Flow (sccm): | 3.5 | 3.5 | 3.5 | |
8 | Gas3: | ||||
9 | Gas3 Flow (sccm): | ||||
10 | Pressure (mT): | 75 | 75 | 75 | 20 |
11 | Power (W): | 200 | 200 | 100 | 200 |
12 | Time (min): | 5 | 5 | 0.5 | 20 |
13 | Tencor Material Etch Rate (nm/min): | 57.98 | 1,505.04 | 597.96 | 1.90 |
14 | Nanospec Material Etch Rate (nm/min) | 0.00 | 0.00 | 559.42 | 1.06 |
15 | Tencor Material Etch Uniformity: | 0.52 | 0.78 | 2.93 | 5.28 |
16 | Nanospec Material Etch Uniformity: (+/- XX%) | 2.32 | 4.40 | ||
17 | Tencor 1813 PR Etch Rate (nm/min) | 99.5192 | 141.7992 | 235.012 | 62.51 |
18 | Nano 1813 PR Etch Rate (nm/min) | 93.02 | 131.87 | 41.16 | 45.67 |
19 | Thickness of material (nm) | ||||
20 | Site 1: | 485.91 | 486.15 | ||
21 | Site 2: | 493.48 | 506.30 | ||
22 | Site 3: | 496.87 | 498.84 | ||
23 | Site 4: | 497.23 | 489.08 | ||
24 | Site 5: | 513.49 | 511.07 | ||
25 | Average: | 497.396 | 498.29 | ||
26 | Tencor Step After PR Strip Sites (nm) | ||||
27 | Site 1: | 288.7 | 7555 | 310 | 36.50 |
28 | Site 2: | 291.7 | 7450 | 292.5 | 40.50 |
29 | Site 3: | 288.8 | 7567 | 297.5 | 37.50 |
30 | Site 4: | 289.4 | 7522 | 297.5 | 36.80 |
31 | Site 5: | 290.8 | 7532 | 297.4 | 38.20 |
32 | Average: | 289.88 | 7525.2 | 298.98 | 37.90 |
33 | Nanospec Depth After PR Strip Sites (nm) | ||||
34 | Site 1: | 0 | 0 | 201.66 | 465.13 |
35 | Site 2: | 0 | 0 | 216.39 | 486.15 |
36 | Site 3: | 0 | 0 | 218.05 | 477.31 |
37 | Site 4: | 0 | 0 | 224.53 | 468.16 |
38 | Site 5: | 0 | 0 | 227.8 | 489.06 |
39 | Average: | 0 | 0 | 217.686 | 477.16 |
40 | Nanospec Etched Thickness Sites (nm) | ||||
41 | Site 1: | 0 | 0 | 284.25 | 21.02 |
42 | Site 2: | 0 | 0 | 277.09 | 20.15 |
43 | Site 3: | 0 | 0 | 278.82 | 21.53 |
44 | Site 4: | 0 | 0 | 272.7 | 20.92 |
45 | Site 5: | 0 | 0 | 285.69 | 22.01 |
46 | Average: | 0 | 0 | 279.71 | 21.13 |
47 | PR Sites Before Etching | ||||
48 | Nanospec Total Thickness of Pr Before Etching (nm) | ||||
49 | Site 1: | 2328.62 | 1946.23 | 2899.64 | 2,882.89 |
50 | Site 2: | 2331.92 | 1951.49 | 2835 | 2,682.31 |
51 | Site 3: | 2345.97 | 1953.66 | 2939.29 | 2,909.64 |
52 | Site 4: | 2342.22 | 1948.5 | 2936.8 | 2,888.37 |
53 | Site 5: | 2340.61 | 1944.77 | 2721.01 | 2,963.97 |
54 | Average: | 2337.868 | 1948.93 | 2866.348 | |
55 | Nanospec PR Thickness Not Including Material (nm) | ||||
56 | Site 1: | 2328.62 | 1946.23 | 2313.73 | 2,296.74 |
57 | Site 2: | 2331.92 | 1951.49 | 2241.52 | 2,076.01 |
58 | Site 3: | 2345.97 | 1953.66 | 2342.42 | 2,310.80 |
59 | Site 4: | 2342.22 | 1948.5 | 2339.57 | 2,299.29 |
60 | Site 5: | 2340.61 | 1944.77 | 2107.52 | 2,352.90 |
61 | Average: | 2,337.87 | 1,948.93 | 2,268.95 | 2,267.15 |
62 | Tencor PR Before Etching | ||||
63 | Site 1: | 2310 | 1942.5 | 1868 | 2,010.00 |
64 | Site 2: | 2317 | 1923.9 | 1881 | 2,009.00 |
65 | Site 3: | 2325 | 1938.9 | 1904 | 2,001.00 |
66 | Site 4: | 2313 | 1956.6 | 1879 | 2,012.00 |
67 | Site 5: | 2317 | 1932.9 | 1880 | 2,003.00 |
68 | Average: | 2316.4 | 1938.96 | 1882.4 | 2,007.00 |
69 | PR Step After Etching Sites | ||||
70 | Nanospec Total Thickness After Etching (nm) | ||||
71 | Site 1: | 1829.02 | 1236.98 | 2659.95 | 1,510.40 |
72 | Site 2: | 1834.89 | 1238.66 | 2681.3 | 1,503.80 |
73 | Site 3: | 1868.92 | 1252.81 | 2689.02 | 1,521.30 |
74 | Site 4: | 1831.62 | 1243.99 | 2688.21 | 1,525.70 |
75 | Site 5: | 1836.91 | 1227.23 | 2525.73 | 1,515.40 |
76 | Average: | 1840.272 | 1239.934 | 2648.842 | 1,515.32 |
77 | Nanospec PR Thickness After Etching not Including Material (nm) | ||||
78 | Site 1: | 1829.02 | 1236.98 | 2074.04 | 924.25 |
79 | Site 2: | 1834.89 | 1238.66 | 2087.82 | 897.50 |
80 | Site 3: | 1868.92 | 1252.81 | 2092.15 | 922.46 |
81 | Site 4: | 1831.62 | 1243.99 | 2090.98 | 936.62 |
82 | Site 5: | 1836.91 | 1227.23 | 1912.24 | 904.33 |
83 | Average: | 1840.272 | 1239.934 | 2051.446 | 917.03 |
84 | Tencor PR Step After Etching | ||||
85 | Site 1: | 2144 | 8777.3 | 2176 | 1,068.00 |
86 | Site 2: | 2130 | 8701.2 | 2153 | 1,114.00 |
87 | Site 3: | 2163 | 8864.8 | 2155 | 1,102.00 |
88 | Site 4: | 2141 | 8834.5 | 2152 | 1,096.00 |
89 | Site 5: | 2128 | 8846.2 | 2168 | 1,088.00 |
90 | Average: | 2141.2 | 8804.8 | 2160.8 | 1,093.60 |
91 | Tencor Etched PR Depth Sites (nm) | ||||
92 | Site 1: | 454.70 | 720.20 | 2.00 | 942.00 |
93 | Site 2: | 478.70 | 672.70 | 20.50 | 895.00 |
94 | Site 3: | 450.80 | 641.10 | 46.50 | 899.00 |
95 | Site 4: | 461.40 | 644.10 | 24.50 | 916.00 |
96 | Site 5: | 479.80 | 618.70 | 9.40 | 915.00 |
97 | Tencor Average Etched PR Depth (nm): | 465.08 | 659.36 | 20.58 | 913.40 |
98 | Nanospec Etched PR Depth Sites(nm) | ||||
99 | Site 1: | 499.60 | 709.25 | 139.69 | 1,272.49 |
100 | Site 2: | 497.03 | 712.83 | 53.70 | 1,078.51 |
101 | Site 3: | 477.05 | 700.85 | 150.27 | 1,288.34 |
102 | Site 4: | 510.60 | 704.51 | 148.59 | 1,262.67 |
103 | Site 5: | 503.70 | 717.54 | 95.28 | 1,348.57 |
104 | Average Nanospec PR Etch | 497.60 | 709.00 | 117.51 | 1,250.12 |
1 | Recipe: | sopO2 | sopO2 |
|---|---|---|---|
2 | Material: | 1813 PR | 1813 PR |
3 | Thickness (nm) | ||
4 | Gas1: | O2 | O2 |
5 | Gas1 Flow (sccm): | 50 | 50 |
6 | Gas2: | ||
7 | Gas2 Flow (sccm): | ||
8 | Gas3: | ||
9 | Gas3 Flow (sccm): | ||
10 | Pressure (mT): | 20 | 20 |
11 | Power (W): | 200 | 200 |
12 | Time (min): | 1.5 | 5 |
13 | Tencor Material Etch Rate (nm/min): | 163.61 | 199.23 |
14 | Nanospec Material Etch Rate (nm/min) | 195.36 | 209.72 |
15 | Tencor Material Etch Uniformity: | 10.41 | 8.14 |
16 | Nanospec Material Etch Uniformity: (+/- XX%) | 2.49 | 1.48 |
17 | Tencor 1813 PR Etch Rate (nm/min) | 163.61 | 199.23 |
18 | Nano 1813 PR Etch Rate (nm/min) | 195.36 | 209.72 |
19 | Thickness of material (nm) | ||
20 | Site 1: | 1943.6 | 1949.83 |
21 | Site 2: | 1938.69 | 1946.46 |
22 | Site 3: | 1936.58 | 1947 |
