Utah Nanofab General Update

• New rates and caps took effect July ‘14 with a simplified approach that eliminates charges for time in the lab, and provides online tools for PI’s to evaluate real-time cost tracking
• Utah was selected as the host institution for the 2016 worldwide conference of peer cleanroom administrators: http://ugim.nanofab.utah.edu
• Use of the Nanofab preliminary data seed fund (3 months use reimbursed) not heavily used /utah-nanofab-preliminary-data-seed-fund-application

Cleanroom:

• All formal course-based laboratories are now relocated to SMBB cleanroom teaching labs as of Spring semester ‘15
• Move from MEB will be complete by May, 2015 (only remaining tools/capabilities to be relocated include TMV (precious metals sputtering), electroplating, gold etch, LPCVD, solid state doping, and w/d ox)
• sub-u mask-making is now available through acquisition of a second Heidelberg (nanofab reserve tool funds)
• RTA/RTP (new capability through RIF mechanism) will become available by May, 2015
• Prof. Tabib-Azar has written a DURIP proposal to bring in EBL (pending)
• Prof. Gale is leading a proposal to create an NNCI (previously NNIN) node at Utah
• Prof. Guruswamy is leading a proposal for an NSF MIP (Materials Innovation Platform)
• Prof. Hanseup Kim is leading an MRI effort for controlled Si (DRIE and shallow poly) etch + oxide/nitride/carbide etch in an advanced SPTS cluster tool
• Prof. Rajesh Menon led a pending RIF proposal for controlled electroplating
• Prof. Ross Walker led RIF proposal last year and this year establishing an advanced electrical characterization user lab
• Prof. Bruce Gale led a RIF pending proposal to establish a microfluidics prototyping user facility
• Prof. Florian Solzbacher led an effort to create the Center for Engineering Innovation, including the acquisition of new tools: laser microwelding, uWire EDM, UV curing, digital comparator, expert access to machine tools…)
• Prof. Ghandehari offered his Scanning Confocal Fluorescence microscope for use as a satellite tool administered by the HSC Fluorescence core, in order to improve the quality of expert support in SMBB for SCFM
• Brian Baker and Ian Harvey led a pending Core RIF proposal to acquire a Keyence imaging system and to install two donated etch process tools from Fairchild Semiconductor
• Next target tool acquisition: advanced sputtering capability, including feedback controlled reactive sputtering

Surface Lab:

• S/TEM with ultrafast EDS is available for use: Training is ongoing as-needed, or staff are available to assist. FIB/STEM made possible by USTAR/MRSEC
• Dr. David Belnap (HSC EM Core) led a Core RIF proposal to acquire Cryo EM (with plasma sample cleaner), for use with his JEM1400 and with the new JEM2800 / dualEDS
• The Bruker D8 XRD is going to be relocating to the XRD recharge center in the Metallurgy department where it can be better supported, and can better support both MRSEC and MIP (Prof. Guruswamy)
• Next target Instrument acquisition is for nXCT (sub micron resolution over 2-4" sample)