TMV Sputter Rates
TMV SPUTTER RATES (Approximate)
Au at 50 W = 20 nm/min
Au at 90 W = 41 nm/min
Au at 200 W = 75 nm/min
Pt at 200 W = 46 nm/min
Pt at 90 W = 18 nm/min
Ir at 100 W = 20 nm/min
IrO at 90 W = 13 nm/min
Cr at 180 W = 16 nm/min
Cr at 90 W = 8 nm/min
Ti at 90 W = 7nm/min
TiW at 45 W = 6 nm/min