23 | Site 4: | 1945 | 1950.54 |
24 | Site 5: | 1935.54 | 1942.5 |
25 | Average: | 1,939.88 | 1,947.27 |
26 | Tencor Step After PR Strip Sites (nm) | ||
27 | Site 1: | 241.7 | 946 |
28 | Site 2: | 217.8 | 1070.1 |
29 | Site 3: | 236.8 | 908 |
30 | Site 4: | 261.9 | 1039.2 |
31 | Site 5: | 268.9 | 1017.5 |
32 | Average: | 245.42 | 996.16 |
33 | Nanospec Depth After PR Strip Sites (nm) | ||
34 | Site 1: | 1645.89 | 898.44 |
35 | Site 2: | 1642.47 | 883.47 |
36 | Site 3: | 1653.45 | 914.97 |
37 | Site 4: | 1648.9 | 902.3 |
38 | Site 5: | 1643.52 | 894.04 |
39 | Average: | 1,646.85 | 898.64 |
40 | Nanospec Etched Thickness Sites (nm) | ||
41 | Site 1: | 297.71 | 1051.39 |
42 | Site 2: | 296.22 | 1062.99 |
43 | Site 3: | 283.13 | 1032.03 |
44 | Site 4: | 296.1 | 1048.24 |
45 | Site 5: | 292.02 | 1048.46 |
46 | Average: | 293.04 | 1,048.62 |
47 | PR Sites Before Etching | ||
48 | Nanospec Total Thickness of Pr Before Etching (nm) | ||
49 | Site 1: | 1943.6 | 1949.83 |
50 | Site 2: | 1938.69 | 1946.46 |
51 | Site 3: | 1936.58 | 1947 |
52 | Site 4: | 1945 | 1950.54 |
53 | Site 5: | 1935.54 | 1942.5 |
54 | Average: | 1939.882 | 1947.266 |
55 | Nanospec PR Thickness Not Including Material (nm) | ||
56 | Site 1: | 0.00 | 0.00 |
57 | Site 2: | 0.00 | 0.00 |
58 | Site 3: | 0.00 | 0.00 |
59 | Site 4: | 0.00 | 0.00 |
60 | Site 5: | 0.00 | 0.00 |
61 | Average: | 0 | 0 |
62 | Tencor PR Before Etching | ||
63 | Site 1: | 1931.7 | 1949 |
64 | Site 2: | 1912.8 | 1992 |
65 | Site 3: | 1926.8 | 1928 |
66 | Site 4: | 1938.9 | 1949 |
67 | Site 5: | 1949.9 | 1949 |
68 | Average: | 1932.02 | 1953.4 |
69 | PR Step After Etching Sites | ||
70 | Nanospec Total Thickness After Etching (nm) | ||
71 | Site 1: | 1645.89 | 898.44 |
72 | Site 2: | 1642.47 | 883.47 |
73 | Site 3: | 1653.45 | 914.97 |
74 | Site 4: | 1648.9 | 902.3 |
75 | Site 5: | 1643.52 | 894.04 |
76 | Average: | 1,646.85 | 898.64 |
77 | Nanospec PR Thickness After Etching not Including Material (nm) | ||
78 | Site 1: | 297.71 | 1,051.39 |
79 | Site 2: | 296.22 | 1,062.99 |
80 | Site 3: | 283.13 | 1,032.03 |
81 | Site 4: | 296.10 | 1,048.24 |
82 | Site 5: | 292.02 | 1,048.46 |
83 | Average: | 293.036 | 1048.622 |
84 | Tencor PR Step After Etching | ||
85 | Site 1: | 1690 | 1003 |
86 | Site 2: | 1695 | 921.9 |
87 | Site 3: | 1690 | 1020 |
88 | Site 4: | 1677 | 909.8 |
89 | Site 5: | 1681 | 931.5 |
90 | Average: | 1686.6 | 957.24 |
91 | Tencor Etched PR Depth Sites (nm) | ||
92 | Site 1: | 241.70 | 946.00 |
93 | Site 2: | 217.80 | 1,070.10 |
94 | Site 3: | 236.80 | 908.00 |
95 | Site 4: | 261.90 | 1,039.20 |
96 | Site 5: | 268.90 | 1,017.50 |
97 | Tencor Average Etched PR Depth (nm): | 245.42 | 996.16 |
98 | Nanospec Etched PR Depth Sites(nm) | ||
99 | Site 1: | 297.71 | 1,051.39 |
100 | Site 2: | 296.22 | 1,062.99 |
101 | Site 3: | 283.13 | 1,032.03 |
102 | Site 4: | 296.10 | 1,048.24 |
103 | Site 5: | 292.02 | 1,048.46 |
104 | Average Nanospec PR Etch | 293.04 | 1,048.62 |
1 | Recipe: | sopO2 | sopO2 |
|---|---|---|---|
2 | Material: | Parylene | Parylene |
3 | Thickness (nm) | ||
4 | Gas1: | O2 | O2 |
5 | Gas1 Flow (sccm): | 50 | 50 |
6 | Gas2: | ||
7 | Gas2 Flow (sccm): | ||
8 | Gas3: | ||
9 | Gas3 Flow (sccm): | ||
10 | Pressure (mT): | 20 | 20 |
11 | Power (W): | 200 | 200 |
12 | Time (min): | 2 | 2 |
13 | Tencor Material Etch Rate (nm/min): | 223.29 | 205.71 |
14 | Nanospec Material Etch Rate (nm/min) | ||
15 | Tencor Material Etch Uniformity: | 1.22 | 2.25 |
16 | Nanospec Material Etch Uniformity: (+/- XX%) | ||
17 | Tencor 1813 PR Etch Rate (nm/min) | 191.29 | 203.01 |
18 | Nano 1813 PR Etch Rate (nm/min) | 210.73 | 203.82 |
19 | Thickness of material (nm) | ||
20 | Site 1: | 626 | 626 |
21 | Site 2: | 626 | 626 |
22 | Site 3: | 626 | 626 |
23 | Site 4: | 626 | 626 |
24 | Site 5: | 626 | 626 |
25 | Average: | 626.00 | 626.00 |
26 | Tencor Step After PR Strip Sites (nm) | ||
27 | Site 1: | 452.7 | 418.7 |
28 | Site 2: | 445.2 | 413.9 |
29 | Site 3: | 441.8 | 415.4 |
30 | Site 4: | 442.5 | 408.9 |
31 | Site 5: | 450.7 | 400.2 |
32 | Average: | 446.58 | 411.42 |
33 | Nanospec Depth After PR Strip Sites (nm) | ||
34 | Site 1: | ||
35 | Site 2: | ||
36 | Site 3: | ||
37 | Site 4: | ||
38 | Site 5: | ||
39 | Average: | ||
40 | Nanospec Etched Thickness Sites (nm) | ||
41 | Site 1: | ||
42 | Site 2: | ||
43 | Site 3: | ||
44 | Site 4: | ||
45 | Site 5: | ||
46 | Average: | ||
47 | PR Sites Before Etching | ||
48 | Nanospec Total Thickness of Pr Before Etching (nm) | ||
49 | Site 1: | 2483.42 | 2456.16 |
50 | Site 2: | 2485.45 | 2483.69 |
51 | Site 3: | 2489.32 | 2433.61 |
52 | Site 4: | 2493.25 | 2452.75 |
53 | Site 5: | 2490.43 | 2442.8 |
54 | Average: | 2488.374 | 2453.802 |
55 | Nanospec PR Thickness Not Including Material (nm) | ||
56 | Site 1: | 1,857.42 | 1,830.16 |
57 | Site 2: | 1,859.45 | 1,857.69 |
58 | Site 3: | 1,863.32 | 1,807.61 |
59 | Site 4: | 1,867.25 | 1,826.75 |
60 | Site 5: | 1,864.43 | 1,816.80 |
61 | Average: | 1862.374 | 1827.802 |
62 | Tencor PR Before Etching | ||
63 | Site 1: | 1897 | 1863 |
64 | Site 2: | 1915 | 1880 |
65 | Site 3: | 1905 | 1875 |
66 | Site 4: | 1911 | 1866 |
67 | Site 5: | 1912 | 1896 |
68 | Average: | 1908 | 1876 |
69 | PR Step After Etching Sites | ||
70 | Nanospec Total Thickness After Etching (nm) | ||
71 | Site 1: | 2067.16 | 2047.05 |
72 | Site 2: | 2062.7 | 2048.28 |
73 | Site 3: | 2071.45 | 2053.38 |
74 | Site 4: | 2062.65 | 2047.18 |
75 | Site 5: | 2070.57 | 2034.93 |
76 | Average: | 2,066.91 | 2,046.16 |
77 | Nanospec PR Thickness After Etching not Including Material (nm) | ||
78 | Site 1: | 1441.16 | 1421.05 |
79 | Site 2: | 1436.7 | 1422.28 |
80 | Site 3: | 1445.45 | 1427.38 |
81 | Site 4: | 1436.65 | 1421.18 |
82 | Site 5: | 1444.57 | 1408.93 |
83 | Average: | 1440.906 | 1420.164 |
84 | Tencor PR Step After Etching | ||
85 | Site 1: | 1,985.00 | 1912 |
86 | Site 2: | 1,952.00 | 1848 |
87 | Site 3: | 1,986.00 | 1866 |
88 | Site 4: | 1,976.00 | 1918 |
89 | Site 5: | 1,961.00 | 1863 |
90 | Average: | 1972 | 1881.4 |
91 | Tencor Etched PR Depth Sites (nm) | ||
92 | Site 1: | 364.70 | 369.70 |
93 | Site 2: | 408.20 | 445.90 |
94 | Site 3: | 360.80 | 424.40 |
95 | Site 4: | 377.50 | 356.90 |
96 | Site 5: | 401.70 | 433.20 |
97 | Tencor Average Etched PR Depth (nm): | 382.58 | 406.02 |
98 | Nanospec Etched PR Depth Sites(nm) | ||
99 | Site 1: | 416.26 | 409.11 |
100 | Site 2: | 422.75 | 435.41 |
101 | Site 3: | 417.87 | 380.23 |
102 | Site 4: | 430.60 | 405.57 |
103 | Site 5: | 419.86 | 407.87 |
104 | Average Nanospec PR Etch | 421.47 | 407.64 |
105 | |||
106 | Nanospec Etched PR Depth Sites(nm) | ||
107 | Site 1: | ||
108 | Site 2: | ||
109 | Site 3: | ||
110 | Site 4: | ||
111 | Site 5: | ||
112 | Average Nanospec PR Etch |
1 | Recipe: | sopAl | sopAl (2nd process) |
|---|---|---|---|
2 | Material: | Al2O3 | Al |
3 | Thickness (nm) | ||
4 | Gas1: | Cl2 | Cl2 |
5 | Gas1 Flow (sccm): | 10 | 25 |
6 | Gas2: | Ar | O2 |
7 | Gas2 Flow (sccm): | 10 | 1.3 |
8 | Gas3: | ||
9 | Gas3 Flow (sccm): | ||
10 | Pressure (mT): | 50 | 50 |
11 | Power (W): | 200 | |
12 | Time (min): | 0.75 | |
13 | Tencor Material Etch Rate (nm/min): | 27.76 | |
14 | Nanospec Material Etch Rate (nm/min) | ||
15 | Tencor Material Etch Uniformity: | 13.21 | |
16 | Nanospec Material Etch Uniformity: (+/- XX%) | ||
17 | Tencor 1813 PR Etch Rate (nm/min) | ||
18 | Nano 1813 PR Etch Rate (nm/min) | ||
19 | Thickness of material (nm) | ||
20 | Site 1: | ||
21 | Site 2: | ||
22 | Site 3: | ||
23 | Site 4: | ||
24 | Site 5: | ||
25 | Average: | ||
26 | Tencor Step After PR Strip Sites (nm) | ||
27 | Site 1: | 23.7 | |
28 | Site 2: | 23.6 | |
29 | Site 3: | 20.1 | |
30 | Site 4: | 18.2 | |
31 | Site 5: | 18.5 | |
32 | Average: | 20.82 | |
33 | Nanospec Depth After PR Strip Sites (nm) | ||
34 | Site 1: | ||
35 | Site 2: | ||
36 | Site 3: | ||
37 | Site 4: | ||
38 | Site 5: | ||
39 | Average: | ||
40 | Nanospec Etched Thickness Sites (nm) | ||
41 | Site 1: | ||
42 | Site 2: | ||
43 | Site 3: | ||
44 | Site 4: | ||
45 | Site 5: | ||
46 | Average: | ||
47 | PR Sites Before Etching | ||
48 | Nanospec Total Thickness of Pr Before Etching (nm) | ||
49 | Site 1: | ||
50 | Site 2: | ||
51 | Site 3: | ||
52 | Site 4: | ||
53 | Site 5: | ||
54 | Average: | ||
55 | Nanospec PR Thickness Not Including Material (nm) | ||
56 | Site 1: | ||
57 | Site 2: | ||
58 | Site 3: | ||
59 | Site 4: | ||
60 | Site 5: | ||
61 | Average: | #DIV/0! | #DIV/0! |
62 | Tencor PR Before Etching | ||
63 | Site 1: | ||
64 | Site 2: | ||
65 | Site 3: | ||
66 | Site 4: | ||
67 | Site 5: | ||
68 | Average: | #DIV/0! | #DIV/0! |
69 | PR Step After Etching Sites | ||
70 | Nanospec Total Thickness After Etching (nm) | ||
71 | Site 1: | ||
72 | Site 2: | ||
73 | Site 3: | ||
74 | Site 4: | ||
75 | Site 5: | ||
76 | Average: | ||
77 | Nanospec PR Thickness After Etching not Including Material (nm) | ||
78 | Site 1: | ||
79 | Site 2: | ||
80 | Site 3: | ||
81 | Site 4: | ||
82 | Site 5: | ||
83 | Average: | #DIV/0! | #DIV/0! |
84 | Tencor PR Step After Etching | ||
85 | Site 1: | ||
86 | Site 2: | ||
87 | Site 3: | ||
88 | Site 4: | ||
89 | Site 5: | ||
90 | Average: | #DIV/0! | #DIV/0! |
91 | Tencor Etched PR Depth Sites (nm) | ||
92 | Site 1: | 0.00 | 0.00 |
93 | Site 2: | 0.00 | 0.00 |
94 | Site 3: | 0.00 | 0.00 |
95 | Site 4: | 0.00 | 0.00 |
96 | Site 5: | 0.00 | 0.00 |
97 | Tencor Average Etched PR Depth (nm): | 0.00 | 0.00 |
98 | Nanospec Etched PR Depth Sites(nm) | ||
99 | Site 1: | ||
100 | Site 2: | ||
101 | Site 3: | ||
102 | Site 4: | ||
103 | Site 5: | ||
104 | Average Nanospec PR Etch | ||
105 | |||
106 | |||
107 | |||
108 | |||
109 | |||
110 | |||
111 | |||
112 | |||
113 | |||
114 | |||
115 | |||
116 |
1 | Material: | Au | Au | Pt | 1813 PR | SiN | Poly | Cr |
|---|---|---|---|---|---|---|---|---|
2 | Thickness (nm) | |||||||
3 | Gas1: | Ar | Ar | Ar | Ar | Ar | Ar | Ar |
4 | Gas1 Flow (sccm): | 20 | 20 | 20 | 20 | 20 | 20 | 20 |
5 | Gas2: | |||||||
6 | Gas2 Flow (sccm): | |||||||
7 | Gas3: | |||||||
8 | Gas3 Flow (sccm): | |||||||
9 | Pressure (mT): | 20 | 20 | 20 | 20 | 20 | 20 | 20 |
10 | Power (W): | 200 | 200 | 200 | 200 | 200 | 200 | 200 |
11 | Time (min): | 10 | 20 | 10 | 20 | 20 | 20 | |
12 | Tencor Material Etch Rate (nm/min): | 8.44 | 8.41 | 4.67 | 50.40 | 1.66 | 1.90 | |
13 | Nanospec Material Etch Rate (nm/min) | 34.63 | 1.59 | 1.06 | ||||
14 | Tencor Material Etch Uniformity: | 1.95 | 1.64 | 6.21 | #DIV/0! | 5.28 | 5.28 | |
15 | Nanospec Material Etch Uniformity: (+/- XX%) | #DIV/0! | 2.66 | 4.40 | ||||
16 | Relative Etch Rate (Si = 1.0) | 4.45 | 4.44 | 2.46 | 26.60 | 0.87 | 1.00 | 0.00 |
17 | Tencor 1813 PR Etch Rate (nm/min) | 69.25 | 47.86 | 62.51 | ||||
18 | Nano 1813 PR Etch Rate (nm/min) | 44.40 | 53.44 | 53.37 | 47.67 | 45.67 | ||
19 | Thickness of material (nm) | |||||||
20 | Site 1: | 362.88 | 486.15 | |||||
21 | Site 2: | 343.23 | 506.30 | |||||
22 | Site 3: | 343.62 | 498.84 | |||||
23 | Site 4: | 357.12 | 489.08 | |||||
24 | Site 5: | 337.73 | 511.07 | |||||
25 | Average: | 348.92 | 498.29 | |||||
26 | Tencor Step After PR Strip Sites (nm) | |||||||
27 | Site 1: | 85.4 | 166.4 | 49.7 | 31.90 | 36.50 | ||
28 | Site 2: | 84.8 | 171.1 | 48.6 | 33.00 | 40.50 | ||
29 | Site 3: | 83.3 | 170.9 | 45.6 | 32.60 | 37.50 | ||
30 | Site 4: | 85.9 | 166.6 | 45.7 | 32.80 | 36.80 | ||
31 | Site 5: | 82.6 | 165.6 | 43.9 | 35.40 | 38.20 | ||
32 | Average: | 84.4 | 168.12 | 46.7 | 33.14 | 37.90 | ||
33 | Nanospec Depth After PR Strip Sites (nm) | |||||||
34 | Site 1: | 331.48 | 465.13 | |||||
35 | Site 2: | 311.14 | 486.15 | |||||
36 | Site 3: | 312.39 | 477.31 | |||||
37 | Site 4: | 325.80 | 468.16 | |||||
38 | Site 5: | 304.81 | 489.06 | |||||
39 | Average: | 317.12 | 477.16 | |||||
40 | Nanospec Etched Thickness Sites (nm) | |||||||
41 | Site 1: | 0 | 0 | 0 | 31.40 | 21.02 | ||
42 | Site 2: | 0 | 0 | 0 | 32.09 | 20.15 | ||
43 | Site 3: | 0 | 0 | 0 | 31.23 | 21.53 | ||
44 | Site 4: | 0 | 0 | 0 | 31.32 | 20.92 | ||
45 | Site 5: | 0 | 0 | 0 | 32.92 | 22.01 | ||
46 | Average: | 0 | 0 | 0 | 31.79 | 21.13 | ||
47 | PR Sites Before Etching | |||||||
48 | Nanospec Total Thickness of Pr Before Etching (nm) | |||||||
49 | Site 1: | 2,491.57 | 2,882.89 | |||||
50 | Site 2: | 2,468.55 | 2,682.31 | |||||
51 | Site 3: | 2,473.11 | 2,909.64 | |||||
52 | Site 4: | 2,497.73 | 2,888.37 | |||||
53 | Site 5: | 2,475.07 | 2,963.97 | |||||
54 | Average: | |||||||
55 | Nanospec PR Thickness Not Including Material (nm) | |||||||
56 | Site 1: | 2155 | 2164 | 1994 | 2,128.69 | 2,296.74 | ||
57 | Site 2: | 2156 | 2160 | 1998 | 2,125.32 | 2,076.01 | ||
58 | Site 3: | 2156 | 2165 | 1992 | 2,129.49 | 2,310.80 | ||
59 | Site 4: | 2155 | 2159 | 1992 | 2,140.61 | 2,299.29 | ||
60 | Site 5: | 2163 | 2160 | 1996 | 2,137.34 | 2,352.90 | ||
61 | Average: | 2157 | 2161.6 | 1994.4 | 2,132.29 | 2,267.15 | ||
62 | Tencor PR Before Etching | |||||||
63 | Site 1: | 1946 | 1959 | 1987 | 2,023.00 | 2,010.00 | ||
64 | Site 2: | 1951 | 1935 | 1984 | 2,022.00 | 2,009.00 | ||
65 | Site 3: | 1948 | 1977 | 1977 | 2,029.00 | 2,001.00 | ||
66 | Site 4: | 1948 | 1948 | 1973 | 2,090.00 | 2,012.00 | ||
67 | Site 5: | 1957 | 1945 | 1979 | 2,036.00 | 2,003.00 | ||
68 | Average: | 1950 | 1952.8 | 1980 | 2,040.00 | 2,007.00 | ||
69 | PR Step After Etching Sites | |||||||
70 | Nanospec Total Thickness After Etching (nm) | |||||||
71 | Site 1: | 1,526.40 | 1,510.40 | |||||
72 | Site 2: | 1,520.83 | 1,503.80 | |||||
73 | Site 3: | 1,549.07 | 1,521.30 | |||||
74 | Site 4: | 1,504.14 | 1,525.70 | |||||
75 | Site 5: | 1,519.77 | 1,515.40 | |||||
76 | Average: | #DIV/0! | #DIV/0! | #DIV/0! | 1,524.04 | 1,515.32 | ||
77 | Nanospec PR Thickness After Etching not Including Material (nm) | |||||||
78 | Site 1: | 675 | 1,163.52 | 924.25 | ||||
79 | Site 2: | 909 | 1,177.60 | 897.50 | ||||
80 | Site 3: | 934 | 1,205.45 | 922.46 | ||||
81 | Site 4: | 682 | 1,147.02 | 936.62 | ||||
82 | Site 5: | 683 | 1,182.04 | 904.33 | ||||
83 | Average: | #DIV/0! | 776.6 | #DIV/0! | 1,175.13 | 917.03 | ||
84 | Tencor PR Step After Etching | |||||||
85 | Site 1: | 1545 | 1064 | 1568 | 1,078.00 | 1,068.00 | ||
86 | Site 2: | 1550 | 1099 | 1460 | 1,086.00 | 1,114.00 | ||
87 | Site 3: | 1722 | 1075 | 1457 | 1,120.00 | 1,102.00 | ||
88 | Site 4: | 1553 | 966 | 1494 | 1,109.00 | 1,096.00 | ||
89 | Site 5: | 1582 | 1057 | 1486 | 1,040.00 | 1,088.00 | ||
90 | Average: | 1590.4 | 1052.2 | 1493 | 1,086.60 | 1,093.60 | ||
91 | Tencor Etched PR Depth Sites (nm) | |||||||
92 | Site 1: | 486.40 | 1,061.40 | 468.70 | 19.94 | 945.00 | 942.00 | |
93 | Site 2: | 485.80 | 1,007.10 | 572.60 | 6.62 | 936.00 | 895.00 | |
94 | Site 3: | 309.30 | 1,072.90 | 565.60 | 9.73 | 909.00 | 899.00 | |
95 | Site 4: | 480.90 | 1,148.60 | 524.70 | #DIV/0! | 981.00 | 916.00 | |
96 | Site 5: | 457.60 | 1,053.60 | 536.90 | 996.00 | 915.00 | ||
97 | Tencor Average Etched PR Depth (nm): | 444.00 | 1,068.72 | 533.70 | 953.40 | 913.40 | ||
98 | Nanospec Etched PR Depth Sites(nm) | |||||||
99 | Site 1: | 1,489.00 | 9.31 | 965.17 | 1,272.49 | |||
100 | Site 2: | 1,251.00 | #DIV/0! | 947.72 | 1,078.51 | |||
101 | Site 3: | 1,231.00 | 924.04 | 1,288.34 | ||||
102 | Site 4: | 1,477.00 | 993.59 | 1,262.67 | ||||
103 | Site 5: | 1,477.00 | 955.30 | 1,348.57 | ||||
104 | Average Nanospec PR Etch | 1,385.00 | 957.16 | 1,250.12 |
1 | Material: | Ti | SiN | SiO2 | Si | 1813 PR |
|---|---|---|---|---|---|---|
2 | Thickness (nm) | |||||
3 | Gas1: | CF4 | CF4 | CF4 | CF4 | CF4 |
4 | Gas1 Flow (sccm): | 35 | 35 | 35 | 35 | 35 |
5 | Gas2: | O2 | O2 | O2 | O2 | O2 |
6 | Gas2 Flow (sccm): | 3.5 | 3.5 | 3.5 | 3.5 | 3.5 |
7 | Gas3: | |||||
8 | Gas3 Flow (sccm): | |||||
9 | Pressure (mT): | 75 | 75 | 75 | 75 | 75 |
10 | Power (W): | 200 | 200 | 200 | 200 | 200 |
11 | Time (min): | 2 | 1.5 | 2 | 5 | |
12 | Tencor Material Etch Rate (nm/min): | 22.17 | 91.21 | 42.58 | 57.98 | 83.93 |
13 | Nanospec Material Etch Rate (nm/min) | 99.47 | 45.07 | 0.00 | 97.82 | |
14 | Tencor Material Etch Uniformity: | 6.77 | 8.48 | 9.16 | 0.52 | #DIV/0! |
15 | Nanospec Material Etch Uniformity: (+/- XX%) | 1.50 | 3.98 | #DIV/0! | ||
16 | Relative Etch Rate (Si = 1.0) | 0.38 | 1.57 | 0.73 | 1.00 | 1.45 |
17 | Tencor 1813 PR Etch Rate (nm/min) | 96.36 | 97.58 | 99.5192 | ||
18 | Nano 1813 PR Etch Rate (nm/min) | 12.67 | 79.08 | 79.68 | 93.02 | |
19 | Thickness of material (nm) | |||||
20 | Site 1: | 242.98 | 104.85 | |||
21 | Site 2: | 235.22 | 103.95 | |||
22 | Site 3: | 228.31 | 98.53 | |||
23 | Site 4: | 230.82 | 98.65 | |||
24 | Site 5: | 220.95 | 92.9 | |||
25 | Average: | 231.656 | 99.776 | |||
26 | Tencor Step After PR Strip Sites (nm) | |||||
27 | Site 1: | 43.8 | 134.4 | 88.5 | 288.7 | |
28 | Site 2: | 46.6 | 150.4 | 92.2 | 291.7 | |
29 | Site 3: | 46.1 | 140.4 | 85.5 | 288.8 | |
30 | Site 4: | 40.6 | 131.7 | 83 | 289.4 | |
31 | Site 5: | 44.6 | 127.2 | 76.6 | 290.8 | |
32 | Average: | 44.34 | 136.82 | 85.16 | 289.88 | |
33 | Nanospec Depth After PR Strip Sites (nm) | |||||
34 | Site 1: | 91.51 | 14.94 | 0 | ||
35 | Site 2: | 84.05 | 10.48 | 0 | ||
36 | Site 3: | 81.32 | 12.23 | 0 | ||
37 | Site 4: | 82.63 | 10.57 | 0 | ||
38 | Site 5: | 72.76 | 0 | 0 | ||
39 | Average: | 82.454 | 9.644 | 0 | ||
40 | Nanospec Etched Thickness Sites (nm) | |||||
41 | Site 1: | 0 | 151.47 | 89.91 | 0 | |
42 | Site 2: | 0 | 151.17 | 93.47 | 0 | |
43 | Site 3: | 0 | 146.99 | 86.3 | 0 | |
44 | Site 4: | 0 | 148.19 | 88.08 | 0 | |
45 | Site 5: | 0 | 148.19 | 92.9 | 0 | |
46 | Average: | 0 | 149.202 | 90.132 | 0 | |
47 | PR Sites Before Etching | |||||
48 | Nanospec Total Thickness of Pr Before Etching (nm) | |||||
49 | Site 1: | 2436.52 | 2429.3 | 2328.62 | ||
50 | Site 2: | 2423.64 | 2418.44 | 2331.92 | ||
51 | Site 3: | 2419.35 | 2426.92 | 2345.97 | ||
52 | Site 4: | 2424.82 | 2424.66 | 2342.22 | ||
53 | Site 5: | 2404.56 | 2414.44 | 2340.61 | ||
54 | Average: | 2421.778 | 2422.752 | 2337.868 | ||
55 | Nanospec PR Thickness Not Including Material (nm) | |||||
56 | Site 1: | 1993 | 2193.54 | 2324.45 | 2328.62 | |
57 | Site 2: | 2000 | 2188.42 | 2314.49 | 2331.92 | |
58 | Site 3: | 1988 | 2191.04 | 2328.39 | 2345.97 | |
59 | Site 4: | 1996 | 2194 | 2326.01 | 2342.22 | |
60 | Site 5: | 2004 | 2183.61 | 2321.54 | 2340.61 | |
61 | Average: | 1996.2 | 2,190.12 | 2,322.98 | 2,337.87 | |
62 | Tencor PR Before Etching | |||||
63 | Site 1: | 1925 | 2129 | 2335 | 2310 | |
64 | Site 2: | 1943 | 2134 | 2339 | 2317 | |
65 | Site 3: | 1907 | 2132 | 2336 | 2325 | |
66 | Site 4: | 1932 | 2130 | 2341 | 2313 | |
67 | Site 5: | 1946 | 2123 | 2328 | 2317 | |
68 | Average: | 1930.6 | 2129.6 | 2335.8 | 2316.4 | |
69 | PR Step After Etching Sites | |||||
70 | Nanospec Total Thickness After Etching (nm) | |||||
71 | Site 1: | 2291.88 | 2236.44 | 1829.02 | ||
72 | Site 2: | 2276.61 | 2217.54 | 1834.89 | ||
73 | Site 3: | 2284.17 | 2238.05 | 1868.92 | ||
74 | Site 4: | 2271.86 | 2225.06 | 1831.62 | ||
75 | Site 5: | 2261.67 | 2220.87 | 1836.91 | ||
76 | Average: | #DIV/0! | 2277.238 | 2227.592 | 1840.272 | |
77 | Nanospec PR Thickness After Etching not Including Material (nm) | |||||
78 | Site 1: | 2048.9 | 2131.59 | 1829.02 | ||
79 | Site 2: | 2041.39 | 2113.59 | 1834.89 | ||
80 | Site 3: | 2055.86 | 2139.52 | 1868.92 | ||
81 | Site 4: | 2041.04 | 2126.41 | 1831.62 | ||
82 | Site 5: | 2040.72 | 2127.97 | 1836.91 | ||
83 | Average: | #DIV/0! | 2045.582 | 2127.816 | 1840.272 | |
84 | Tencor PR Step After Etching | |||||
85 | Site 1: | 1961 | 2169 | 2276 | 2144 | |
86 | Site 2: | 1966 | 2181 | 2260 | 2130 | |
87 | Site 3: | 1877 | 2144 | 2271 | 2163 | |
88 | Site 4: | 1957 | 2119 | 2255 | 2141 | |
89 | Site 5: | 1987 | 2126 | 2246 | 2128 | |
90 | Average: | 1949.6 | 2147.8 | 2261.6 | 2141.2 | |
91 | Tencor Etched PR Depth Sites (nm) | |||||
92 | Site 1: | 7.80 | 94.40 | 147.50 | 454.70 | #DIV/0! |
93 | Site 2: | 23.60 | 103.40 | 171.20 | 478.70 | 20.36 |
94 | Site 3: | 76.10 | 128.40 | 150.50 | 450.80 | 7.44 |
95 | Site 4: | 15.60 | 142.70 | 169.00 | 461.40 | 3.12 |
96 | Site 5: | 3.60 | 124.20 | 158.60 | 479.80 | |
97 | Tencor Average Etched PR Depth (nm): | 25.34 | 118.62 | 159.36 | 465.08 | |
98 | Nanospec Etched PR Depth Sites(nm) | |||||
99 | Site 1: | 144.64 | 192.86 | 499.60 | #DIV/0! | |
100 | Site 2: | 147.03 | 200.90 | 497.03 | 0.06 | |
101 | Site 3: | 135.18 | 188.87 | 477.05 | 0.03 | |
102 | Site 4: | 152.96 | 199.60 | 510.60 | 3.37 | |
103 | Site 5: | 142.89 | 193.57 | 503.70 | ||
104 | Average Nanospec PR Etch | 144.54 | 195.16 | 497.60 |
1 | Material: | SiN | SiN | Si | Poly | 1813 PR |
|---|---|---|---|---|---|---|
2 | Thickness (nm) | |||||
3 | Gas1: | SF6 | SF6 | SF6 | SF6 | SF6 |
4 | Gas1 Flow (sccm): | 26 | 26 | 26 | 26 | 26 |
5 | Gas2: | O2 | O2 | O2 | O2 | O2 |
6 | Gas2 Flow (sccm): | 3.5 | 3.5 | 3.5 | 3.5 | 3.5 |
7 | Gas3: | |||||
8 | Gas3 Flow (sccm): | |||||
9 | Pressure (mT): | 75 | 75 | 75 | 75 | 75 |
10 | Power (W): | 200 | 200 | 200 | 100 | 100 |
11 | Time (min): | 2 | 1.75 | 5 | 0.5 | |
12 | Tencor Material Etch Rate (nm/min): | 293.27 | 117.81 | 1,505.04 | 597.96 | 134.16 |
13 | Nanospec Material Etch Rate (nm/min) | 115.83 | 130.38 | 0.00 | 559.42 | 133.44 |
14 | Tencor Material Etch Uniformity: | 21.80 | 2.40 | 0.78 | 2.93 | |
15 | Nanospec Material Etch Uniformity: (+/- XX%) | 4.75 | 4.08 | 2.32 | ||
16 | Relative Etch Rate (Si = 1.0) | 0.19 | 0.08 | 1.00 | 0.40 | 0.09 |
17 | Tencor 1813 PR Etch Rate (nm/min) | 189.394 | 125.0834286 | 141.7992 | 235.012 | |
18 | Nano 1813 PR Etch Rate (nm/min) | 146.29 | 124.32 | 131.87 | 41.16 | |
19 | Thickness of material (nm) | |||||
20 | Site 1: | 242.98 | 372.5 | 485.91 | ||
21 | Site 2: | 235.22 | 360.1 | 493.48 | ||
22 | Site 3: | 228.31 | 345.23 | 496.87 | ||
23 | Site 4: | 230.82 | 352.68 | 497.23 | ||
24 | Site 5: | 220.95 | 335.01 | 513.49 | ||
25 | Average: | 231.656 | 353.104 | 497.396 | ||
26 | Tencor Step After PR Strip Sites (nm) | |||||
27 | Site 1: | 511 | 209.9 | 7555 | 310 | |
28 | Site 2: | 645.4 | 207.1 | 7450 | 292.5 | |
29 | Site 3: | 505.3 | 200.1 | 7567 | 297.5 | |
30 | Site 4: | 510 | 203.7 | 7522 | 297.5 | |
31 | Site 5: | 761 | 210 | 7532 | 297.4 | |
32 | Average: | 586.54 | 206.16 | 7525.2 | 298.98 | |
33 | Nanospec Depth After PR Strip Sites (nm) | |||||
34 | Site 1: | 0 | 140.32 | 0 | 201.66 | |
35 | Site 2: | 0 | 133.09 | 0 | 216.39 | |
36 | Site 3: | 0 | 126.87 | 0 | 218.05 | |
37 | Site 4: | 0 | 126.4 | 0 | 224.53 | |
38 | Site 5: | 0 | 98.02 | 0 | 227.8 | |
39 | Average: | 0 | 124.94 | 0 | 217.686 | |
40 | Nanospec Etched Thickness Sites (nm) | |||||
41 | Site 1: | 242.98 | 232.18 | 0 | 284.25 | |
42 | Site 2: | 235.22 | 227.01 | 0 | 277.09 | |
43 | Site 3: | 228.31 | 218.36 | 0 | 278.82 | |
44 | Site 4: | 230.82 | 226.28 | 0 | 272.7 | |
45 | Site 5: | 220.95 | 236.99 | 0 | 285.69 | |
46 | Average: | 231.656 | 228.164 | 0 | 279.71 | |
47 | PR Sites Before Etching | |||||
48 | Nanospec Total Thickness of Pr Before Etching (nm) | |||||
49 | Site 1: | 2228.39 | 2401.27 | 1946.23 | 2899.64 | |
50 | Site 2: | 2408.37 | 2385.74 | 1951.49 | 2835 | |
51 | Site 3: | 2404.02 | 2368.78 | 1953.66 | 2939.29 | |
52 | Site 4: | 2231.58 | 2366.49 | 1948.5 | 2936.8 | |
53 | Site 5: | 2401.4 | 2355.05 | 1944.77 | 2721.01 | |
54 | Average: | 2334.752 | 2375.466 | 1948.93 | 2866.348 | |
55 | Nanospec PR Thickness Not Including Material (nm) | |||||
56 | Site 1: | 1985.41 | 2028.77 | 1946.23 | 2313.73 | |
57 | Site 2: | 2173.15 | 2025.64 | 1951.49 | 2241.52 | |
58 | Site 3: | 2175.71 | 2023.55 | 1953.66 | 2342.42 | |
59 | Site 4: | 2000.76 | 2013.81 | 1948.5 | 2339.57 | |
60 | Site 5: | 2180.45 | 2020.04 | 1944.77 | 2107.52 | |
61 | Average: | 2,103.10 | 2,022.36 | 1,948.93 | 2,268.95 | |
62 | Tencor PR Before Etching | |||||
63 | Site 1: | 1921.8 | 1935 | 1942.5 | 1868 | |
64 | Site 2: | 1934.7 | 1916 | 1923.9 | 1881 | |
65 | Site 3: | 1951.4 | 1926 | 1938.9 | 1904 | |
66 | Site 4: | 1940.3 | 1918 | 1956.6 | 1879 | |
67 | Site 5: | 1949 | 1935 | 1932.9 | 1880 | |
68 | Average: | 1939.44 | 1926 | 1938.96 | 1882.4 | |
69 | PR Step After Etching Sites | |||||
70 | Nanospec Total Thickness After Etching (nm) | |||||
71 | Site 1: | 1964.77 | 2167.73 | 1236.98 | 2659.95 | |
72 | Site 2: | 1955.25 | 2160.73 | 1238.66 | 2681.3 | |
73 | Site 3: | 1964.74 | 2154.55 | 1252.81 | 2689.02 | |
74 | Site 4: | 1967.75 | 2157.84 | 1243.99 | 2688.21 | |
75 | Site 5: | 1927.31 | 2142 | 1227.23 | 2525.73 | |
76 | Average: | 1955.964 | 2156.57 | 1239.934 | 2648.842 | |
77 | Nanospec PR Thickness After Etching not Including Material (nm) | |||||
78 | Site 1: | 1721.79 | 1795.23 | 1236.98 | 2074.04 | |
79 | Site 2: | 1720.03 | 1800.63 | 1238.66 | 2087.82 | |
80 | Site 3: | 1736.43 | 1809.32 | 1252.81 | 2092.15 | |
81 | Site 4: | 1736.93 | 1805.16 | 1243.99 | 2090.98 | |
82 | Site 5: | 1706.36 | 1806.99 | 1227.23 | 1912.24 | |
83 | Average: | 1724.308 | 1803.466 | 1239.934 | 2051.446 | |
84 | Tencor PR Step After Etching | |||||
85 | Site 1: | 2167 | 1931 | 8777.3 | 2176 | |
86 | Site 2: | 2238.7 | 1909 | 8701.2 | 2153 | |
87 | Site 3: | 2191.9 | 1907 | 8864.8 | 2155 | |
88 | Site 4: | 2193.2 | 1908 | 8834.5 | 2152 | |
89 | Site 5: | 2376.2 | 1918 | 8846.2 | 2168 | |
90 | Average: | 2233.4 | 1914.6 | 8804.8 | 2160.8 | |
91 | Tencor Etched PR Depth Sites (nm) | |||||
92 | Site 1: | 265.80 | 213.90 | 720.20 | 2.00 | 14.41 |
93 | Site 2: | 341.40 | 214.10 | 672.70 | 20.50 | 3.06 |
94 | Site 3: | 264.80 | 219.10 | 641.10 | 46.50 | #DIV/0! |
95 | Site 4: | 257.10 | 213.70 | 644.10 | 24.50 | 7.70 |
96 | Site 5: | 333.80 | 227.00 | 618.70 | 9.40 | 108.11 |
97 | Tencor Average Etched PR Depth (nm): | 292.58 | 217.56 | 659.36 | 20.58 | |
98 | Nanospec Etched PR Depth Sites(nm) | |||||
99 | Site 1: | 263.62 | 233.54 | 709.25 | 139.69 | 27.78 |
100 | Site 2: | 453.12 | 225.01 | 712.83 | 53.70 | 5.69 |
101 | Site 3: | 439.28 | 214.23 | 700.85 | 150.27 | #DIV/0! |
102 | Site 4: | 263.83 | 208.65 | 704.51 | 148.59 | 1.18 |
103 | Site 5: | 474.09 | 213.05 | 717.54 | 95.28 | 41.09 |
104 | Average Nanospec PR Etch | 378.79 | 218.90 | 709.00 | 117.51 |
1 | Material: | Cr | Cr | 1813 PR | Cr | Poly or Si | SiN | SiO2 | Al | Cr |
|---|---|---|---|---|---|---|---|---|---|---|
2 | Thickness (nm) | |||||||||
3 | Gas1: | O2 | O2 | O2 | O2 | O2 | ||||
4 | Gas1 Flow (sccm): | 20 | 20 | 20 | 20 | 2 | ||||
5 | Gas2: | Cl2 | Cl2 | Cl2 | Cl2 | Cl2 | ||||
6 | Gas2 Flow (sccm): | 20 | 20 | 20 | 20 | 40 | ||||
7 | Gas3: | |||||||||
8 | Gas3 Flow (sccm): | |||||||||
9 | Pressure (mT): | 150 | 150 | 150 | 150 | 150 | ||||
10 | Power (W): | 200 | 200 | 200 | 200 | 200 | ||||
11 | Time (min): | 2 | 3.5 | 3.5 | 3.25 | |||||
12 | Tencor Material Etch Rate (nm/min): | 54.79 | 53.29 | 40.00 | 43.93 | 66.63 | ||||
13 | Nanospec Material Etch Rate (nm/min) | 55.09 | ||||||||
14 | Tencor Material Etch Uniformity: | 16.11 | 23.24 | 46.08 | 35.67 | 3.67 | ||||
15 | Nanospec Material Etch Uniformity: (+/- XX%) | 4.93 | ||||||||
16 | Tencor 1813 PR Etch Rate (nm/min) | 55.09 | ||||||||
17 | Nano 1813 PR Etch Rate (nm/min) | 55.91 | 24.09 | |||||||
18 | Thickness of material (nm) | |||||||||
19 | Site 1: | |||||||||
20 | Site 2: | |||||||||
21 | Site 3: | |||||||||
22 | Site 4: | |||||||||
23 | Site 5: | |||||||||
24 | Average: | |||||||||
25 | Tencor Step After PR Strip Sites (nm) | |||||||||
26 | Site 1: | 116.9 | 226.6 | 204.9 | 217.4 | |||||
27 | Site 2: | 122.9 | 179.8 | 181.3 | 208.7 | |||||
28 | Site 3: | 119.5 | 198.5 | 149.2 | 208.8 | |||||
29 | Site 4: | 101 | 187.7 | 138.2 | 224.6 | |||||
30 | Site 5: | 87.6 | 139.9 | 95.2 | 223.2 | |||||
31 | Average: | 109.58 | 186.5 | 153.76 | 216.54 | |||||
32 | Nanospec Depth After PR Strip Sites (nm) | |||||||||
33 | Site 1: | |||||||||
34 | Site 2: | |||||||||
35 | Site 3: | |||||||||
36 | Site 4: | |||||||||
37 | Site 5: | |||||||||
38 | Average: | |||||||||
39 | Nanospec Etched Thickness Sites (nm) | |||||||||
40 | Site 1: | 0 | 0 | |||||||
41 | Site 2: | 0 | 0 | |||||||
42 | Site 3: | 0 | 0 | |||||||
43 | Site 4: | 0 | 0 | |||||||
44 | Site 5: | 0 | 0 | |||||||
45 | Average: | 0 | 0 | |||||||
46 | PR Sites Before Etching | |||||||||
47 | Nanospec Total Thickness of Pr Before Etching (nm) | |||||||||
48 | Site 1: | |||||||||
49 | Site 2: | |||||||||
50 | Site 3: | |||||||||
51 | Site 4: | |||||||||
52 | Site 5: | |||||||||
53 | Average: | |||||||||
54 | Nanospec PR Thickness Not Including Material (nm) | |||||||||
55 | Site 1: | 1993 | 1982 | |||||||
56 | Site 2: | 1985 | 1975 | |||||||
57 | Site 3: | 1989 | 1982 | |||||||
58 | Site 4: | 1991 | 1974 | |||||||
59 | Site 5: | 1992 | 1975 | |||||||
60 | Average: | 1990 | 1977.6 | #DIV/0! | ||||||
61 | Tencor PR Before Etching | |||||||||
62 | Site 1: | 1952 | 1881 | |||||||
63 | Site 2: | 1949 | 1898 | |||||||
64 | Site 3: | 1950 | 1967 | |||||||
65 | Site 4: | 1946 | 1956 | |||||||
66 | Site 5: | 1965 | 1941 | |||||||
67 | Average: | 1952.4 | 1928.6 | #DIV/0! | ||||||
68 | PR Step After Etching Sites | |||||||||
69 | Nanospec Total Thickness After Etching (nm) | |||||||||
70 | Site 1: | |||||||||
71 | Site 2: | |||||||||
72 | Site 3: | |||||||||
73 | Site 4: | |||||||||
74 | Site 5: | |||||||||
75 | Average: | #DIV/0! | #DIV/0! | |||||||
76 | Nanospec PR Thickness After Etching not Including Material (nm) | |||||||||
77 | Site 1: | 1785 | ||||||||
78 | Site 2: | 1774 | ||||||||
79 | Site 3: | 1800 | ||||||||
80 | Site 4: | 1787 | ||||||||
81 | Site 5: | 1778 | ||||||||
82 | Average: | #DIV/0! | 1784.8 | #DIV/0! | ||||||
83 | Tencor PR Step After Etching | |||||||||
84 | Site 1: | 1967 | 2101 | |||||||
85 | Site 2: | 1980 | 2084 | |||||||
86 | Site 3: | 1949 | 2106 | |||||||
87 | Site 4: | 1914 | 1966 | |||||||
88 | Site 5: | 2025 | 1897 | |||||||
89 | Average: | 1967 | 2030.8 | #DIV/0! | ||||||
90 | Tencor Etched PR Depth Sites (nm) | |||||||||
91 | Site 1: | 101.90 | 6.60 | 18.38 | 0.00 | |||||
92 | Site 2: | 91.90 | -6.20 | 73.78 | 0.00 | |||||
93 | Site 3: | 120.50 | 59.50 | 0.00 | ||||||
94 | Site 4: | 133.00 | 177.70 | 0.00 | ||||||
95 | Site 5: | 27.60 | 183.90 | 0.00 | ||||||
96 | Tencor Average Etched PR Depth (nm): | 111.83 | 84.30 | 0.00 | ||||||
97 | Nanospec Etched PR Depth Sites(nm) | |||||||||
98 | Site 1: | 197.00 | 4.93 | |||||||
99 | Site 2: | 201.00 | ||||||||
100 | Site 3: | 182.00 | ||||||||
101 | Site 4: | 187.00 | ||||||||
102 | Site 5: | 197.00 | ||||||||
103 | Average Nanospec PR Etch | 192.80 | ||||||||
104 | ||||||||||
105 | ||||||||||
106 | ||||||||||
107 | ||||||||||
108 | ||||||||||
109 | ||||||||||
110 | ||||||||||
111 |
1 | Recipe: | bpretch2 | bpretch2 | bpretch2 | bpretch2 |
|---|---|---|---|---|---|
2 | Material: | 1813 PR | 1813 PR | Parylene | Parylene |
3 | Thickness (nm) | ||||
4 | Gas1: | O2 | O2 | O2 | O2 |
5 | Gas1 Flow (sccm): | 50 | 50 | 50 | 50 |
6 | Gas2: | ||||
7 | Gas2 Flow (sccm): | ||||
8 | Gas3: | ||||
9 | Gas3 Flow (sccm): | ||||
10 | Pressure (mT): | 20 | 20 | 20 | 20 |
11 | Power (W): | 200 | 200 | 200 | 200 |
12 | Time (min): | 1.5 | 5 | 2 | 2 |
13 | Tencor Material Etch Rate (nm/min): | 163.61 | 199.23 | 223.29 | 205.71 |
14 | Nanospec Material Etch Rate (nm/min) | 195.36 | 209.72 | ||
15 | Tencor Material Etch Uniformity: | 10.41 | 8.14 | 1.22 | 2.25 |
16 | Nanospec Material Etch Uniformity: (+/- XX%) | 2.49 | 1.48 | ||
17 | Tencor 1813 PR Etch Rate (nm/min) | 163.61 | 199.23 | 191.29 | 203.01 |
18 | Nano 1813 PR Etch Rate (nm/min) | 195.36 | 209.72 | 210.73 | 203.82 |
19 | Thickness of material (nm) | ||||
20 | Site 1: | 1943.6 | 1949.83 | 626 | 626 |
21 | Site 2: | 1938.69 | 1946.46 | 626 | 626 |
22 | Site 3: | 1936.58 | 1947 | 626 | 626 |
23 | Site 4: | 1945 | 1950.54 | 626 | 626 |
24 | Site 5: | 1935.54 | 1942.5 | 626 | 626 |
25 | Average: | 1,939.88 | 1,947.27 | 626.00 | 626.00 |
26 | Tencor Step After PR Strip Sites (nm) | ||||
27 | Site 1: | 241.7 | 946 | 452.7 | 418.7 |
28 | Site 2: | 217.8 | 1070.1 | 445.2 | 413.9 |
29 | Site 3: | 236.8 | 908 | 441.8 | 415.4 |
30 | Site 4: | 261.9 | 1039.2 | 442.5 | 408.9 |
31 | Site 5: | 268.9 | 1017.5 | 450.7 | 400.2 |
32 | Average: | 245.42 | 996.16 | 446.58 | 411.42 |
33 | Nanospec Depth After PR Strip Sites (nm) | ||||
34 | Site 1: | 1645.89 | 898.44 | ||
35 | Site 2: | 1642.47 | 883.47 | ||
36 | Site 3: | 1653.45 | 914.97 | ||
37 | Site 4: | 1648.9 | 902.3 | ||
38 | Site 5: | 1643.52 | 894.04 | ||
39 | Average: | 1,646.85 | 898.64 | ||
40 | Nanospec Etched Thickness Sites (nm) | ||||
41 | Site 1: | 297.71 | 1051.39 | ||
42 | Site 2: | 296.22 | 1062.99 | ||
43 | Site 3: | 283.13 | 1032.03 | ||
44 | Site 4: | 296.1 | 1048.24 | ||
45 | Site 5: | 292.02 | 1048.46 | ||
46 | Average: | 293.04 | 1,048.62 | ||
47 | PR Sites Before Etching | ||||
48 | Nanospec Total Thickness of Pr Before Etching (nm) | ||||
49 | Site 1: | 1943.6 | 1949.83 | 2483.42 | 2456.16 |
50 | Site 2: | 1938.69 | 1946.46 | 2485.45 | 2483.69 |
51 | Site 3: | 1936.58 | 1947 | 2489.32 | 2433.61 |
52 | Site 4: | 1945 | 1950.54 | 2493.25 | 2452.75 |
53 | Site 5: | 1935.54 | 1942.5 | 2490.43 | 2442.8 |
54 | Average: | 1939.882 | 1947.266 | 2488.374 | 2453.802 |
55 | Nanospec PR Thickness Not Including Material (nm) | ||||
56 | Site 1: | 0.00 | 0.00 | 1,857.42 | 1,830.16 |
57 | Site 2: | 0.00 | 0.00 | 1,859.45 | 1,857.69 |
58 | Site 3: | 0.00 | 0.00 | 1,863.32 | 1,807.61 |
59 | Site 4: | 0.00 | 0.00 | 1,867.25 | 1,826.75 |
60 | Site 5: | 0.00 | 0.00 | 1,864.43 | 1,816.80 |
61 | Average: | 0 | 0 | 1862.374 | 1827.802 |
62 | Tencor PR Before Etching | ||||
63 | Site 1: | 1931.7 | 1949 | 1897 | 1863 |
64 | Site 2: | 1912.8 | 1992 | 1915 | 1880 |
65 | Site 3: | 1926.8 | 1928 | 1905 | 1875 |
66 | Site 4: | 1938.9 | 1949 | 1911 | 1866 |
67 | Site 5: | 1949.9 | 1949 | 1912 | 1896 |
68 | Average: | 1932.02 | 1953.4 | 1908 | 1876 |
69 | PR Step After Etching Sites | ||||
70 | Nanospec Total Thickness After Etching (nm) | ||||
71 | Site 1: | 1645.89 | 898.44 | 2067.16 | 2047.05 |
72 | Site 2: | 1642.47 | 883.47 | 2062.7 | 2048.28 |
73 | Site 3: | 1653.45 | 914.97 | 2071.45 | 2053.38 |
74 | Site 4: | 1648.9 | 902.3 | 2062.65 | 2047.18 |
75 | Site 5: | 1643.52 | 894.04 | 2070.57 | 2034.93 |
76 | Average: | 1,646.85 | 898.64 | 2,066.91 | 2,046.16 |
77 | Nanospec PR Thickness After Etching not Including Material (nm) | ||||
78 | Site 1: | 297.71 | 1,051.39 | 1441.16 | 1421.05 |
79 | Site 2: | 296.22 | 1,062.99 | 1436.7 | 1422.28 |
80 | Site 3: | 283.13 | 1,032.03 | 1445.45 | 1427.38 |
81 | Site 4: | 296.10 | 1,048.24 | 1436.65 | 1421.18 |
82 | Site 5: | 292.02 | 1,048.46 | 1444.57 | 1408.93 |
83 | Average: | 293.036 | 1048.622 | 1440.906 | 1420.164 |
84 | Tencor PR Step After Etching | ||||
85 | Site 1: | 1690 | 1003 | 1,985.00 | 1912 |
86 | Site 2: | 1695 | 921.9 | 1,952.00 | 1848 |
87 | Site 3: | 1690 | 1020 | 1,986.00 | 1866 |
88 | Site 4: | 1677 | 909.8 | 1,976.00 | 1918 |
89 | Site 5: | 1681 | 931.5 | 1,961.00 | 1863 |
90 | Average: | 1686.6 | 957.24 | 1972 | 1881.4 |
91 | Tencor Etched PR Depth Sites (nm) | ||||
92 | Site 1: | 241.70 | 946.00 | 364.70 | 369.70 |
93 | Site 2: | 217.80 | 1,070.10 | 408.20 | 445.90 |
94 | Site 3: | 236.80 | 908.00 | 360.80 | 424.40 |
95 | Site 4: | 261.90 | 1,039.20 | 377.50 | 356.90 |
96 | Site 5: | 268.90 | 1,017.50 | 401.70 | 433.20 |
97 | Tencor Average Etched PR Depth (nm): | 245.42 | 996.16 | 382.58 | 406.02 |
98 | Nanospec Etched PR Depth Sites(nm) | ||||
99 | Site 1: | 297.71 | 1,051.39 | 416.26 | 409.11 |
100 | Site 2: | 296.22 | 1,062.99 | 422.75 | 435.41 |
101 | Site 3: | 283.13 | 1,032.03 | 417.87 | 380.23 |
102 | Site 4: | 296.10 | 1,048.24 | 430.60 | 405.57 |
103 | Site 5: | 292.02 | 1,048.46 | 419.86 | 407.87 |
104 | Average Nanospec PR Etch | 293.04 | 1,048.62 | 421.47 | 407.64 |
1 | Material: | W | W | W | Ti | W | Ti | Si | SiN | SiO2 |
|---|---|---|---|---|---|---|---|---|---|---|
2 | Thickness (nm) | 400 | 400 | 400 | 400 | 400 | 400 | |||
3 | Gas1: | SF6 | SF6 | SF6 | SF6 | SF6 | SF6 | |||
4 | Gas1 Flow (sccm): | 25 | 25 | 25 | 25 | 25 | 25 | |||
5 | Gas2: | CF4 | CF4 | CF4 | CF4 | CF4 | CF4 | |||
6 | Gas2 Flow (sccm): | 10 | 10 | 10 | 10 | 10 | 10 | |||
7 | Gas3: | O2 | O2 | O2 | O2 | O2 | O2 | |||
8 | Gas3 Flow (sccm): | 3.5 | 3.5 | 3.5 | 3.5 | 3.5 | 3.5 | |||
9 | Pressure (mT): | 75 | 75 | 75 | 75 | 75 | 75 | |||
10 | Power (W): | 150 | 150 | 150 | 150 | 150 | 150 | |||
11 | Time (min): | 3 | 1.5 | 1.5 | 1.5 | 2.75 | 10 | |||
12 | Tencor Material Etch Rate (nm/min): | 89.69 | 140.87 | 157.60 | 43.35 | |||||
13 | Nanospec Material Etch Rate (nm/min) | |||||||||
14 | Tencor Material Etch Uniformity: | 10.35 | 5.09 | 5.46 | 6.38 | |||||
15 | Nanospec Material Etch Uniformity: (+/- XX%) | |||||||||
16 | Tencor 1813 PR Etch Rate (nm/min) | 87.55 | 64.51 | |||||||
17 | Nano 1813 PR Etch Rate (nm/min) | 88.12 | 80.41 | |||||||
18 | Thickness of material (nm) | |||||||||
19 | Site 1: | |||||||||
20 | Site 2: | |||||||||
21 | Site 3: | |||||||||
22 | Site 4: | |||||||||
23 | Site 5: | |||||||||
24 | Average: | |||||||||
25 | Tencor Step After PR Strip Sites (nm) | |||||||||
26 | Site 1: | 241.2 | 221.3 | 250.8 | 63.9 | |||||
27 | Site 2: | 282.7 | 209.9 | 225 | 62.2 | |||||
28 | Site 3: | 248 | 219.9 | 234.6 | 66.3 | |||||
29 | Site 4: | 276.5 | 205.6 | 242 | 62.2 | |||||
30 | Site 5: | 296.9 | 199.8 | 229.6 | 70.5 | |||||
31 | Average: | 269.06 | 211.3 | 236.4 | 65.02 | |||||
32 | Nanospec Depth After PR Strip Sites (nm) | |||||||||
33 | Site 1: | |||||||||
34 | Site 2: | |||||||||
35 | Site 3: | |||||||||
36 | Site 4: | |||||||||
37 | Site 5: | |||||||||
38 | Average: | |||||||||
39 | Nanospec Etched Thickness Sites (nm) | |||||||||
40 | Site 1: | |||||||||
41 | Site 2: | |||||||||
42 | Site 3: | |||||||||
43 | Site 4: | |||||||||
44 | Site 5: | |||||||||
45 | Average: | |||||||||
46 | PR Sites Before Etching | |||||||||
47 | Nanospec Total Thickness of Pr Before Etching (nm) | |||||||||
48 | Site 1: | 2026.47 | 2041.32 | |||||||
49 | Site 2: | 2019.42 | 2037.33 | |||||||
50 | Site 3: | 2018.72 | 2037.59 | |||||||
51 | Site 4: | 2024.48 | 2046.94 | |||||||
52 | Site 5: | 2028.44 | 2034.21 | |||||||
53 | Average: | 2023.506 | 2039.478 | |||||||
54 | Nanospec PR Thickness Not Including Material (nm) | |||||||||
55 | Site 1: | 2026.47 | 2041.32 | |||||||
56 | Site 2: | 2019.42 | 2037.33 | |||||||
57 | Site 3: | 2018.72 | 2037.59 | |||||||
58 | Site 4: | 2024.48 | 2046.94 | |||||||
59 | Site 5: | 2028.44 | 2034.21 | |||||||
60 | Average: | 2023.506 | 2039.478 | #DIV/0! | #DIV/0! | |||||
61 | Tencor PR Before Etching | |||||||||
62 | Site 1: | 2008 | 2009 | |||||||
63 | Site 2: | 1989 | 2015 | |||||||
64 | Site 3: | 1998 | 2032 | |||||||
65 | Site 4: | 1998 | 2027 | |||||||
66 | Site 5: | 2006 | 2017 | |||||||
67 | Average: | 1999.8 | 2020 | #DIV/0! | #DIV/0! | |||||
68 | PR Step After Etching Sites | |||||||||
69 | Nanospec Total Thickness After Etching (nm) | |||||||||
70 | Site 1: | 1767.08 | 1917.6 | |||||||
71 | Site 2: | 1755.19 | 1912.46 | |||||||
72 | Site 3: | 1769.73 | 1921.23 | |||||||
73 | Site 4: | 1756.99 | 1925.45 | |||||||
74 | Site 5: | 1746.74 | 1917.59 | |||||||
75 | Average: | 1759.146 | 1918.866 | |||||||
76 | Nanospec PR Thickness After Etching not Including Material (nm) | |||||||||
77 | Site 1: | 1767.08 | 1917.6 | |||||||
78 | Site 2: | 1755.19 | 1912.46 | |||||||
79 | Site 3: | 1769.73 | 1921.23 | |||||||
80 | Site 4: | 1756.99 | 1925.45 | |||||||
81 | Site 5: | 1746.74 | 1917.59 | |||||||
82 | Average: | 1759.146 | 1918.866 | #DIV/0! | #DIV/0! | |||||
83 | Tencor PR Step After Etching | |||||||||
84 | Site 1: | 1973 | 2217 | |||||||
85 | Site 2: | 2016 | 2163 | |||||||
86 | Site 3: | 2003 | 2164 | |||||||
87 | Site 4: | 2018 | 2161 | |||||||
88 | Site 5: | 2021 | 2086 | |||||||
89 | Average: | 2006.2 | 2158.2 | #DIV/0! | #DIV/0! | |||||
90 | Tencor Etched PR Depth Sites (nm) | |||||||||
91 | Site 1: | 276.2 | 13.30 | 0.00 | 0.00 | |||||
92 | Site 2: | 255.7 | 61.90 | 0.00 | 0.00 | |||||
93 | Site 3: | 243 | 87.90 | 0.00 | 0.00 | |||||
94 | Site 4: | 256.5 | 71.60 | 0.00 | 0.00 | |||||
95 | Site 5: | 281.9 | 130.80 | 0.00 | 0.00 | |||||
96 | Tencor Average Etched PR Depth (nm): | 262.66 | 96.77 | 0.00 | 0.00 | |||||
97 | Nanospec Etched PR Depth Sites(nm) | |||||||||
98 | Site 1: | 259.39 | 123.72 | |||||||
99 | Site 2: | 264.23 | 124.87 | |||||||
100 | Site 3: | 248.99 | 116.36 | |||||||
101 | Site 4: | 267.49 | 121.49 | |||||||
102 | Site 5: | 281.7 | 116.62 | |||||||
103 | Average Nanospec PR Etch | 264.36 | 120.612 |